未來工作

我們已經成功的使用高密度電漿化學氣相沉積系統製作出非晶矽(a-Si)薄 膜太陽能電池，未來將持續開發不同能隙的矽基薄膜吸光材料來形成多接面矽薄 膜太陽能電池。目前有兩大方向：(1)藉由調變[H2]/[SiH4]氣體流量比例，我們已 開發出在低氫流量比的條件下成長非晶矽薄膜，其能隙約1.8eV；若在高氫流量 比的條件下可以成長微晶矽(μc-Si)薄膜，其能隙值約 1.1eV。(2)透過有效的鍺(Ge) 原子摻雜，可以沉積非晶矽鍺(a-SiGe)使其能隙調整至約 1.5eV。

單接面非晶矽太陽能電池無法吸收低能量的光，而單接面微晶矽太陽能電池 會有熱損耗問題，所以這兩種單接面太陽能電池的轉換效率較低，約 10%左右。

若將這兩種不同能隙的材料所製程的太陽能電池做成堆疊結構，將可吸收不同波 段的光源，形成 a-Si/μc-Si 雙接面薄膜太陽能電池。由於太陽光的吸收範圍及 利用率增加，因此效率可提升至 12%。若再加上 a-SiGe 材料而形成 a-Si/a-SiGe/

μc-Si 三接面薄膜太陽能電池，效率更可達到 15%[13]。

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