୯ҥᆵεᏢπᏢଣᐒఓπำᏢس ᅺγፕЎ
Department of Mechanical Engineering College of Engineering
National Taiwan University Master Thesis
ΟືഈၡڼԯۓՏठسϐ!
ी໒วᆶ܄ࣴز!
Design and Development of a 3-axes Close-looped Nano-scale Positioning System
ቅߞ
Hsin-Ting, Liu
ࡰᏤ௲ǺӀျ റγ
Advisor: Kuang-Yuh Huang, Dr.-Ing.
ύ҇୯ 97 ԃ 6 Д
ᇞᖴ!
!
ӧ೭္ךाགᖴ܌ԖࡰᏤᆶႴᓰךޑΓǶᖴᖴǼ!
!ಃঁाགᖴޑࢂࡰᏤ௲ӀျԴৣவεΟаٰޑಒЈ௲ᏤǴᡣךவᗭ λᖥํ໒ۈ҅Ꮲಞډᐒఓπำ೭ߐᏢୢǴԶவπำკύޑჄགڙډঁ
Γ၀ԖޑಒЈǵॄೢᆶํόवǴ٠ЪӧፕЎՉޑၸำύǴ឴࣊ᅵਔ໔Զό ᜏٌമޑࡰᏤךǴԖΑԴৣޑᔅշǴω٬ޑךޑፕЎளаፍғǹӕਔΨགᖴԴৣ
ᡣךԖᐒـΑቺ୯ǴڙঘభǶ٠Ъགᖴጰள҇௲ᆶ݅؊ဂ௲Ǵჹܭፕ Ўޑόսࡰ҅ᆶගٮᝊޑࡌǴ٬ҁፕЎޑϣ׳ᑪֹ๓ǴӧԜठҗ૱ޑག ٵǶќБय़׳གᖴύࣴଣޑमᅺԴৣǴຼჹךޑࣴزࡋѕᓲᆶࡰᏤǴ ᡣךӧჴᡍύפډрၡǶΨགᖴШӀ௲ǵ։ԴৣϷࡼᒴ௲ӧό ӕޑਔ໔ᗺǴӧޕޑ៶࣬ԶᔅշךӧӀᏢၡճՉوǶ!
! གᖴύࣴଣޑৱቺᏢߏǵറඳᏢߏǵӃᏢߏǵಏখᏢߏаϷ҅మᏢߏޑਭ
Ǵ๏ΑךࡐεޑᏢಞᐒΨ๏Αךࣴزޑޜ໔аϷӧፕЎՉਔޑჹךޑᄋඉ
࣬շǶӆٰाགᖴ٫ᓄᏢߏکۢؼᏢߏӧᆙाᜢᓐޑࡰᏤکံ௱Ǵᡣךૈճ
ǶΨाགᖴࡏԓᏢߏکࡌᓪᏢߏவᚒޑӝբၸำύᡣךᗺᗺԋߏǶ׳གᖴ ۺکߓ⊭Ꮲߏ๏ךޑӀᏢ௴ᆾаϷݒ܃Ꮲۆ๏ךޑӀᏢλှเǶ!
! ! གᖴаεৎ឴࣊Ծρޑਔ໔ԶჹךޑᇡਭǴӭᖝΑգॺǴךளаय
֧ǶԶઠӧգॺޑުᆮǴᡣך࣮ޑ׳ᇻǶ!
! ! གᖴٿԃٰӅӕޑࠡӹǵӹ݇ǵᅺࡏکຽǴଆჴᡍǵѺፕЎکೱ ጕǴԜᒏӕҒधԶӅ٦ǴᡣӧፕЎϐᖑᔴӷ္Չ໔ݽՉޑךǴόېൂϸԶ഻
ǶགᖴᔈΚ܌ޑӕᏢॺϷᐒఓ܌ޑӕᏢॺǴᕴࢂाךޑୢᚒѺᘋǶᗋाགᖴ ୯ᜅǵ̃хǵεܴǵঅঢکλᏢॺޑഉՔаϷᗱጎޑԳզӧሺᏔޑڐշǶ!
! നࡕǴགᖴךৎΓޑЍǵႴᓰᆶޭۓǴᡣךૈԖߞЈޑԾҗᗌǹགᖴ
ၡഉՔךوٰޑԖఈǴգᡣधᔴޑВηΨၸٰҒᎇǴ٠Ъӧԛךᒨᅪൽ
ᄔा!
! !
!
! ଯᆒࡋۓՏѳѠՔᒿᆒஏࣽמϐวǴڼԯભှࡋޑۓՏѳѠ׳תᄽΑڼ ԯࣽמวϐख़ाفՅǶҁፕЎаᓸႝϡҹբࣁठسǴԶаӄႽೌ EWE ᠐ڗ ᓐࣁໆෳسǴ໒วΟືۓՏѳѠǶᓸႝϡҹதၮҔډ༾ԯаΠޑठᏔ
ǴҗᆒዴޑႝᓸڋҭёᕇளڼԯભޑՏ౽ှǴՠനεՉำࠅڙज़ܭځ൳ ՖЁκǶࣁΑᘉεठՉำǴҁፕЎ௦Ҕคङሜϐኙ܄่ᄬٰܫεᓸႝϡҹϐՉ ำǴ٠ၸፕϩаϷ೬ᡏኳᔕٰՉำܫεਏ݀ᆶኙ܄่ᄬ൳ՖѦϐᜢ
߯ǶࣁΑ߆ӝठՉำϐܫεǴႽණԄՏ౽ໆෳسΨճҔׯᡂނ᜔ขߏБԄǴ
ٰගܹځՏ౽ໆෳጄൎǶନԜϐѦǴ٠௦ҔᡏᑈཱུࣁᆙጏޑӄႽӀᅷᐒ᠐ڗᓐբ ࣁՏ౽གෳᏔǴ٬ᡏسᡏᑈ׳ӭᕭλǴ׳ԖΚܭڼԯۓՏѳѠϐၮҔک
ቶǶۓՏѳѠϐՉำǵጕ܄ᇤৡǵख़܄ᇤৡϷှࡋ܄Ψၸჴᡍෳ၂Б ԄϒаᡍǶ
ᜢᗖӷǺӄႽೌ DVD ᠐ڗᓐǵᓸႝठᏔǵՏ౽ໆෳǵᆫขᇤৡૻဦǵጕ܄ጄ ൎǵኙ܄่ᄬ
!
Design and Development of a 3-axes Close-looped Nano-scale Positioning System
Liu, Hsin-Ting
Abstract
ʳ ʳ High-resolution position stage is the footstone of the precision technology. A nano-level resolution positioning stage plays a important role in the development of nanotechnology. This paper proposes a 3-axis positioning stage built up by piezoelectric actuators as the actuating system and HOE-DVD pickup head as the displacement measurement system. Piezoelectric units are often used in micro-level actuator; by using the precise voltage control piezoelectric units can also fulfill a nano-level actuation. In order to increase the stroke of piezoelectric actuator, a flexible structure without backlash and friction is utilized. Its relationship between the displacement amplifying effect and the geometric parameters of flexible structure is studied by the theoretical analysis and the finite element analysis. For matching the actuation stroke, the optical displacement measurement system is modified by varying focal length of the lens. Besides, the elaborate application of the miniature HOE pickup head makes the whole system more compact to promote the widespreading application of the nano-level positioning systems. Furthermore, diverse properties of the positioning stage including stroke, linearity, repeatability and resolution are verified by experimental testings.
Keywords: HOE-DVD pickup head, piezoelectric actuators, displacement measurement, focus error signal, linear range, flexible structure
Ҟ ᒵ
α၂ہቩۓਜ………... i
ᇞᖴ………... ………. ii
ύЎᄔा………... ……… iii
मЎᄔा………... …………. iv
Ҟᒵ……… ...……… V ߄Ҟᒵ ... VII კҞᒵ... VIIIi ಄ဦ߄ ... XI ಃക ᆣፕ 1 1.1 ࣴزङඳᆶᐒ 1
1.2࣬ᜢЎӣ៝ 3
1.2.1 ᓸႝठس 3 1.2.2 ߚௗԄໆෳس 4 1.3ࣴزҞ 6
1.4ϣᙁϟ 7
ಃΒക ΟືՏ౽ۓՏس 8 2.1 фૈᆶᄬགྷ 8
2.2 ᡏࢎᄬ ! ! ! 13 ಃΟക ᓸႝԄठηس ! 16
3.1 ᓸႝচᆶ܄ 16
3.1.1ᓸႝਏᔈ 16 3.1.2ᓸႝϐߚጕ܄܄ 17 3.1.3ᓸႝޑখ܄ 19
3.1.4ᓸႝϡҹᔈᡂ߄Ԅ 21
3.2 Տ౽ܫεᓸႝठᏔϐ൳Ֆᄬी 25
4/3/2 ኙ܄Տ౽ܫε่ᄬ! ! ! ! ! ! ! ! 25!
4/3/3!Տ౽ܫε่ᄬ! ! ! ! ! ! ! ! 25!
4/3/4 ༝ቸᘽᒳТϐՏ౽ܫεᐒᄬ!! ! ! ! ! 30!
3.2.4 ᐍ༝ቸᘽᒳТϐՏ౽ܫεᐒᄬ 35 3.2.5 ᐍ༝Տ౽ܫεᐒᄬϐᓸႝठᏔ 41 3.2.6 Տ౽ܫεᓸႝठᏔՏ౽ჹႝᓸᜢ߯ 42
ಃѤക! ӀᏢԄໆෳηس 43
4.1 ӀᏢ᠐ڗᓐᆫขໆෳϐচ 43
4.1.1ӀᏢ᠐ڗᓐচϷӀᏢϡҹфૈϟಏ 43
4.1.2ႜӀ״کૈໆஏࡋϩթ 46
4.1.3а൳ՖӀᏢीᆉӀᗺԋႽՏᆶރ 48
4.2 ӄႽႜӝϐ DVD ᠐ڗᓐ 54
4.2.1 ӄႽӀᏢ DVD ᠐ڗᓐ 54! !
4.3ӄႽႜ᠐ڗᓐϐᄬࠠᆶᔈҔ 59
4.3.1ӄႽႜ᠐ڗᓐໆෳӀၡ 59
4.3.2ӄႽႜ᠐ڗᓐኳಔϯᄬࠠ! ! 62
ಃϖക ΟືۓՏسϐी໒วᆶڋำԄ 64
5.1 ᕴسࢎᄬ 64
5.2 ႝၡࢎᄬᆶำԄ 67
ಃϤക ΟືഈၡڼԯۓՏठسϐس܄ૈ! 69
ಃΎക! ่ፕᆶ҂ٰఈ 81
ୖԵЎ 83
ߕᒵ 86
߄Ҟᒵ!
