Design and Fabrication of Three Dimensional Micro Mirror Piezoelectric Actuators 許承岳、鄭江河
E-mail: [email protected]
ABSTRACT
Because the change of science and technology adds the improvement that people's quality of the life required, development and studying absorbed quite a lot of mental and physical efforts to the display of all circles. In development of the projection television using the digital light processing (DLP) technology. Focus the light source on and cross color filter and then throw to DMD chip.
Through urge electrode control every little lens slope angle and control deflection time with switch over all reflection direction throw and present looking like via scene afterwards. Its key technology is making of DMD. This text does analysis and designs to the little surface of the mirror by way of piezoelectricity actuating device promptly to another kind of drive way. The purpose is to analysis that one winds small mirror that axis of center of surface of the mirror rotated and moved. It’s principle is to urge the structure of the piezoelectricity cantilever beam to produce and send motive force and displacement with the voltage, and turn back the roof beam to join surface of the mirror and get the result of rotate or surface of the mirror of translation through the coincidence roof beam, and make the micro mirror of the same level have the degree of freedom .
Keywords : Piezoelectric, Micro mirror, Sol-gel
Table of Contents
封面內頁 簽名頁 授權書...iii 中文摘要...iv 英文摘 要...v 誌謝...vi 目錄...vii 圖目
錄...x 表目錄...xiii 緒論...1 第一章 第二章 1.1前 言...1 1.2本文目標...6 1.3國內外有關本問題之研究情況...8 1.3.1國內目前研究 狀況...8 1.3.2國外目前研究狀況...10 壓電薄膜發展製作與量測...12 2.1鐵電薄膜之發
展...12 2.2鐵電特性...13 2.3鋯鈦酸鉛(Pb(ZrxTi1-x)O3，PZT)鐵電材料...15 2.4 PZT合成方 式...15 2.4.1壓電薄膜製程步驟...17 2.4.2薄膜溶液的備製...18 2.4.3薄膜在基板上的披 覆...20 2.4.4低溫焦化處理...21 2.4.5高溫退火處理...21 2.5薄膜性質量測...22 2.5.1電性量測...22 2.5.2薄膜物性量測...25 第三章 壓電微鏡子結構設計與製作...26 3.1微 鏡子幾何結構設計...26 3.2微鏡子自由度之設計...29 3.2.1微鏡面中心繞x軸轉動...29 3.2.2微鏡 面中心繞y軸轉動...30 3.2.3微鏡面中心沿z軸平移...31 3.3複合結構之理論...32 3.4壓電微鏡 子ANSYS模擬分析...36 3.4.1壓電懸臂樑位移量分析...36 3.4.2鏡面繞x軸轉動之靜態分析...38 3.4.3鏡面 繞y軸轉動之靜態分析...40 3.4.4鏡面沿z軸平移之靜態分析...41 3.4.5 鏡面扭轉角計算...42 3.4.6 微鏡子 模態分析...43 3.5製程步驟規劃...45 第四章實驗方法與特性量測...48 4.1選擇
以Pt/Ti/Si3N4/Si為基板...49 4.1.1基材的準備...49 4.1.2 MOE系列溶液配製...50 4.1.3 PZT薄 膜厚度的量測...50 4.1.4晶格結構XRD分析...51 4.1.5電性分析...53 4.2 diol系列溶液配 製...54 4.2.1薄膜厚度的量測...54 4.2.2晶格結構XRD分析...55 4.2.3電性分
析...57 4.3壓電致動器微鏡子製作...59 4.3.1微鏡子之結構製作...59 4.3.2壓電微鏡子製 作...60 第五章總結...62 5.1結論...62 5.2未來研究方向...63 參考文獻...65
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