結論

本論文採用 PLD 系統在 c-sapphire 上成長 100 nm 厚的釔釤鐵石榴石薄膜，

以探究其鍍膜速率、結構特性、表面形貌、和磁光特性，薄膜樣品在氧壓3 × 10

⁻¹

mbar、基板溫度 525 ℃、雷射波長 266 nm 能量密度 3.5 J/cm²，製備完成 後，在使用高溫爐在大氣情況下做 1050 ℃熱退火 4 小時。

個別取代比例樣品的鍍膜速率在 1.66 和 2.86 nm/min 之間，且和比例無 關，X 光繞射和拉曼散射光譜顯示，所有薄膜樣品均維持 YIG 立方對稱的石榴 石結構，但 x =2.0 和 x =2.5 為非晶相薄膜，其餘皆為多晶相，多晶薄膜的晶格 常數在 12.3046～12.4669 Å 之間，只有 x = 1.5 的薄膜晶格常數小於塊材 YIG 的 晶格常數。拉曼光譜在 x = 2.5 的薄膜有觀察到 Sm³⁺的散射峰出現，其餘都呈現 YIG 的拉曼振動模式。

薄膜的表面形貌以圓形為主，部分取代的薄膜表面粒徑較小也較一致，所 有的薄膜方均根粗糙度在 6.839 nm～10.32 nm 之間，和取代量無明確關係。法 拉第磁光在 380 nm 和 640 nm 之間，可觀察到磁滯曲線，代表樣品具有磁垂直 異相性。其矯頑場在 2 mT 到 250 mT 之間，飽和法拉第旋轉角差值在 15.186 mrad 和 747.413 mrad 之間，兩者隨著比例增加而增加到 X=1.5 和 2.0 達到最 大，而 X=2.0～3.0 之間隨比例增加下降，此外 380 和 400 前後可觀察到磁滯曲 線反向的現象，這是左右旋光在不同波長對樣品的折射率變化所造成，磁光柯 爾效應則觀察不到磁滯曲線，原因推測是薄膜樣品過於透明反射的光學訊號與 雜訊之間無法分離。

74

參考資料

[1] M. A. Popov, I. V. Zavislyak, and G. Srinivasan, “A MAGNETIC FIELD TUNABLE YTTRIUM IRON,” Progress In Electromagnetics Research C, pp. Vol. 25, 145-157, (2012).

[2] Wan Fahmin Faiz Wan Ali, Hasnul Hakimi Jaafar, Mohd Fadzil Ain, Norazharuddin Shah

Abdullah & Zainal Arifin Ahmad, “Enhancement of YIG bandwidth efficiency through Ce-doping for dielectric resonator antenna (DRA) applications,” Journal of Materials Science Materials in Electronics, pp. 26, pages504–514, (2015).

[3] Wan Fahmin FaizWan Ali, MohamadariffOthman, Mohd FadzilAin, Norazharuddin Shah Abdullah, Zainal Arifin Ahmad, “From optimization to dielectric resonator antenna (DRA) applicationof YIG: Synthesis approach,” Journal of Alloys and Compounds, pp. Volume 645, Pages 541-552, (2015).

[4] Vincent G.Harris,Anton Geiler,Yajie Chen,Soack Dae Yoon,Mingzhong Wu,Aria Yang,Zhaohui Chen,Peng He,Patanjali V. Parimi,Xu Zuo,Carl E. Patton,Manasori Abe,Olivier Acher,Carmine Vittoria, “Recent advances in processing and applications of microwave ferrites,” Journal of Magnetism and Magnetic Materials, pp. Volume 321, Issue 14, Pages 2035-2047, 2009.

[5] V V Kruglyak, S O Demokritov and D Grundler, “Magnonics,” Journal of Physics D: Applied Physics, pp. Volume 43, Number 26, (2010).

[6] T. S. a. D. Grundler, “Magnonic crystal wave guide with large spin-wave propagation velocity in CoFeB,” Applied Physics Letters, pp. Volume 102, Issue 22,10.1063/1.4809757, (2013).

[7] Benjamin Lenk, Henning Ulrichs, Fabian Garbs, Markus Münzenberg, “The building blocks of magnonics,” Materials Science, pp. Physics Reports 507, 107-136, (2011).