߄ 3/2! ! ठᏔᅿᜪϷ܄! ! ! ! ! ! ! ! ! !!:!
߄ 4/2! !! ኙ܄Տ౽ܫεᐒᄬϐ൳Ֆᜢ߯! ! ! ! ! ! ! !51!
߄ 5/2! !! ኳᔕӀᗺԋႽᆶނ᜔Տᜢ߯! ! ! ! ! ! ! !68!
߄ 5/3!! ! ᜔ಔӝϐӀᏢໆୁ܄ૈ! ! ! ! ! ! ! ! !74!
߄ 7/2! ! ᜔མଛᆶጕ܄ጄൎᜢ߯!!! ! ! ! ! ! ! !81!
߄ 7/3! !! ០ႝᓸWJOჹՏ౽ໆϷVGFTϐᜢ߯!!! ! ! ! ! !83!
߄ 7/4! ! ΟືठᏔϐ໘ៜᔈ܄!! ! ! ! ! ! ! !86!
߄ 7/5! ! ΟືठᏔϐᓎϩ่݀! ! ! ! ! ! ! !88!
߄ 7/6! ! ΟືԄڼԯભۓՏѳѠϐठ܄ૈ!!! ! ! ! !!!!!91!
߄ 7/7! ! ΟືԄڼԯભۓՏѳѠϐ܄ૈКၨ! ! ! ! !!!!!!!!!91!
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კҞᒵ!
კ 1.1 ᓸႝՏ౽ܫεᏔ 3
კ 1.2 ႜՏ౽གෳᏔϐໆෳচ[16] 4
კ 1.3 SIOS ໒วϐڼԯભΟᆢඔس[17] 5!
კ 1.4 AFM ଞໆෳس[21] ...6
კ 2.1 ᄍ܄ᅉྖԄठচ...10
კ 2.2 ೱុԄठচ...11
კ 2.3 ӀᏢႽණԄໆෳӀႝಔҹ...12!
კ 2.4 ᕴس...13
კ 2.5 ѳՉᘽТᏤЇηس...13
კ 2.6 ठηسکኙ܄ܫε่ᄬ...14
კ 2.7 ໆෳηس...14!
კ 2.8 Οື่ᄬ...15
კ 3.1 ᓸႝϐཱུϯ܄፦...16
კ 3.2 ᓸႝϐૈໆᙯඤ[22]...17
კ 3.3 ᅶᅉຝ[23]...18!
კ 3.4 ወᡂຝ[23]...19
კ 3.5 ᓸႝϡҹ՜ߏᆶॄᜢ߯[23] 20
კ 3.6 ᓸႝϡҹ՜ߏໆᆶрΚᜢ߯\34^ 21
კ 3.7 ᑈቫԄᓸႝϡҹ 23!
კ 3.8 Տ౽ܫε่ᄬ...25
კ 3.9 Տ౽ᒡрᆶ൳ՖѦࠠᜢ߯...27
კ 3.10 ਣࢎϐբҔΚѳᑽკ...28
კ 3.11 Κໆᒡрᆶ൳ՖѦᜢ߯...28!
კ 3.13 Տ౽ܫε่ᄬϐኳᔕϩԋ݀...30
კ 3.14 ༝ቸᘽᒳТϐՏ౽ܫε่ᄬ...31
კ 3.15 ༝ࢊᖓෘᡂݩ...32!
კ 3.16 ༝ᖓෘڙڙΚᆶᡂᔈΚᜢ߯...34
კ 3.17 ᐍ༝ᖓෘޑѦᆶୖኧۓက...35
კ 3.18 ᐍ༝ᖓෘᡂҢཀკ...36
კ 3.19 ᒡрՏ౽ᆶᒡΕՏ౽ޑᜢ߯...37!
კ 3.20 ᡂኧ aǵb ᆶᡂໆᜢ߯...38
კ 3.21 ᐍ༝Տ౽ܫε่ᄬϐ൳Ֆѝκ...39
კ 3.22 ᒡΕՏܭᆶᒡрՏ౽ᜢ߯...39!
კ 3.23 ܫεᐒᄬ܌ڙᔈΚᆶӼӄ܄߯ኧϩѲ...40
კ 3.24 ᐍ༝ᖓෘϡҹᔈΚᔈᡂᜢ߯...41
კ 3.25 ᓸႝठᏔᒡΕႝᓸᆶᒡрՏ౽ᜢ߯...42
კ 4.1 DVD ᠐ڗᓐϡҹଛ...43!
კ 4.2 ༝ࢊ᜔...43
კ 4.3 ႽණᆶӀᗺރ[16]...44!
კ 4.4 ӀႝΒཱུᡏޑᒡржဦ...44
კ 4.5 DVD ᠐ڗᓐᆫขՏׯᡂ...45!
კ 4.6 S-curve ...46
კ 4.7 ႜӀ״ϐଯථமࡋϩթკ[25]...47!
კ 4.8 ႜӀ״ᆫขᗺߕ߈Ӏ״ޔ৩ޑᡂϯ[25]...47
კ 4.9 ᚈТނ᜔ᆶӀႝΒཱུᡏԋႽᜢ߯...48!
კ 4.10 ႽණӀᗺޑ൳Ֆᜢ߯...49
კ 4.11 ԋႽӀᗺЁκکᗺӀྍՏϐᜢ߯...51!
კ 4.12 ᒡрႝᓸ USکᗺӀྍՏᜢ߯...52
კ 4.13 Ѩขૻဦ UFESᆶᗺӀྍՏޑᜢ߯ ...52!
კ 4.14 ёགෳጄൎکኧॶӀ୮ॹኧޑᜢ߯...53
კ 4.15 ёགෳጄൎکኧॶӀ୮ॹኧ 1/NA ޑᜢ߯...53!
კ 4.16 ӄႽӀᏢԄ DVD ᠐ڗᓐ HOE[26] ...54
კ 4.17 ҅Ӏ...55!
კ 4.18 ӀႝΒཱུᡏ PDIC ޑ၁ಒଛ[26]...55
კ 4.19 S-curve ϐጕ܄[26] ...56!
კ 4.20 ӄႽӀᏢϡҹኳᔕӀၡس...56
კ 4.21 ኳᔕϩ܌ளᒡрႝᓸૻဦکϸ᜔Տᜢ߯...58!
კ 4.22 ӄႽӀႝϡҹ HOE ϐໆෳӀၡ ...59
კ 4.23 ჴᡍࢎᄬ...59!
კ 4.24 Ѩขૻဦ UFESᆶѨขຯᚆᜢ߯ ...60
კ 4.25 ጕ܄ࡋᆶጕ܄ᇤৡ...61!
კ 4.26 ӄႽႜ᠐ڗᓐϐಔԋ...62
კ 5.1 ΟືഈၡڼԯભۓՏठس...64!
კ 5.2 ൂືՏ౽ۓՏѳѠ...65
კ 5.3 ᡏԋࠠϐѳՉᏤЇ่ᄬϐᔈΚϩթ...66!
კ 5.4 X БӛѳѠڙΚϐᔈΚϩթკ...66
კ 5.5 سࢎᄬᆶڋࢬำ...68!
კ 5.6 ڋำԄϟय़...68
კ 6.1 ᠐ڗᓐک᜔ಔϐ܄ૈໆෳࢎᄬ...69!
კ 6.2 ۓՏѳѠਏૈෳ၂ჴᡍࢎᄬ...71
კ 6.3 Տ౽ໆෳૻဦ UFESکՏ౽ໆ̴Lϐᜢ߯ ...73!
კ 6.4 ۓՏѳѠᓎៜᔈෳ၂ჴᡍࢎᄬ...76
კ 6.5 ڙਁυᘋϐՏ౽...79!
಄ဦ߄!
಄ဦ!!!!!!!!ᇥܴ!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!!ൂՏ!
M1! ᓸႝϡҹচۈߏࡋ! Nn!
' !L ᓸႝϡҹᡂໆ P !m
ǻL0 ᓸႝϡҹคൺၩਔᡂໆ! Pm
J ! ᓸႝϡҹወᡂ߯ኧ! !
u! ൂՏਔ໔! tfd!
LT!!!!!!!!!!ቸᘽখ܄߯ኧ! O0n!
VIN! ០ႝᓸ! W!
KT ᓸႝϡҹখ܄߯ኧ! O0n!
G! ᓸႝϡҹΚໆᒡр! O!
T!! ᓸႝᔈᡂ! !
E!! ႝՏ౽! !
kd ! ᓸႝጠӝ߯ኧ! !
F! ᓸႝϡҹ܌ڙѦуႝ! !
͐! ኙ܄Տ౽ܫεᐒᄬϐ൳ՖѦفࡋ! degree!
͠Ǵ ݤጕБӛޑՏ౽!
͕! ϪጕБӛޑՏ౽! !
M! ༝ᖓෘۓᗺϐೱЈጕᆶ Z ືϐ֨ف! degree!
M
d !! ༝ᖓෘۓٿᗺೱЈጕᆶ Z ືϐ֨ف໔ৡ౦ໆ! degree!
F! ༝ᖓෘϐԔᡂϯ! !!
HM! ༝ᖓෘϐڙΚᔈᡂ! !!
U ! ᔈᡂૈ! K!
ck ൂՏᒡΕႝᓸΠ܌ౢғϐᓸႝрΚ! O!
D Տ౽ܫεᐒᄬϐܫεதኧ !!
b! ᐍ༝ъอືߏ! Nn!
c! ᐍ༝ъߏືߏ! Nn!
N! ѦуסΚ! NǷm
J! ᄍ܄ં! !
FD! ቸ܄ኳኧ! !
MF! ᐍ༝ڬߏ! nn!
̴Mpvu! Տ౽ܫεᐒᄬϐᒡрՏ౽! Pm !
̴Mjo! Տ౽ܫεᐒᄬϐᒡΕՏ౽! Pm !
UFES! ᆫขᇤৡૻဦ V!
UA! Ѥຝज़གӀΒཱུᡏ A ຝज़ϐႝᓸ! V!
UB! Ѥຝज़གӀΒཱུᡏ B ຝज़ϐႝᓸ! V!
UC! Ѥຝज़གӀΒཱུᡏ C ຝज़ϐႝᓸ! V!
UD! Ѥຝज़གӀΒཱུᡏ D ຝज़ϐႝᓸ! V!
O ݢߏ on!
NA ኧॶϾ৩ !
I Ӏமࡋ !
I0 ӀᗺύЈޑӀமࡋ !
r Ӏᗺъ৩ nn!
r0 ӀᗺύЈϐъ৩ nn!!
d0! നλӀᗺъ৩! nn!!
gP ނ᜔ขߏ nn!!
g˿! ྗޔ᜔ขߏ! nn!!
v! ӀྍՏ! nn!!
