剛性強解析度高之絞鍊綜合驗證

首先針對自行設計的斜邊三角補償絞鍊及交叉平板絞鍊作深入的探 討：對於斜邊三角形絞鍊，在此部分的限制下僅剩對邊長度可變更；而對 於交叉平板絞鍊，在此部分的限制下也僅剩交叉角度可變更。此處我們固 定其長度範圍為15，厚度為 10，斜邊三角形絞鍊中央區塊為 1*1，交叉平 板絞鍊之平板寬度為1，將斜邊長度及交叉角度作增量，以評估此參數的 表現。

0.00E+00

對邊1角度10 對邊1.5角度15 對邊2角度20

基本圓角割痕 斜邊三角形　 交叉平板

圖5.7 斜邊三角補償與交叉平板之變形變量比較圖

0 20 40 60 80 100 120

對邊1角度10 對邊1.5角度15 對邊2角度20

斜邊三角形　 基本圓角割痕 交叉平板

圖5.8 斜邊三角補償與交叉平板之最大應力值比較圖

由上我們可推斷將平板交叉角度在 17、18 度時，和三角補償對邊在 1.4 時，可得到與圓角割痕半徑在 6 時，差不多的解析度，而且可以得到 較小的應力表現。

第六章 結論與未來展望

撓性絞鍊已廣泛應用與各精密度高之儀器及MEMS 結構內，但對於其 尺寸設計、相關參數卻甚少提及，期望此文章可提供後進研究者於設計前 可參考的依據。

1.經由田口法對一般 MEMS 製程所設計之彈性結構體做評估，可知談 平板或彈性體的長度配置與其撓性有明顯的關聯；中央結構設計採彈性結 構，可有效提升其撓度。對陣列式平版葉片鉸鏈，鉸鍊間隔距離並不影響 其表現性。

2.割痕式撓性絞鍊在相同的中心最窄處即可得差異不大的位移結果，

但以橢圓應變量最大；兩端設計在到達一定尺寸下及無明顯差異。若改以 角落補償的概念，將更容易解釋此結果。另外根據此概念已三角形角落補 償可更直接的設計出有相同效果的割痕絞鍊。

3.利用田口式做參數設計及有限元素法進行分析，可有效的測試所設 計之撓性結構，並可得其特性參數及最大影響參數，縮短由拓樸設計至成 品結構尺寸最佳設計之摸索時間。

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