[8] A. Khitun, “Multi-frequency magnonic logic circuits for parallel data processing,” Journal of Applied Physics, pp. Volume 111, Issue 5,10.1063/1.3689011, (2012).

[9] Sergiy Cherepov, Pedram Khalili Amiri, Juan G. Alzate, Kin Wong, Mark Lewis,, “Electric-field-induced spin wave generation using multiferroic magnetoelectric cells,” APPLIED PHYSICS LETTERS, pp. 104, 082403, (2014).

[10] T. Fischer, M. Kewenig, D. A. Bozhko, A. A. Serga, I. I. Syvorotka, F. Ciubotaru, C. Adelmann, B. Hillebrands, and A. V. Chumak, “Experimental prototype of a spin-wave majority gate,”

Applied Physics Letters, pp. 110, 152401, (2017).

[11] M Krawczyk,D Grundler, “Review and prospects of magnonic crystals and devices with

reprogrammable band structure,” Journal of Physics: Condensed Matter, pp. Volume 26,, (2014).

[12] Andrii V. Chumak, Alexander A. Serga & Burkard Hillebrands , “Magnon transistor for

all-magnon data processing,” Nature Communications , pp. volume 5, Article number: 4700, (2014).

75

[13] Haiming Yu, O. d’ Allivy Kelly, V. Cros, R. Bernard, P. Bortolotti, A. Anane, F. Brandl, F.

Heimbach & D. Grundler , “Approaching soft X-ray wavelengths in nanomagnet-based microwave technology,” Nature Communications, pp. volume 7, 11255, (2016).

[14] Christoph Hauser, Tim Richter, Nico Homonnay, Christian Eisenschmidt, Mohammad Qaid, Hakan Deniz, Dietrich Hesse, Maciej Sawicki, Stefan G. Ebbinghaus & Georg Schmidt , “Yttrium Iron Garnet Thin Films with Very Low Damping Obtained by Recrystallization of Amorphous,”

Scientific Reports, pp. volume 6, Article number: 20827 , (2016).

[15] Biswanath Bhoi, Bosung Kim, Yongsub Kim, Min-Kwan Kim, Jae-Hyeok Lee, and Sang-Koog Kim, “Stress-induced magnetic properties of PLD-grown high-quality ultrathin YIG,” Journal of Applied Physics , pp. 123, 203902, (2018).

[16] Makiyyu Abdullahi Musa,Raba'ah Syahidah Azis,Nurul Huda Osman,Jumiah Hassan,Tasiu Zangina, “Structure and magnetic properties of yttrium–iron–garnet thin films,” Results in Physics, pp. Volume 7, Pages 1135-1142, (2017).

[17] A. Sposito, “Pulsed laser deposition of thin film magneto-optic materials and lasing waveguides,”

University of Southampton, Physical Sciences and Engineering, Doctoral Thesis, p. 259pp, (2014).

[18] 郭豐瑋, “釔鐵石榴石的 MCD 研究”.

[19] “Pulsed laser deposition of thin film magneto-optic materials and lasing waveguides”.

[20] “化學週期表(https://images-of-elements.com/),” (2019).

[21] “kyocera 材料供應商(https://americas.kyocera.com/products/)”.

[22] 何焱騰 ; 馬俊皓 ; 張翼, “脈衝雷射鍍膜技術在二維材料之應用,” 奈米通訊 , pp. 22:1 頁 20-27, (2015).

[23] ma-tek, “薄膜厚度輪廓測量儀 (α-step)”.

[24] “Powder Diffraction on the Web(http://img.chem.ucl.ac.uk/)”.

[25] “多功能薄膜 X 光繞射儀

(HRXRD)(http://www.pisc.fcu.edu.tw/?lnk=instrument_detail&iid=10)”.

[26] “bruker(X-ray diffraction)”.

[27] José Francisco Barrón,Leticia Hernández Cruz,Félix Sánchez De Jesús,Ana María Bolarín-Miró,

“Vibrational and magnetic properties of YIG ferrite powders,” Journal of Physics: Conference Series, p. Series 1221, (2019).

[28] 陳建淼,洪連輝, “磁性物質,” 科學 Online(https://highscope.ch.ntu.edu.tw/wordpress/?p=1629), (2009).

[29] 李聖尉,蔡志申, “磁性物質（Ⅰ）–反磁性、順磁性（Magnetic Material–Ⅰ）,” 科學 Online(https://highscope.ch.ntu.edu.tw/wordpress/?p=22512), 2011.