̴v! Ӏྍ౽ໆ-ϸ᜔Տ౽ໆ! Pm !!!
w! ԋႽՏ! nn!!
M[! ނ᜔ᆶྗޔ᜔໔ຯ! nn!!
MQ! ྗޔ᜔ᆶӀႝΒཱུᡏ໔ຯ! nn!!
s͉! อືӀᗺъ৩! nn!!
s͊! ߏືӀᗺъ৩! nn!!
!
B ᐍ༝य़ᑈ! nn3!
͚ നεӀᗺъ৩ nn!!
͍Q ӀႝΒཱུᡏϐӀႝᙯඤ !
VTVN! ᐍ༝ႜӀᗺ܌ౢғϐႝᓸᕴॶ! !!
g˿͉ ྗޔ᜔อືϐขຯ nn!
g˿͊ ྗޔ᜔ߏືϐขຯ nn!!
Eo! ӀႝΒཱུᡏϐൂϩപ! !!
̴M+ аനεՏ౽ໆࣁ୷ྗளϐคӢԛՏ౽К Pm !
̴Mnby ᓸႝՏ౽ܫεठᏔനεᓎៜᔈໆ Pm !
g! ᓸႝਁᓎ! I{!
!
ಃക!!ᆣፕ!
2/2!ࣴزङඳᆶᐒ!
ᒿਔжޑᗌᆶࣽמޑǴౢࠔޑीᅌаλᡏᑈکଯஏࡋࣁᏤӛǴᡣπ
מೌ፯ΕڼԯਔжޑεߐǶӧڼԯޑЁࡋΠՉуπғౢǴ࣬ᜢଛӝޑໆෳሺ Ꮤ܈ғౢᇙးϐ܄ૈाΨ࣬ჹᔈӦගଯΑǶᆒஏ༾λۓՏᆶໆෳמೌख़ा
܄ΨӢԜВᅌගϲǶ
Бݤ٬ҔᆒஏᏤᖥఎଛӝଭၲёаၲډڼԯભှࡋޑՏ౽Ǵՠࢂڙज़ ܭङሜୢᚒǴࠅคݤၲډଯᆒࡋۓՏޑҞǶ1991 ԃ Kanai ΓճҔనᓸԄठ
Ꮤ[1]аϷམଛѳय़ື܍ᏤЇ(Plain bearing guideways)Ǵֹԋ 1nm ޑۓՏှ
ࡋǴՠࢂၸܭᚳεޑࢎᄬࠅቹៜځҔ܄ǶҞڼԯભᆒஏۓՏύǴᓸႝഏౠϡ ҹ(Piezoelectric ceramic)ӢࣁځᓬᗺӵёၲԛচηભޑଯՏ౽ှࡋǴᆙጏޑᡏ ᑈǵեஏࡋаϷଯៜᔈೲࡋ܄ԶቶݱᔈҔǹଛӝؼӳޑᔠෳس൩ૈஒᓸ
ႝഏౠϡҹޑᑩਏᔈǵߚጕ܄ᡂǵᒨᅉຝ(Hysteresis)کወᡂ(Creep)
ຝ܌ԋޑόዴۓᇤৡǴԶගϲՏ౽ྗዴࡋǶ
ӧۓՏسύᆒஏՏ౽གෳسࢂόё܈લޑᜢᗖးǴࣁΑᗉխགෳᏔسჹ
ໆෳسౢғॄၩਏᔈ(Loading effect)ǴଯᆒஏۓՏسࢂ௦ҔߚௗԄՏ
౽ໆෳးǴځύаႝໆෳচ(1990 Goddenhenrich et al., [2]; 1990 Neubauer et al., [3])ǵᅶ܄ໆෳচ(1997 Dworak et al. [4])ǵऀᒾႝࢬໆෳচ(1986 Binnig et al. [5] )ǵӀυੋচ(1987 McClelland et al. [6]; 1988 Erlandsson etal. [7]; 1989 den Boef [8])ᆶӀᄫఎচ(1988 Meyer and Amer [9]; 1989 Alexander et al. [10];
1990 Ducker et al. [11])നڀж߄܄Ƕځύႝǵᅶ܄ǵऀᒾႝࢬϐໆෳচ
ࡐܰڙډႝᅶૻဦޑυᘋǴӕਔႝکႝᅶբҔΚΨჹໆෳسԖၨଯޑ
ڀԖեॄၩਏᔈᆶեႝᅶݢυᘋޑᓬ༈ǴӀᏢԄໆෳݤΞёϩࣁऀԄᆶϸ
ԄǴऀԄໆෳࢂӀྍऀࡑෳނԶՉᢀჸǴϸԄໆෳ߾ࢂӀྍѺӧࡑෳނ ߄य़җϸӣٰޑૻဦٰՉᢀჸϩǶӚᅿسޑനଯှࡋጄൎவ 100
༾ԯډ 1 ڼԯǴӢᔠෳسϐനεᔠෳጄൎԶۓǹໆෳጄൎຫλޣ߾ёၲډၨଯ
ှࡋǶ
ҁፕЎճҔᓸႝठᏔբࣁՏ౽ठϡҹǴଛӝ DVD ᠐ڗᓐࣁໆෳسǴ
ी໒วрഈၡԄଯᆒஏࡋӭືۓՏسǴаၲԋᆙጏЪᡏϯޑڼԯᆒࡋϐՏ
౽ठးǶ
2/3 ࣬ᜢЎӣ៝!
2/3/2!ᓸႝठس!
! ! ᓸႝठठޑᓬᗺࢂᡏᑈλǵᆒࡋଯЪрΚεǴᓸႝठᏔεໆ٬Ҕӧᆒ ஏՏ౽ࡽۓՏسύǴԖӭޑ០БԄǴхࡴЁ㍪ԄǵነᔔԄϷೱុԄǴЁ
㍪ԄଭၲठᏔҗፄኧϐᓸႝठᏔᄬԋǴҗಔᓸႝठᏔ۳ൺ՜ᕭౢғՏ
౽ǴќѦޑᓸႝठᏔॄೢ౽ҹǹነᔔԄϐᓸႝठᏔճҔ០ҹ߄ य़ϐᓉነᔔᆶነᔔ߯ኧϐৡ౦ǴճҔᓸႝϡҹזೲ۳ൺၮٰ០ҹǹ ೱុԄ٬Ҕᓸႝϡҹޔௗނᡏ[12]ǶೱុԄᓸႝठᏔڀԖठਔคਁౢ
ғϐᓬᗺǴҔܭᆒஏޑۓՏǶ
! ! ᓸႝޑՉำᆶځቫኧԖᜢǴቫኧຫӭ߾ՉำຫεǴа Kenji Uchino ว߄ ޑፕЎࣁٯ[13]Ǵ100 ቫޑᓸႝǴࡼа 100V ޑႝᓸǴԖऊ 10ȝm ޑՉำǶ
! ! 1987 ԃҗ T. Inoue ک T. Nada ΓǴ໒วраኙ܄ᡏᄬԋޑᓸႝՏ౽ܫε ᏔǴҗᡂϯᐍ༝ᐒఓ่ᄬϐߏືǴԋอືᒡрՏ౽ޑܫε[14]ǶԜѦ CEDRAT PIEZO PRODUCTSϦљΨԖрϯϐᓸႝՏ౽ܫεᏔ[15]Ǵаϩኳᔕ БݤٰଞჹՏ౽ܫεໆՉኳᔕǴଛӝόӕޑ൳ՖᄬࠠǴၲԋӚᅿܫεޑჴǶ
კ 1.1 ᓸႝՏ౽ܫεᏔ
! !
2/3/3!ߚௗԄໆෳس!
ߚௗԄޑໆෳسЬाࢂճҔڀԖૈໆ܈ว܄ޑ൞ϟӵႜӀྍǵႝᅶ
܈ࢂ X ጕǴٰෳࡑෳނޑ߄य़܈܄፦Ǵႝηᡉ༾᜔ᆶႜՏ౽གෳᏔ
ឦܭԜᜪࠠးǶკ 1.2 ҢᅿႜՏ౽གෳᏔޑচճҔӀᏢޑΟفໆෳݤ (Triangulation)ǶႜӀ״ӧෳ߄य़ǴϸӀᗺၸ᜔ޑᆫขࡕቹӧӀ
ႝགෳᏔǶࡑෳ߄य़բΠ ǻy ޑՏ౽ໆਔǴϸӀᗺᒿϸႜӀ״
ϐ౽ǴԶӧӀႝགෳᏔ౽ ǻxǴӀႝགෳᏔ߾ஒӀᗺՏᡂϯ ǻx ᙯඤԋႝ
ᓸૻဦ UǻxǴႝᓸૻဦ Uǻx ᆶෳނϐՏ౽ ǻx ԋ҅Кᜢ߯ǶதҔႜՏ౽ག
ෳᏔໆෳጄൎӧ 100ȝm Կ 1m ϐ໔Ǵှࡋ߾ӧ 0.01ȝm ډ 0.2ȝm ϐ໔Ƕ
კ 1.2 ႜՏ౽གෳᏔϐໆෳচ[16]
! ! DVD ᠐ڗᓐӧ߈ԃٰΨԋࣁᅿᓬؼޑߚௗԄໆෳǴځ༾λޑᡏᑈک๊
٫ޑှࡋǴ٬ځӧຯᚆໆෳޑԾҗ܄کቶࡋཱུଯǶ
! ! 2006 ԃ Chu ک Lin Γ໒วрӝ DVD ᠐ڗᓐϐᚈືӛуೲࡋໆෳᏔ [17]ǴճҔ᠐ڗᓐٰགෳኙ܄ᐒఓ่ᄬڙΚᡂǴᙖаϸѦٰϐуೲࡋǴёа
ෳளډ 3mg ϐ܌ڙѦΚуೲǶ1998 ԃҗࡼᒴ໒วᚈݢߏϐӄႽೌ DVD ᠐ڗ ᓐኳಔ[18]ǴஒӀႝΒཱུᡏǵႜΒཱུᡏϷၮᆉႝၡӝӧൂ IC ύǴε൯෧ Ͽ DVD ᠐ڗᓐϐᡏᑈǴᘉεΑ٬Ҕޜ໔Ƕ2005 ԃ B. Hniliˇcka ک A. Voda
ճҔ൳ՖӀᏢБԄǴଛӝኧॶϩݤࡌҥ DVD ᠐ڗᓐໆෳຯᚆᆶ᜔ୖኧϐ໔ ޑᜢ߯[19]Ǵ٬ளໆෳጄൎёаၸीᆉԶளрǶ2005 ԃ Rostyslav Mastylo ک Denis DontsovΓճҔ HOE ࣁ႟ᗺໆෳϡҹǴ໒วрڼԯભΟᆢඔѳѠ(კ 1.3)ǴZ ືှࡋ 1nmǴඔय़ᑈၲ 576mm2Ƕ
კ 1.3! SIOS ໒วϐڼԯભΟᆢඔس[20]
2006ԃǴѠεᏢᐒఓ܌کύࣴଣނ܌ Hwu ک Huang ΓӅӕ໒วр
ӝ CD/DVD ᠐ڗᓐϐচηΚᡉ༾᜔س[21]Ǵسࢎᄬӵკ 1.4 ܌ҢǴAFM ଞ֨ڀᆶ᠐ڗᓐֹ่ӝӧଆǴගٮཱུᛙڰໆෳࢎᄬǴёаՉ AFM ޑௗ
Ԅ(Contact Mode)کᇸᄟԄ(Tapping Mode)ඔໆෳǴໆෳှࡋ׳ଯၲҡᏀޑൂ
চηѠ໘(0.35nm)Ƕ
კ 1.4! Hwu ک Huang ΓᔈҔ DVD ᠐ڗᓐ܌໒วϐ AFM ଞໆෳس[21]
2/4 ࣴزҞ!
