以常壓熱化學氣相沉積法成長奈米碳管之研究 韓世澤、姚品全
E-mail: [email protected]
摘 要
本研究以常壓熱化學氣相沉積法(atmospheric thermal CVD) 成長奈米碳管。藉溶膠-凝膠法(sol-gel)將觸媒先驅物旋轉塗佈於 矽基板，經由線上還原，(In-Situ eduction)以化學氣相沉積法成 長奈米碳管。由我們的研究可觀察到幾個現象：(1)前處理時 間、 氣體流量、溫度、氣體種類、混合比等參數可用以控制奈米碳管之 直徑，(2)800℃ ~ 900℃ 之前處理溫度有利於奈米 碳管之成長， (3)以氨氣作為前處理之氣體比氫好，(4)700℃ ~ 900℃ 之溫度有 利於奈米碳管之成長，(5)添加氫氣比不添加 時，可以成長更完美 型態的 CNT，(6)氫氣、乙炔混合比例相當時有利於奈米碳管之成 長，(7)添加氫氣，作用時間約10-20 分鐘後有利於奈米碳管之成 長，(8)如要控制奈米碳管之成長方向，未來可能需瞭解氨氣、氫 氣和乙炔流量之效應。
關鍵詞 : 觸媒，化學氣相沉積法，奈米碳管
目錄
封面內頁 簽名頁 授權書．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．iii 中文摘要
．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．iv 英文摘要．．．．．．．．．．．．
．．．．．．．．．．．．．．．．．．．．．．．．v 謝誌．．．．．．．．．．．．．．．．．．．．．．．．．．
．．．．．．．．．．．．vi 目錄．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．
．vii 圖目錄．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．x 表目錄．．．．．．．
．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．xiv 第一章 緒論．．．．．．．．．．．．．．．．
．．．．．．．．．．．．．．．．．．1 1.1 前言 ．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．
．．．．1 1.2 研究動機及目的 ．．．．．．．．．．．．．．．．．．．．．．．．．．．．．2 第二章 文獻探討．．
．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．4 2.1 MWNTs及SWNTs的合成 ．．．．．．．．．
．．．．．．．．．．．．．．．．．．4 2.2 奈米碳管的結構．．．．．．．．．．．．．．．．．．．．．．．．．．
．．．19 2.3 奈米碳管的成長機制．．．．．．．．．．．．．．．．．．．．．．．．．．．24 2.4 奈米碳管之純化方 法．．．．．．．．．．．．．．．．．．．．．．．．．．．29 2.4.1 過濾法．．．．．．．．．．．．．．．．．．
．．．．．．．．．．．．．29 2.4.2 氧化法．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．30 2.4.3 層析法．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．31 2.5 溶膠-凝膠法簡介 ．．．．．．
．．．．．．．．．．．．．．．．．．．．．．31 2.6添加氫氣成長奈米碳管之機制 ．．．．．．．．．．．．．．．
．．．．．．．．38 2.6.1添加氫氣對碳沉積型態之影響 ．．．．．．．．．．．．．．．．．．．．．38 第三章 實驗設 備與方法 ．．．．．．．．．．．．．．．．．．．．．．．．．．．．43 3.1 CNT成長裝置實驗步驟 ．．．．．．．
．．．．．．．．．．．．．．．．．．．43 3.1.1 Thermal CVD 系統．．．．．．．．．．．．．．．．．．．．．．
．．．．43 3.1.2 實驗方法．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．44 3.1.3 觸媒之溶膠-凝膠 法及旋轉塗佈法 ．．．．．．．．．．．．．．．．．．．45 3.2 實驗分析儀器與注意事項．．．．．．．．．．．．．
．．．．．．．．．．．．47 3.2.1 掃描式電子顯微鏡．．．．．．．．．．．．．．．．．．．．．．．．．．47 3.2.2 高解析穿透式電子顯微鏡．．．．．．．．．．．．．．．．．．．．．．．48 3.2.3 Raman Spectrum．．．．．．．．
．．．．．．．．．．．．．．．．．．．50 第四章 結果與討論 ．．．．．．．．．．．．．．．．．．．．．．．．
．．．．．．53 4.1前處理對CNT成長特性之影響．．．．．．．．．．．．．．．．．．．．．．．．53 4.1.1 鎳觸媒經 前處理後之型態．．．．．．．．．．．．．．．．．．．．．．．53 4.1.2 使用氫氣、氨氣及其混合氣體之比較．．．
．．．．．．．．．．．．．．．56 4.1.3 未前處理無法成長奈米碳管．．．．．．．．．．．．．．．．．．．．．
．60 4.1.4前處理時間對CNT成長之影響．．．．．．．．．．．．．．．．．．．．．．61 4.1.5 不同參數對CNT成長之 影響 ．．．．．．．．．．．．．．．．．．．．．．65 4.1.6 前處理作用溫度之影響．．．．．．．．．．．．．．．
．．．．．．．．．68 4.2 成長奈米碳管．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．72 4.2.1 成長 奈米碳管時還原氣體之影響．．．．．．．．．．．．．．．．．．．．72 4.2.2 成長奈米碳管添加氫氣作用時間影響．
．．．．．．．．．．．．．．．．．78 4.2.3 成長奈米碳管添加氫氣作用溫度影響．．．．．．．．．．．．．．．．
．．82 4.2.4 合成奈米碳管乙炔氫氣氬氣等氣體流量比例影響．．．．．．．．．．．．．85 4.2.5 前處理及奈米碳管成長 參數之關係．．．．．．．．．．．．．．．．．．．88 第五章 結論及未來展望 ．．．．．．．．．．．．．．．．．
．．．．．．．．．．．89 5.1結論 ．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．89 5.2
未來展望．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．．90 參考文獻．．．．．．．．．．．．
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