壓電式微致動閥之設計與製作 吳東益、鄭江河
E-mail: 9806442@mail.dyu.edu.tw
摘 要
本文提出設計、實驗及製作出主動式微閥門應用在微幫浦。致動器是選用壓電材料，當驅動壓電致動器產生單軸向位移後 可使微閥門達到開啟或關閉的動作。本微閥門結構設計上有兩種樣式，正常狀態下微閥門關閉或開啟。工作流體採用去離 子水(De Ion Water)，透過壓電式微幫浦輸出流率11.29~22.23 ml/min及6~12 kPa的水壓，當搭配正常狀態下微閥門關閉的 結構，給予致動器電壓從0 V到100 V，流率為0.02~2.13 ml/min，每分鐘最大流量誤差為1.4~10%；當搭配正常狀態下微 閥門開啟的結構，流率為0.01~3.19 ml/min，每分鐘最大流量差誤為0.9~10%。
關鍵詞 : 主動式微閥門、壓電致動器、流率、微流量
目錄
第一章 緒論 1 1.1前言 1 1.2研究動機 2 1.3文獻回顧 2
第二章 壓電式微致動閥之設計與分析 9 2.1壓電式微致動閥之設計 9
2.2模擬分析結構元件規格設定 11
2.3相同PZT搭配不同厚度轉接板之位移分析 13 2.4不同厚度轉接板實際測試與模擬分析比較 14 第三章 微閥門結構元件製作 16
3.1黃光製程 16 3.2蝕刻製程 17
3.3蝕刻測試與速率探討 19 3.4 PDMS製作流程 21 3.5壓電致動器之製作 22 3.6壓電式微致動閥組裝 24 第四章 實驗量測與探討 25 4.1設備架設說明與前置量測 25 4.2壓電式微致動閥流量量測 30
4.2.1不同入水壓力下NC閥與NO閥的流量量測 30 4.2.2 NC閥與NO閥在長時間做動下的流量量測 34 4.3入水壓經過NC閥與NO閥後的壓力量測 34 第五章 結論 39
參考文獻 40 參考文獻
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