! ! ᆒஏ༾ۓՏѳѠҔВቚߏǴᔈҔܭӚԄسύǴӵπڀᐒǵᆒஏуπᐒǵ ӀᠼᆶݢᏤᏔԾჹྗسǵΟԛϡໆෳሺǵᅲԄऀᒾႝࢬᡉ༾ሺǵᅲԄ
ଞᡉ༾ሺǵϷচηΚᡉ༾ሺǶ
! ! ҁࣴزҞӧܭी໒วΟືഈၡۓՏѳѠǴځύх֖ठηسǵໆෳ
ηسϷڋำԄǶठηسஒаᓸႝϡҹբࣁठྍǴࣁΑၲډᆒஏЪၨߏ ϐठǴаೱុ܄០БԄǴ٠ၸኙ܄ܫε่ᄬٰܫεᓸႝϡҹՉำǶໆෳη س௦Ҕ༾λࠠӄႽԄ HOE ᠐ڗᓐǴࡌᄬрߏՉำໆෳЪଯှࡋঋ៝ϐՏ౽ ໆෳسǶΟືύ X ک Y ືςҬᒱ୴᠄ࢎᄬٰ෧Ͽ่ᄬޜ໔ǴZ ືΨ௦ҔወΕ
่ᄬٰ࣪ᡏଯࡋǶ
2/5 ϣᙁϟ!
ҁፕЎϩࣁΎകǴҁകࣁ䄼ፕϩǴЬाࣁϟಏځࣴزङඳک࣬ᜢୖԵЎ
аϷԜࣴزޑᐒکҞǶ
ಃΒകஒϟಏӚᅿᆒஏठسکໆෳسǴځύஒଞჹԖς໒วϐᓸႝ
ठسᆶߚௗӀᏢԄໆෳسբӄዬཛྷ൨ᆶϩǴԶᇥܴҁፕЎϐࣴ
زҞޑаϷ߃ीБਢǶ
ಃΟകவسࢎᄬϩठηسϐфૈک܄ૈǴаϷၲԋߏՉำکଯ ᆒࡋϐठ܄ૈޑीБਢǶ
ಃѤകևࣁᔈҔӄႽԄ HOE ᠐ڗᓐ໒วϐӀᏢՏ౽ໆෳسаϷၸ
᜔ขຯϐᡂϯၲԋቚуՏ౽ໆෳጄൎϐਏ݀Ƕ
ಃϖകࣁΟືഈၡڼԯભՏ౽ठѳѠϐᡏسᐒᄬीǴ٠ᐒᄬ খ܄ჹठᏔ܄ૈϐቹៜǴаϷၲԋس܄ૈ܌ሡϐڋࢎᄬǶ
ಃϤകၸჴᡍෳ၂БԄϩΟືۓՏѳѠسϐᓉᄊ܄ૈǴځύхࡴठ
Չำǵှࡋǵख़܄ᇤৡǵጕ܄ᇤৡаϷᄊៜᔈǶ
ಃΎകᕴ่ᡏϐࣴزԋ݀аϷଅǴ٠ගрׯޑБଞǴനࡕፕࡕុว
Бӛᆶ҂ٰఈǶ
ಃΒക!!ΟືՏ౽ۓՏس!
3/2!фૈᆶᄬགྷ!
2.1.1سۓက
ҁፕЎޑҞޑӧܭࢎᄬঁڀԖڼԯભۓՏфૈޑΟື౽ѳѠǴҔܭ܍ၩ
ᇸໆኬҁբᆒஏۓՏբǶࣴวϐЬाᐒǴӧܭှ،ཇٰཇӭޑଯᆒࡋǵԖޜ ໔ज़ڋǵਸᕉნӵຬଯޜޑ՛ܺठሡǴٯӵӧ AFMǵSTM ᡉ༾᜔
ޑჴᡍᕉნΠǴۓՏس܍ၩኬҁਔϐՏ౽ѸᛙۓǴΨѸၲډڼԯભޑۓՏ ᆒࡋ 1nm~100nm ϐጄൎϣޑۓՏǶӕਔࣁΑ٬ԜۓՏѳѠΨૈӧԖज़ޜ໔చҹ ΠᏹբǴسࢎᄬӢԜѸ௦ҔᆙጏऊϯޑीǶسϩࣁठηسکໆෳ
ηسǶठηسॄೢᡏسϐΟືӛՏ౽фૈǴໆෳηسॄೢໆෳѳѠ ޑՏǴၸՏ౽ӣ㎸ڋسၲԋଯᆒࡋۓՏҞǴΟືӛ XǵY ک Z Бӛޑ Տ౽ԋϩձа 51͔nǵ50͔n ک 5͔n ࣁسҞೕǶ
2.1.2ठηس
ठᏔޑфૈࢂӧܭᒡΕޑૈໆᙯඤࣁठૈໆǴջࢂՏ౽کрΚǶठᏔ ٩բচёаϩࣁኧᐒఓԄǵႝᅶԄǵᓸԄϷᓸႝԄǶՠाၲډڼԯભϐ ठǴठᐒᄬ൩ѸڀԖᛙۓǵค໔ሜޑ܄Ƕ
ᐒఓԄठᏔҗႝଭၲଛӝᐒᄬᄬԋǴՉำҗᐒᄬࠠԄ،ۓǴрΚ߾ᆶଭ
ၲϐᒡрסΚԖᜢǴၸ෧ೲᐒᄬёаஒՏ౽ှࡋගϲǶᐒఓԄठᏔڀԖε ՉำکԾᙹфૈǴӧόٮᔈႝਔϝૈߥচۈՏǹՠࢂङሜୢᚒࠅࢂ۳ൺठ
Һ୍தሡय़ᖏޑЋୢᚒǶ
ႝᅶԄठᏔҗᏤᅶЈືکႝᅶጕ୮ᄬԋǴҗႝᅶጕ୮ஒᒡΕႝࢬᙯඤԋૈ
ჹᏤᅶЈືౢғբҔΚޑᅶૈǴڋႝࢬёаڋᅶૈǴԶቹៜᏤᅶЈືϐՏ
౽ှࡋǴឦܭೱុՏ౽ठᏔǶૈၲډཱུᆒዴޑठՏ౽Ƕՠࢂጕ୮ޑႝߔ
ཞࠅΞࢂቹៜठᆒࡋޑᜢᗖӢનǴคԾᙹфૈΨቹៜठᏔޑଛᄊǶ
ᓸԄठᏔᙖҗᡂϯ࠻ϐᓸΚ܈ᡏᑈౢғՏ౽ठǴՉำکрΚ߾җ
ᓸྍаϷ࠻൳Ֆރ،ۓǶёᓸᕭ܄کႝᓸᛙۓ܄ᜢᗖठᆒࡋǴឦܭೱុ
Տ౽ठᏔǴӕਔᡏΨڀԖ෧ߔѭфૈǴૈڋѦٰǶᓸྍΞज़ڋΑ ठᏔଛࢲ܄Ƕ
ᓸႝԄठᏔҗᓸႝϡҹکᐒఓ่ᄬᄬԋǴᓸႝϡҹஒႝᓸᙯඤᡂૈǴᐒ ఓ่ᄬ߾ஒځӆᙯඤԄޑठૈǴՏ౽کрΚᆶᓸႝϡҹϐ൳Ֆރǵ܄
፦аϷ០ႝૈԖᜢǶ೯தឦܭೱុԄՏ౽ठᏔǴၸठᐒᄬޑΨёа
ౢғठՏ౽Ƕҗܭᆒྗႝᓸڋמೌ٬ଯᆒࡋՏ౽ठΨૈၲԋǴೱុՏ
౽ठᏔ೯தόڀഢԾᙹфૈǴଯႝᓸၮբ߾ሡाӳޑႝ๊ጔଛӝǶ ߄ 2.1! ठᏔᅿᜪϷ܄
ठБԄ ᐒఓԄ ႝᅶԄ ᓸԄ ᓸႝԄ
നλໆ ೱុԄʏ
Ԅ
ೱុԄ ೱុԄ ೱុԄʏԄ
ߔѭਏᔈ ค གᔈႝ༈ ᡏёᓸᕭ܄ ค
Ծᙹфૈ Ԗ ค ค ค
٬Ҕज़ڋ ᐒᄬङሜ
ୢᚒ
εႝߔ
ཞε
ᡏёᓸ܄ک ଯᓸྍ
ଯႝᓸ០ଯྕ
Ѩਏ
аѤᅿठБԄӵ߄ 2.1 ܌ҢǶࣣૈаӚԾޑБԄၲډڼԯભठǶӧᛙ ۓठޑԵໆΠǴᐒఓԄԖङሜፂᔐਁୢᚒǴႝᅶԄ߾ԖଯႝߔཞޑୢᚒǴ аϷᓸԄठᏔѸԖޜᓸᡏഢޑୢᚒǴᓸႝठᏔ߾ڀԖ่ᄬᙁൂаϷ
! ᓸႝठᏔΞёаϩࣁԄᆶೱុԄǶதҔठচх֖Ё㍪Ԅǵ ፂᔐԄаϷᄍ܄ᅉྖԄǴᄍ܄ᅉྖԄёаౢғၨଯՏ౽ှࡋǴԶЪ่ᄬၨࣁᙁ
ൂǴςόჹᆀԄ០ႝᓸݢջёౢғ༾λठՏ౽Ƕᄍ܄ᅉྖচǴӵკ 2.1
܌Ң,ᙖҗठϡҹϐ໔ነᔔ߯ኧᆶᓉነᔔ߯ኧޑৡ౦аϷזࡕӣޑբҔБ ԄǴ٬ठϡҹளаБԄՏ౽ǴՉำΨளаຬၸᓸႝϡҹϐനεՏ౽ठ
ໆǶೱុԄठБԄύठՏ౽ໆҗ០ႝᓸکᓸႝϡҹϐ൳ՖЁκ،ۓǴԖന εՉำϐज़ڋǴаڋ០ႝᓸٰౢғೱុՏ౽ᡂϯǴӵკ 2.1 ܌ҢǶՏ౽ޑှ
ࡋڙज़ܭ០ႝᓸޑှࡋǴܫε܈ࢂᕭλՏ౽ໆёаၸᐒఓᄫఎচǶ
კ 2.1! ᄍ܄ᅉྖԄठচ
Time Position
Time Position
Time Position
ነᔔ༧ ᓸႝϡҹ ០ҹ
ᓸႝϡҹ ठՏ౽ Տ౽ໆ
კ 2.2! ೱុԄठচ
Time Position
Time Position
Time Position
០ҹ ᓸႝϡҹ
2.1.3 Տ౽ໆෳηس
Տ౽ໆෳᏔёϩࣁௗԄаϷߚௗԄٿᅿǴߚௗԄໆෳচჹܭෳس
ॄၩϷυᘋനϿǴх֖ႝԄǵႝᅶԄϷӀᏢԄǶځύӀᏢԄΞх֖ΑጓዸԄǵ υੋሺϷႽණԄБݤǶԶጓዸԄሡाԖᡏᑈᚳεޑӀᏢЁǴυੋሺޑӀၡس
ΨሥڀೕኳǴҞаႽණԄໆෳচڀԖനλᡏᑈೕኳǴDVD ᠐ڗᓐޑӀၡ
ीջࣁႽණԄໆෳচǶځύΞаυੋሺکႽණԄёаၲډڼԯໆෳભǶႽණ ԄໆෳӀႝಔҹа DVD ᠐ڗᓐനࣁදၹǴሽΨࡐӝǶཥࠠ DVD ᠐ڗᓐ׳
௦ҔΑӄႽೌמೌǴϡҹᡏᑈ׳ᇻλܭ DVD ᠐ڗᓐǶ
კ 2.3 ջࣁҁࣴز௦Ҕޑ SHARP ϦљӄႽԄ᠐ڗᓐǴёаε൯ᕭ෧Տ౽ໆ
ෳηسޑᡏᑈǶ
!
a) ᠐ڗᓐ b)ӄႽԄ᠐ڗᓐ კ! 2.3! ӀᏢႽණԄໆෳӀႝಔҹ
3/3!ᡏࢎᄬ!
ᕴسϩࣁठηسǵໆෳηسǵᏤЇηسϷᏹբᆄޑڋηسȐკ 3/5ȑǶӚঁηسаኳಔϯीࣁගǴ٠ЪືԖᐱҥޑठϷᔠෳسǶ Y ک Z ື௦Ҕ࣬ӕኳಔࢎᄬаᙁϯس่ᄬǶճҔΟືҬᒱޑБԄǴٰගϲϣ
ޜ໔ޑ٬ҔਏǶ!
! კ 3/5! ᕴس!
ൂືኳಔޑЬा่ᄬҗϣਣǵѦਣϷᏤЇηس܌ᄬԋǶᏤЇηسҗኙ܄
ᡏᄬԋǴ௦ҔѳՉᘽТᏤЇޑচၲԋൂືӛѳՉᏤЇޑҞޑǴӵკ 2.5 ܌ҢǶ ԜᅿᏤЇБԄڀԖคѦነᔔǵคᎩሜǵคङሜаϷคሡዎྖ܄Ǵձ೯Ҕܭ ᆒஏۓՏسǶ
! კ 3/6! ѳՉᘽТᏤЇηس!
ϣਣ!
Ѧਣ!
ቸᘽᒳТ!
ѳѠ
ठηس!
ໆෳηس
ᏤЇηس
ڋηس
ठηسаᓸႝϡҹଛӝՉำܫεᐒᄬǴܫεᐒᄬ௦Ҕኙ܄่ᄬхᙟՐᓸ
ႝϡҹϐѦǴӵკ 2.6 ܌Ңᓸႝϡҹ՜ߏठਔǴኙ܄่ᄬٿୁӛϣԏᕭǴ
ᓸႝϡҹᕭอਔǴኙ܄่ᄬૈӢࣁҁيቸ܄ӣൺԿচۈރǴځ܄х֖คነ ᔔǵคᎩሜǵคङሜаϷคሡዎྖǶ
! კ 3/7! ठηسکኙ܄ܫε่ᄬ!
ໆෳηسҗӄႽԄ᠐ڗᓐଛӝ᜔ಔಔԋǴڰۓӧঁ฿ϣǶଛӝӧ ࡑෳނᡏޑϸ᜔ǴૈԋֹޑෳຯӀၡ)კ 3/8*Ƕ!
! კ 3/8! ໆෳηس!
ஒٿঁൂືኳಔаόӕޑБӛ่ӝਔǴջᄬԋ YǵZ БӛۓՏѳѠǶԶ [ ື ۓՏѳѠ߾ܫӧځΠǹ[ ືठηسҗᓸႝϡҹޔௗǴϸ᜔
Π౽ǴӧനۭΠޑࢂЍኖҁᡏޑۭ০ǴԶໆෳηس߾ӼӧѳѠϣǴ
߾ࣁֹΟືഈၡڼԯભۓՏठسǴӵკ 2.8Ƕ!
ᓸႝϡҹ!
ኙ܄่ᄬ!
ᕵӛ՜ߏ
ᐉӛᕭอ!
ӄႽԄ᠐ڗᓐ
฿! ނ᜔ಔ ϸ᜔!
! კ 3/9! Οື่ᄬ!
!
!
!
!
!
!
!
!
!
!
!
!
ठηس!
གෳηس!
౽ѳѠ ڰۓѳѠ
ۭ০ Y ື Z ື [ ື
ಃΟക!!ᓸႝԄठηس!
4/2!ᓸႝচᆶ܄!
4/2/2 ᓸႝਏᔈ!
ᓸႝਏᔈࢂύᐒఓૈᆶႝૈϐޑૈໆᙯඤຝǴਥᏵϟႝፕǴӧႝ
բҔΠޑϟႝ፦ύǴόӕႝ܄ޑႝౢғ࣬ჹՏ౽Ǵ٬ϟႝ፦ϣӸӧႝཱུ܈
ᚈཱུ(diploe)ǴԜᅿຝջࣁཱུϯຝ(polarization)ǶᓸႝନΑёаҗႝౢ
ғཱུϯբҔϐՏǴΨૈԖᐒఓૈౢғཱུϯຝǶӧ߄य़ౢғႝϐஏࡋᆶ ᐒఓૈԋ҅КǴ೭ᅿҗᐒఓૈբҔԶౢғޑႝཱུϯຝջࣁᓸႝਏᔈ
(piezoelectric effect)[22]Ƕ
ᄬԋᓸႝޑӃ،చҹࣁ่ᄬڀԖόჹᆀ܄)dfousptznnfusz*Ǵҭջ
ࢂ҅ႝύЈᆶॄႝύЈόӧଆǴԶڀഢཱུϯ܄፦)კ 4/2*ǶᓸႝڀԖ Տ౽λǵៜᔈזǵрΚεǵૈໆᙯඤଯᆶคႝᅶυᘋ)FNJ*܄Ƕᓸႝ
բҔਔǴੋϷᐒఓૈǵႝૈᆶໆΟঁૈໆϐ໔ޑҬඹᙯඤ)კ 4/3*ǴճҔΟ
ঁૈໆޑᙯඤёаी໒วрӚᅿठᏔᆶགෳᏔǶ!
ᓸႝЬाϩࣁϖεᜪǺൂᡏǵᖓጢᜪǵᆫӝނᜪǵഏౠᜪᆶፄӝǴ ӚԖځ܄ǴځύаᓸႝഏౠനࣁቶǴڀԖᛙۓᓸႝਏᔈǵᇙᜪࠠቶǵ
፦ໆᇸϷႝଽӝ߯ኧଯᓬᗺǶ2::6 ԃऍ୯୯ৎྗֽ)Obujpobm!Cvsfbv!pg!
Tuboebset*!Kfuub/C!Γว߄⯗⑲ለႉ)QcUjP4Qc[sP4Ǵᙁᆀ Q[U*سӈޑᓸႝ
ഏౠǴςഌុԋࣁЬाޑᓸႝǶ!
! კ 4/2! ᓸႝϐཱུϯ܄፦!
!!!
! კ 4/3! ᓸႝϐૈໆᙯඤ\33^!
!
4/2/3 ᓸႝϐߚጕ܄܄!
ᓸႝբࣁጕ܄ठᏔਔஒय़ᖏډٿᅿЬाޑߚጕ܄ຝǺᒨᅉຝ (hysteresis)Ϸወᡂ(creep)ຝ[23]Ƕ
ႝ
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ϣཱུ܄܌ठǴځੁޑૈໆ߾җϩη໔ޑϣነᔔᙯࣁૈණѨǶᒨᅉຝ ޑໆᒿٮ๏ႝᓸޑελԶׯᡂǴӧٮ๏ႝᓸቚεޑݩΠǴᒨᅉຝΨᒿ
ගଯǶҗკ 4/4ёـӧλૻဦޑٮ๏ႝᓸբΠǴᒨᅉຝεऊࣁ 3&Ǵᒿٮ
๏ႝᓸޑගଯǴࣗԿ٬ᒨᅉຝගϲډ 21&܈ࢂ 26&Ƕՠࢂջ٬ᒨᅉຝ٬
ᓸႝठᏔคݤӣډচߏࡋǴϝฅૈԖᓬؼޑख़ፄ܄Ƕӧ໒ၡڋύǴᒨᅉ
ຝԋޑቹៜၨεǴ٬ۓՏѨѐᆒࡋǹӧഈၡύǴ߾ёаᙖҗᔠෳسٰ
ՉံᓭǶ!
! კ 4/4! ᅶᅉຝ\34^!
ወᡂຝࢂᓸႝठᏔӧٮ๏ڰۓႝᓸϐΠǴ՜ߏໆᒿਔ໔ᅌᅌ༾λቚуޑݩ )კ 4/5*Ƕወᡂᒿਔ໔ԋჹኧԄቚуǴёаҔΠԄ߄Ңࣁਔ໔ޑڄኧǺ!
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t
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ځύuࣁਔ໔Ǵ!
̴M)u*ࣁӧۓਔ໔)u*ਔޑᓸႝठᏔ՜ߏໆǴ!
̴Mu>1/2ࣁӧႝᓸֹӄׯᡂֹࡕ 1/2 ࣾޑᓸႝठᏔ՜ߏໆǴ!
J ࣁወᡂǴҗᓸႝठᏔޑ܄፦܌ቹៜǶ!
λૻဦբ
εૻဦբ
3&
3&!
21&
26&
! კ 4/5! ወᡂຝ\34^!
!
!
4/2/4 ᓸႝޑখ܄!
ഏౠ܄ϐᓸႝϡҹёа܍ڙଯԿ 361NQb ޑᓸΚԶόઇᚯǴՠࢂڙᓸΚၲന εё܍ڙᓸΚޑ 31&41&ਔǴᓸႝϡҹஒѨѐཱུ܄ǴԋࣁΑᓸႝϡҹޑڙΚཱུ
ज़Ƕၟ܌ԖኬǴᓸႝϡҹΨڀԖቸ܄ǴڙѦΚஒౢғᡂǶӧբࣁঁр ΚϡҹޑਔংǴᓸႝϡҹޑ՜ߏໆஒКԾҗ՜ߏਔٰޑλǶӧკ4/6ύᡉҢΑ ᓸႝϡҹڙॄᆶ՜ߏໆޑᜢ߯ǴځύM1ࣁᓸႝϡҹচۈߏࡋǴǻLINࣁᓸႝϡҹ ӧڙۓ០ႝᓸ VINਔޑ՜ߏໆǴB ࣁԾҗ՜ߏޑݩǴC ࣁᓸႝрΚᓸ ᕭቸ܄ࣁLTޑቸᘽޑݩǴёаวගϲ០ႝᓸVਔǴᓸႝϡҹ B ᆶ C ஒ
Ԗόӕޑ՜ߏໆǴനಖ C ޑ՜ߏໆᆶ B ࣬ৡ̴MSǶрΚελᆶ՜ߏໆԋϸК ᜢ߯ǴӧᒡрΚໆനεޑਔংǴᓸႝޑ՜ߏໆஒӄᙯࣁቸΚᡂԶࣁ႟
)კ 4/7*Ƕ!
! კ 4/6! ᓸႝϡҹ՜ߏᆶॄᜢ߯\34^!
!
ۓကᓸႝϡҹޑΚໆᒡрࣁGǴখ܄߯ኧࣁ KTǴคڙΚਔϐ՜ߏໆࣁ̴M1Ǵ
߾ᓸႝϡҹޑനεΚໆF KT 'L0ᒡрёࣁ!
0
max K L
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ՠࢂӧ٬ҔޑݩΠǴᓸႝϡҹஒբࣁठᏔٰᐒᄬՉՏ౽Ǵӧ Ѧௗᐒᄬϐখ܄ࣁLTޑݩΠǴᓸႝϡҹޑԖਏനεΚໆᒡр Fmaxஒᡂԋࣁ!
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·
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T
T K K
L K K
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ќБय़Ǵᓸႝϡҹޑ՜ߏໆ̴M ஒԖऩυ෧Ͽ!
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ӢԜǴLUᆶ LTϐελৡ౦ஒ،ۓΑᓸႝϡҹޑрΚᆶ՜ߏໆǴӧᒧᓸႝϡ ҹբࣁठᏔਔӕਔΨाԵቾډᡏᐒᄬޑখ܄Ƕ!
კ 4/7! ᓸႝϡҹ՜ߏໆᆶрΚᜢ߯\34^!
!
!
4/2/5 ᓸႝϡҹᔈᡂ߄Ԅ!
୷ҁᓸႝਏᔈϦԄύඔॊႝૈໆᆶᔈΚᔈᡂϐ໔ᜢ߯ϦԄǴӵϦԄ )4.6*\35^Ƕ!
j pj q E pq
p S T d E
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ӛᔈᡂǴTˠж߄ᕵӛᔈᡂǴT5ǵT6کT7ж߄ᔈᡂǶӧҁጇፕЎύЬाճҔޑ T44 ޑᕵӛᔈᡂǴΠ಄ဦಃঁࡰ߄Ңᔈᡂ܌բҔ܈Їठޑय़ϐݤጕБӛǴΠ
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܄தኧǴH ж߄ϟႝதኧǶijT ejkࢂᓸႝᔈᡂதኧ)Qjf{pfmfdusjd!Tusbjo!
Dpotubou*Ǵӧᐒႝጠӝ܈่ӝਔǴࢂঁ࣬ख़ाޑୖԵࡰǴځۓကࣁᓸႝ
ӧѦуႝΠ܌ౢғޑՏ౽ǶΠ಄ဦಃঁࡰж߄ႝ܌ࡼуϐႝཱུ߄ य़܈ႝБӛǴΠ಄ဦಃΒঁࡰж߄ᓸႝठ܈ᡂБӛǶଷႝՏ
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ᓸႝޑჹᆀ܄ǴᓸႝѝԖϤঁᐱҥޑᓸႝ߯ኧǶϟႝ߯ኧࣁБତǴ
Ԗჹفጕޑதኧόࣁ႟ǴऩࣁϤБسޑᓸႝഏౠǴځϟႝதኧჹفБତӵ 4.8܌ԄǶ!
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ࢋ܄தኧંତ[SE]ࣁ 7Y7 ໘БତǴࢂᐒႝጠӝதኧύঁЬाୖኧǶϤБس ޑᓸႝഏౠځࢋ܄தኧંତӵΠ܌ҢǶ!
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зᓸႝϡҹࣁᑈቫԄǴѦࠠࣁБࢊǴӵკ 4/8ǶځύQࣁཱུϯБӛǴMࣁݮ
ཱུϯБӛޑߏࡋǴFࣁႝӧ 4 ޑБӛǶ!
! კ 4/8! ᑈቫԄᓸႝϡҹ!
!
ࡼуႝӧ 4 ޑБӛǴ٬ᓸႝϡҹӧӕБӛౢғ՜ᡂǶҗΠԄёаளᡂ
!
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0 0
0 0 0 0 0
0 0
0 0 0
0 0 0
0 0
0 0 0
0 0 0
0 0 0
E E E
d d
d d d
T T T T T T
S S S S S S
S S S
S S S
S S S S S S
!! ! )4.:*!
ӧόࡼуѦуᔈΚޑݩΠǴΞ 2ǵ3 БӛคႝǴջU>1ǵF2>1ǵF3>1 ߾চԄё ϯᙁࣁ!
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0 0 0
3 33
3 32
3 31
6 5 4 3 2 1
E d
E d
E d
S S S S S S
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1 2
3
P S3(d33)
L
E
L E d L
L E L d S
3 33
3 33 3
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! ! ! ! ! ! ! ! ! ! ! ! )4.22*!
ӧ۹ౣᅶᅉຝޑݩΠǴёаۓကᓸႝ՜ߏໆᆶٮ๏ႝᓸԋ҅КǶՠᓸႝ
ϣϐႝԖႫکཱུज़ǴӢԜคݤคज़ڋޑуεٮ๏ႝᓸǴٰ٬ᓸႝคज़ ᡂǴӢԜঁᓸႝठᏔஒԖځ՜ߏໆޑज़ڋǴӢԜऩࢂाஒᓸႝϡҹࣁε ՉำޑठᏔਔǴሡाଛӝᐒఓ่ᄬٰՏ౽ܫεǶ!
!
!
!
4/3!Տ౽ܫεᓸႝठᏔϐ൳Ֆᄬी!
4/3/2 ኙ܄Տ౽ܫε่ᄬ! ! !
ޔௗ٬ҔൂᓸႝϡҹޑݩΠǴஒय़ᖏᡂࠠՏ౽όىޑୢᚒǴ܌аӧԜ௦ ҔΑᐒఓ่ᄬٰቚуՏ౽ໆǶҁፕЎύஒаΟᅿόӕ൳ՖރϐᄬࠠǴх֖ᡏ Ԅ่ᄬǵ༝Ϸᐍ༝ǴٰКၨӚᅿኙ܄่ᄬ໔ϐᗺǶ!
!
!
4/3/3!Տ౽ܫε่ᄬ!
ӧᡏԄ่ᄬѤೱఎਣࢎύǴᓸႝϡҹ០ኙ܄่ᄬޑനߏᜐǴ߾อᜐ
ԖᕭอޑᡂՏ౽ౢғǴӵკ 4/9B ܌ҢǶၸޑ൳Ֆރޑीёаஒ BD БӛޑᡂՏ౽ໆǴӧ CE БӛౢғܫεޑᡂՏ౽Ƕ!
!
! კ 4/9! Տ౽ܫε่ᄬ!!
җܭኙ܄่ᄬڀԖჹᆀ่ᄬǴ܌аஒਣࢎᙁϯԋΟفǶӧΟف BPE ύǴ ᓸႝϡҹࡼΚӧ B ᗺ٬ϐ౽ǴP ᗺࣁٿჹفጕϐҬᗺǴE ᗺࣁՏ౽ᒡр
A
C
B D
X Y
A
D O
͐ LAD
C/ΟفՏ౽ᜢ߯!
B/!ኙ܄ܫε่ᄬ
߾ BE ߏMBEёҗΟفڄኧள!
T
cosOA AD
L L ! ! ! ! ! ! ! ! ! ! ! )4.23*!
ᓸႝϡҹ՜ߏɆMPBਔǴஒ٬ B ᗺර,Z Бӛ౽Ǵջ BP ߏᡂࣁLc Ǵ!OA
OA OA
OA L L
Lc ' ! ! ! ! ! ! ! ! ! ! ! ! )4.24*!
җܭ࠾ஏ่ᄬϐቹៜǴE ᗺޑՏ౽ݮ PE БӛǴ!PE ߏࡋѸᕭ෧ࣁMPEȷǴё ளǴ!
cos
2 2
2 2
OA OA
OA OA
AD
OD L L L
L L
L ¸ '
¹
¨ ·
© c §
c
T ! ! !!!!! ! )4.25*!
Ξ PE ϐচۈߏࡋMPEёаΟفڄኧ߄ҢࣁLOD LOAtanT Ǵ߾ E ᗺޑՏ౽ຯᚆࣁ
̴MPE!!
2
2
tan cosOA OA OA
OA OD OD
OD L L L
L L L
L ¸ '
¹
¨ ·
©
§ c
' T T ! ! ! )4.26*!
CE ޑᕴՏ౽ໆ߾ࣁ!
¸¸
¹
·
¨¨
©
§
'
¸
¹
¨ ·
©
§
c
' 2
2
tan cos 2
2
2 OD OD OD OA LOA LOA LOA L
L L
L T T ! )4.27*!
CE ޑᕴՏ౽ໆڙډ֨ف͐ǵᓸႝϡҹϐߏࡋMPEکठՏ౽ໆ̴MPBϐቹៜǶ!
! аᓸႝϡҹচߏMPB>6nn Ϸ՜ߏໆɆMPBɨ6͔n жΕԄǴӧόӕޑفࡋ͐ϐΠ ёள E ᗺޑՏ౽ໆӵკ 4/21Ƕ!
! კ 4/:! Տ౽ᒡрᆶ൳ՖѦࠠᜢ߯!
! ! җკ 4/21 ύёаளޕǴӧ֨فεܭۓॶ)5±*ϐݩΠǴ֨فຫλǴૈԖ ຫλޑՏ౽ໆǹ٠Ъ֨فࣁ 56±ਔǴᒡрϐՏ౽ໆ࡞࣬ܭᒡΕϐՏ౽Ǵ֨ف λܭ 56±Ǵ߾ᒡрϐՏ౽ໆၨচۈᒡΕՏ౽λǶӢԜǴբࣁӝϐՏ౽ܫεܫ εᐒᄬǴӧ൳ՖރϐीᒧҔၨλ֨فࣁ٫Ƕ!
ӧόӕޑਣࢎفࡋ͐ΠǴჹٿᆄᗺ A ک C ϐࡼΚౢғόӕޑ B ک D ϐΚໆᒡрǶᓸႝठᏔϐрΚࣁ FOAǴFDAک FDO߾ϩձࣁόӕБӛޑ ϩΚǴ<Οޣᜢ߯ӵკ 3.11 ܌ҢǴ
T
T
T cos sin sin OA
DA
DO F F
F ! ! ! ! ! ! ! ! ! )4.28*!
ਥᏵჹᆀᜢ߯ёளਣࢎᆄᗺ E ϐᕴΚᒡр߾ࣁǴ!
cosT
sinT 2
2 DO OA
D F F
F ! ! ! ! ! ! ! ! ! )4.29*!
˃
˅˃
ˇ˃
ˉ˃
ˋ˃
˄˃˃
˄˅˃
˄ˇ˃
˄ˉ˃
˄ˋ˃
˃ ˄˃ ˅˃ ˆ˃ ˇ˃ ˈ˃ ˉ˃ ˊ˃ ˋ˃ ˌ˃
֨ف͐
! კ 4/21! ਣࢎϐբҔΚѳᑽკ!
! კ 4/22! Κໆᒡрᆶ൳ՖѦᜢ߯!
!
! ! ! аΚ GPB>291O жΕԄǴёаள E ᗺᕴΚໆᒡр GEᆶ൳ՖѦϐᜢ
߯Ƕҗკ 4/23 ύёаளޕǴӧ֨فࣁ 56±ਔǴԖനεΚGP>:1OǴԶ֨فຫௗ
߈ 1±ᆶ :1±ਔǴΚևሀ෧ϐᖿ༈Ƕᕴکკ 4/22 ᆶ 4/23ǴёаวനεՏ౽ ໆᆶനεΚคݤӅӸǴӢԜஒന٫ϐ֨فۓကӧՏ౽ໆᆶΚϐѳᑽᗺǴऊࣁ 5±Ƕ!
კ 3.13 ύࢂаᓸႝϡҹচߏ 5mm ϷᓸႝठᏔᕴ՜ߏໆ 11͔mǴኙ܄่ᄬ
֨ف͐=5±Ƕ
A
D O
͐
X Y
FOA FDA
FDO
˃
˄˃
˅˃
ˆ˃
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ˊ˃
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ˌ˃
˄˃˃
˃ ˄˃ ˅˃ ˆ˃ ˇ˃ ˈ˃ ˉ˃ ˊ˃ ˋ˃ ˌ˃
֨ف!͐!
Κ!GP)O*!
! კ 4/23! Տ౽ܫε่ᄬϐѦࠠ!
!
კ 4/24 ࣁӧᓸႝ՜ߏໆ 21͔n ޑݩΠǴ٬Ҕ DBF ೬ᡏՉჹՏ౽ܫ ε่ᄬӧڙᓸႝϡҹਔǴՏ౽ᆶᔈΚϩթϐᜢ߯ǴځύՏ౽ܫε่ᄬϐ аڰۓᆄۓကՏ౽ࣁ႟ǴठᆄзځԾҗᡂǴа,Y ືӛϐᡂໆۓကࣁՏ౽ ᒡрǶҗ 4/24)b*ϐᡂՏ౽ϩթკǴёаளޕനεՏ౽ໆࣁ 29͔nǴԖਏӦஒ ᓸႝϡҹޑ՜ߏໆܫεΑ 2/9 ७Ƕӧკ 4/24)c*ύǴӧՅጄൎᔈΚຬрफ़ ҷமࡋǴջӧላೀջ٬а༝൳ՖѦࠠϐीǴΨคݤᗉխϐᔈΚӸӧǴԶౢ
ғ҉ΦᡂޑӒᐒǶ!
Տ౽ܫε่ᄬǴᗨૈၲԋՏ౽ᒡрܫεޑфૈǴՠࢂӧ๏ۓϐᓸႝ՜ߏ ໆ 21͔n ϐݩΠǴؒԖᒤݤஒՉำܫεԿ 61͔nǴคݤֹԋႣۓϐीҞǴ ٠ЪӸӧคݤᗉխϐᔈΚύǴԖ٬Ҕϐज़ڋǶ!
!
͐
! კ 4/24! Տ౽ܫε่ᄬϐኳᔕϩԋ݀!
!
! ! !
!
!
!
4/3/4 ༝ቸᘽᒳТϐՏ౽ܫεᐒᄬ! ! !
ࣁΑᗉխՏ౽ܫεᐒᄬϐᔈΚύຝǴׯ௦ҔቸᘽᒳТբࣁՏ౽ܫεᐒ ᄬǴᇙԋ༝ѦǶ༝ቸᘽᒳТޑΠٿᆄڙΚਔǴᒳТ߾ౢғቸ܄ᡂǴ ठ٬༝ᘽТѰѓٿᆄౢғᡂࠠՏ౽Ƕ༝ቸᘽᒳТ࣬ၨܭᡏ่ᄬ࣪ѐΑ ϪߺуπᡯǴБय़ёа෧Ͽуπූ੮ᔈΚǴᇻᚆੲമઇᚯޑୢᚒǶќБय़ ӢࣁቸᘽᒳТ߄य़ѳЪࠆࡋठǴ܌аёаஒᔈΚѳ֡ϩթᏤډᘽТǴӵ კ 4/25)b*Ƕ!
ڰ ۓ
ठ
X Y
b*!ᡂՏ౽ϩթ! c*!wpo!Njftt ᔈΚϩթ!
ଯቸ܄ᔈΚ
ቸ܄ᔈΚ
!
! კ 4/25! ༝ቸᘽᒳТϐՏ౽ܫε่ᄬ!
!
! ༝ቸᘽᒳТࢂঁ༝ࢊᖓෘǴ!Z ືڙᓸႝΚ GǴԶ Y ືᡂՏ౽ࣁᒡ рՏ౽̴MYǶკ 4/27 ҢǴᖓෘ༝ࢊᡏϐϩޑԔఉǴԔΚંբҔਔǴ
ԔఉޑᗺD౽ԿDȷᗺǴޑݤጕБӛޑՏ౽ࣁ͠ǴϪጕБӛޑՏ౽ࣁਔ
͕ǶD ᗺޑݤጕǴ٩Տ౽͠ԶԖ ¸
¹
¨ ·
©
§ ds dZ
ᙯǴ٩Տ౽͕ԶԖ ¸
¹
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©
§ R
Q ޑᙯǴࡺ D ᗺ
ޑݤጕԖ!
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Q ޑᙯǴҗ D ᗺԿຯᚆ et ޑ E ᗺǴځݤጕԖ ds
ds d R ds
d ds d
R ¸
¹
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§
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ᙯǴ܌а D Ϸ E ᗺޑݤጕفdMᡂϯࣁ(dM'dM)ǴԶࣁ!
d ds d d d ds R
ds d R ds
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§
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§
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2 2
1
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M Q ! ! ! ! )4.2:*!
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d R
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P
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͝
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!
b*!ڙΚރᄊ c*!ڰۓБԄ!
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Q Q HM
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ଷᘽТᕴߏόߡǴ܌аHM 0ਔǴ߾ёаளࣁ Z M Q d
d !
ஒځԄжΕԄ)4.31*Ǵӕਔ
I E x M
C
ਔǴ߾ளኙࡋ༾ϩБำԄ!
EI MR d
d 2
2 2
Z M
Z !! ! ! ! ! ! ! ! ! ! ! )4.33*!
ۓက༝ڬҺᗺᆶ༝Јೱጕᆶ҅ Z ືϐ֨فࣁ͝Ǵᔈᡂૈ߾ёаҗΠԄ߄Ң!
³
³
0 00 ¨¨©§ ¸¸¹·2
2 2 0 3
2 1
2 2
1 M M
M M Z
M Z d
d d R Rd EI
EI M
U !! ! ! ! ! )4.34*!
! კ 4/26! ༝ࢊᖓෘᡂݩ!
!
!
! ! ঁ༝ᕉڙډӵკ 4/25)b*܌Ңϐჹύॄ Q բҔਔǴ༝፺߾ᡂԋᐍ
༝ǴଷݤጕБӛޑᡂՏ౽ࣁ͠Ǵ٠Ъз!
¦
f1
2 cos
n
an SM
Z ! ! ! ! ! ! ! ! ! ! ! ! )4.35*!
༝ᕉޑᔈᡂૈࣁ!
w v
dw/ds
D’
D
C
C’
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M
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M
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a U EI
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3 4 1
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SEI
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n
an
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W ǴҗૈໆӺᑽǴ
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an
W
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n
F
an a
2 2 3
1 4
2
S !! ! ! ! ! ! ! ! ! ! )4.37*!
ӢԜஒԄжΕԄ 4.35Ǵ߾ёள༝ᕉҺՖՏݤጕБӛޑᡂՏ౽!
M
Z S n
EI n F a
n
2 cos 1 4
1 2
1 2 2 3
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ஒԄжΕԄ 4.36 ߾ёளԔΚંǴख़ᗺ͝>1 ޑᡂՏ౽ࣁ!
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F a EI n
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n
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ࠟޔܭॄБӛޑᒡрᕴᡂՏ౽ࣁ!
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f 1 41 14 1
2 3
1 2 2 3
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90 Z S S
ZM M
EI P a EI n
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n
n
!
! ! EI F a3 068 .
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ᒡрᡂՏ౽ᆶբҔΚ G ϐ໔ᜢ߯ёҔаᙁϯԋΠӈᜢ߯Ƕ!
F c
Z !! ! ! ! ! ! ! ! ! ! ! ! ! )4.41*!
ځύ d ߾ࣁܫεᐒᄬϐதኧǴԶᓸႝрΚکᒡΕႝᓸΨԖ߈՟҅Кᜢ߯Ǵ߾ᒡΕ
ႝᓸWjoᆶᒡрᡂՏ౽ϐ໔ᜢ߯ࣁ!
in k V c c F
c
Z ! ! ! ! ! ! ! ! ! ! ! )4.42*!
ځύF ckVinǴdlࣁൂՏᒡΕႝᓸΠ܌ౢғϐᓸႝрΚǶ!
! ! ନΑፕϩᏤѦǴӧԜᔈҔ DBF ϩ೬ᡏᏤ 1/3nn ࠆޑόឌᒳ༝ᖓ
ෘϐॄکᡂᜢ߯аՉКၨᡍϩǴۓကՏ౽ໆࣁ౽ᆄϐᕴᡂՏ౽Ƕ!
! კ 4/27! ༝ᖓෘڙڙΚᆶᡂᔈΚᜢ߯!
!
! ! კ 4/27 ύ DBF ኳᔕϩ܌ளᡂᆶڙΚԋጕ܄ᜢ߯ǴᆶፕϦԄԖ࣬ӕޑ
่݀ǶӢԜёаዴۓ༝ᖓෘǴёᙖҗጕ܄ڋБԄٰᙯϯբҔΚԋࣁᒡрᡂ
Տ౽ǶՠਥᏵԄ)4/39*Ϸ)4/3:*ύϐڙΚᗺՏ౽ZM 0բࣁᒡΕՏ౽ǴᕴՏ౽
270 , M 90
Z բࣁᒡрՏ౽ਔǴՏ౽ܫε d ऊࣁ 2Ǵ٠คՏ౽ܫεޑфૈǴϝคݤ ᅈىीҞǶ!
!
!
!
!
!
˃
˅˃
ˇ˃
ˉ˃
ˋ˃
˄˃˃
˄˅˃
˄ˇ˃
˄ˉ˃
˄ˋ˃
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˄ ˅ ˆ ˇ ˈ ˉ ˊ ˋ ˌ ˄˃
ᡂໆʻ͔̀ʼ
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4/3/5!ᐍ༝ቸᘽᒳТϐՏ౽ܫεᐒᄬ! ! !
! ! ༝ᖓෘёа෧ϿᔈΚύޑǴΨԖؼӳޑጕ܄ᙯඤфૈǴՠࢂځՏ౽ ܫεc 0.074/0.068 1.09७ǹӧԖज़ޑᓸႝठՏ౽ 26͔n ΠǴѝૈౢ
ғ 27/46͔n ޑᒡрՏ౽ǶࣁΑගϲᒡрՏ౽ໆǴ௦Ҕᐍ༝ቸᘽᒳТբࣁՏ౽ ܫεᐒᄬǴճҔᐍ༝ߏอືϐৡ౦ٰബ׳εޑՏ౽ܫεфૈǶ!
! კ 4/28! ᐍ༝ᖓෘޑѦᆶୖኧۓက!
! ᐍ༝ᖓෘޑอືࣁ3bǴߏືࣁ3cǴᐍ༝ރБำԄ!
2 1
2 2 2
b y a
x ! ! ! ! ! ! ! ! ! ! ! ! ! )4.43*!
ᐍ༝ҺᗺQ০!
) sin , cos ( ) ,
(x y a T b T
p ! ! ! ! ! ! ! ! ! ! )4.44*!
ځύ͐ࣁᗺQᆶᐍ༝ύЈӛໆک y ືϐ֨فǴᗺQᆶύЈ࣬ຯ
acosT
2 bsinT
2 Ǵ!
'
PP ۱ߏMQQȷࣁ!
a T
b T
dT
LPP' cos 2 sin 2 ! ! ! ! ! ! ! ! ! )4.45*!
QA۱ߏMRB!
x y
a b
͐
P P’
Q R
܌аᐍ༝ϐڬߏMFёа߄Ңࣁ!
2 2
sin cos
4
2 2 2 0
2 2
b a
d b
a LE
#
³
ST T T
S
! ! ! ! ! ! ! ! )4.47*!
!
! კ 4/29! ᐍ༝ᖓෘᡂҢཀკ!
!
კ 4/29 ࣁᐍ༝ᖓෘᡂҢཀკǴRᗺӛYື҅Бӛ౽̴aޑߏࡋǴSᗺ߾
ӛ z ືॄБӛ౽̴bǶՏ౽ࡕޑᐍ༝ڬߏMFȷǴѸک҂Տ౽ޑᐍ༝ڬߏD
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ۓကᒡΕՏ౽ࣁ̴Mjo>̴aᆶᒡрՏ౽̴Mpvu>̴bϐ!аคӢԛၮᆉБԄᏤ ܫε७ᜢ߯Ǵаa 5xǵb Ϸx 'a 0.01~0.1x жΕ)4.51*ԄǴளკ 4/2: ϐ ᒡрՏ౽̴MpvuჹᒡΕՏ౽̴Mjoޑᜢ߯ǴკᡉҢӧᒡΕՏ౽ཱུλਔǴᒡрՏ౽ᆶ ᒡΕՏ౽ԋጕ܄ᜢ߯ǴԶᒡΕՏ౽ௗ߈ 1/2 ਔᒡрՏ౽ஒቃቚǶՏ౽ܫε
ёၲ 6 ७аǴଯܭ༝ࠠᖓෘᐒᄬܫε७Ƕ!
!
კ 4/2:! ᒡрՏ౽ᆶᒡΕՏ౽ޑᜢ߯!
ଛӝᓸႝߏືϐٿᆄᗺǴёаׯᡂߏอືϐߏࡋᜢٰ߯،ۓอື
ᒡрՏ౽ϐܫε७ǹӧԖज़ޑᓸႝϡҹൂᜐՏ౽ໆ 6͔n ޑݩΠǴѸᡣอ
ືᆄᗺޑՏ౽ໆၲ 61͔n аǴӧԵቾډᐒᄬϡҹ໔ޑነᔔᆶޑόᛙۓӢ નΠǴஒीӼӄ߯ኧӧ 2/63 ϐ໔ǴۓကᒡрՏ౽ޑҞࣁ 86211͔nǴՏ
౽ܫε७Ѹࣁ 8/621 ७Ƕа DBF БԄڗӧᐍ༝ᄬࠠΠޑᒡрՏ౽ჹᆶ
!
1 36 61 86 211 236
31 36 41 46 51 56 61 66
ߏື!b (mm)
ᒡрՏ౽!(ȝm) a=6
a=7 a=8 a=9 a=10
! კ 4/31! ᡂኧ bǵc ᆶᡂໆᜢ߯!
!
! ! җკ 4/31 ޑϩԋ݀ёаวǴߏື c ቚуਔёаගϲᒡрՏ౽ໆǴӕ ਔอື b>7nnǴᒡрᡂໆёၲ 91͔nǴԶอື b>8nnǴᒡрᡂໆ߾Ψຬ ၸ 71͔nǴՠࢂᒡрᡂໆᒿอືޑቚуԶफ़եǶอື b ቚуਔᐍ༝ޑԔ
ᡂϯຫѳǴϣᔈΚύݩຫλǹߏື c ቚуਔǴঁՏ౽ܫεᐒᄬޑ ᡏᑈቚуǶӧ៝Ϸᆙጏᡏᑈǵܫε७ሡаϷᔈΚϩѲచҹΠǴڗ 3b>8nn аϷ 3c>46 ࣁ಄ӝीҞϐ൳ՖރǴӵკ 4/32 ܌ҢǶკ 4/33 ࣁԜ่ᄬՉ ኳᔕ܌ளϐᒡΕՏ౽̴MjoᆶᒡрՏ౽̴Mpvuϐᜢ߯კǴځύۓကᒡΕՏ౽̴Mjoࣁ
ൂᜐߏືϐՏ౽ᡂϯໆǴᒡрՏ౽̴MpvuࣁԾҗᆄϐՏ౽ǴᒡΕՏ౽̴Mjoࣁ 6͔n ਔǴёаബрᒡрՏ౽ၲ 93͔nǶஒᒡΕՏ౽̴Mjo>6͔n ඤᆉࣁᓸႝϡҹ ϐ՜ߏໆࣁ 21͔nǴ߾Տ౽ܫεࣁ 9-3 ७Ƕ!
! კ 4/32! ᐍ༝Տ౽ܫε่ᄬϐ൳Ֆѝκ!
!
!
! 2a=7
2b=35
ڰۓᆄ
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ᒡΕՏ౽!ǻLin!)͔n*
ᒡрՏ౽!ǻLout!)͔n*
! ! კ 4/34 ᡉҢՏ౽ܫεᐒᄬᡂਔ܌ڙϐ wpo!Njftt!ᔈΚǴёаวᡏޑ ᔈΚϩթѳ֡ԶЪؒԖᔈΚύޑຝǴԖऩυϷλጄൎ٤༾ຬຫफ़ҷமࡋǶ!
! კ 4/34! ܫεᐒᄬ܌ڙᔈΚᆶӼӄ܄߯ኧϩѲ!
!
ਥᏵॊϐǵ༝Ϸᐍ༝Տ౽ܫεᐒᄬǴёаᘜયр߄ 4/2ǶӧԵໆ Տ౽ܫεᆶᔈΚύΠǴᐍ༝ϐՏ౽ܫεᐒᄬࢂૈᅈىीҞޑᒧǴ ӢԜҁፕЎஒᒧҔԜᐒᄬբࣁՏ౽ठηسϐ൳ՖᄬࠠǶ!
!
߄ 4/2! ኙ܄Տ౽ܫεᐒᄬϐ൳Ֆᜢ߯!
൳Ֆރ! ! ༝! ᐍ༝!
Տ౽ܫε! 2/9 ७! 2 ७! 9 ७!
ᔈΚύ! ֽ༟܄ᡂ! ቸ܄ᡂ! ቸ܄ᡂ!
! ቸ܄ᔈΚ!
ቸ܄ᔈΚ!
4/3/6!ᐍ༝Տ౽ܫεᐒᄬϐᓸႝठᏔ!
!
კ 4/35 ࣁа DBF ኳᔕԶளᐍ༝Տ౽܄ܫεᐒᄬޑᡂໆکॄϐᜢ߯Ǵёள ᐒᄬখ܄߯ኧ Ltࣁ 2/1678O0͔nǴԶᓸႝϡҹϐখ܄߯ኧ Ltࣁ 231O0͔nǴжΕ Ԅ)4.5*ύǴёаளᓸႝϡҹϐჴሞठᡂໆ!
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ჴሞठᡂໆࢂԾҗᡂໆ̴M1ޑ ::/24&Ƕ!
კ 4/35! ᐍ༝ᖓෘϡҹᔈΚᔈᡂᜢ߯!
!
܌ሡाᓸႝठᡂໆࣁ 6͔n ϐݩΠǴᓸႝϡҹϐԾҗᡂໆ̴M1߾ࣁ!
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ԵቾډᚈӛǴ߾ᕴ՜ߏໆѸࣁ 10.086͔mǶԶᓸႝϡҹ PSt 150/5x5/ 7 ёаග
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