[30] “中山大學演示實驗(http://www2.nsysu.edu.tw/physdemo/2012/B4/B4.htm)”.

76

[31] “磁性物質（Ⅱ）–鐵磁性、反鐵磁性（Magnetic Material–Ⅱ）,” 科學 Online(https://highscope.ch.ntu.edu.tw/wordpress/?p=22506), 2011.

[32] zh.wikipedia, “法拉第效應”.

[33] “磁性理論與柯爾磁光原理與實驗

(http://rportal.lib.ntnu.edu.tw/bitstream/20.500.12235/102630/4/n069441014404.pdf)”.

[34] 蔡志申, “表面磁光科爾效應與超薄膜磁性性質,” 物理雙月刊, pp. 廿五卷五期, 605, (2003).

[35] 蘇書玄,李彥龍,蔡志申, “表面磁光科爾效應系統與 Co/Ir(111)之磁性研究,” 表面磁光科爾效 應系統與 Co/Ir(111)之磁性研究 , p. 東海科學第六卷：1−15 , 2004.

[36] 陳建淼,洪連輝, “柯爾磁光效應,” 科學

Online(https://highscope.ch.ntu.edu.tw/wordpress/?p=1595), (2009).

[37] Jin-Joo Song, P. B. Klein, R. L. Wadsack, M. Selders, S. Mroczkowski, and R. K. Chang,

“Raman-active phonons in aluminum, gallium, and iron garnets*,” OSA Publishing, pp. Volume 63,Issue 9,Page 1135, (1973).

[38] Eduardo Mallmann,Sergio Sombra,Júlio Cesar Góes,P. B. A. Fechine, “Yttrium Iron Garnet:

Properties and Applications Review,” Solid State Phenomena, pp. 202:65-96, (2013).

[39] Ravinder Kumar, Z. Hossain, and R. C. Budhania, “Effects of post-deposition annealing on the structure and magnetization of PLD grown,” Journal of Applied Physics, pp. 121, 113901, (2017).

[40] Muhammad Yousaf,Asma Noor,ShuaiXu,Majid NiazAkhtar,BaoyuanWang, “Magnetic characteristics and optical band alignments of rare earth (Sm+3, Nd+3) doped garnet ferrite nanoparticles (NPs),” Ceramics International, pp. Volume 46,Pages 16524-16532, 2020.

[41] M.Yousaf,Majid Niaz Akhtar,Baoyuan Wang,Asma Noor, “Preparations, optical, structural, conductive and magnetic evaluations of RE's (Pr, Y, Gd, Ho, Yb) doped spinel nanoferrites,”

Ceramics International, pp. Volume 46, Issue 4, Pages 4280-4288, (2020).

[42] 黃英碩, “掃描探針顯微術的原理及應用,” 科儀新知, p. 第二十六卷第四期 94.2.

77

附錄

靶材製作計算

首先我們利用下面的計算來準備我們所需要的粉末重量，首先為 YIG 摻雜 Sm

₂

O

₃

製程

Y

_3−𝑥

𝑆𝑚

_𝑥

𝐹𝑒

₅

𝑂

₁₂

𝑥: 0~2.5 設定Sm

₂

𝑂

₃

為 x(g)，YIG 為 8-x(g)

Sm

₂

O

₃

: YIG = a: 3 − a = 2𝑥

𝑀

_Sm

₂

_O

₃:3 ∙ (8 − 𝑥) 𝑀

_YIG

經過整理我們可以得到下式

x = 8 ∙ 3𝑎 ∙ 𝑀

_Sm

₂

_O

₃

2 ∙ (3 − 𝑎) ∙ 𝑀

_YIG

+ 3𝑎 ∙ 𝑀

_Sm

₂

_O

₃

使用Fe

₂

O

₃

摻雜Sm

₂

O

₃

，製成Sm

₃

𝐹𝑒

₅

𝑂

₁₂

時，設定Sm

₂

𝑂

₃

為 x(g)，𝐹𝑒

₂

𝑂

₃

為 8-x(g) Sm

₂

O

₃

: 𝐹𝑒

₂

𝑂

₃

= 3: 5 = 𝑥

𝑀

_Sm

₂

_O

₃:(8 − 𝑥) 𝑀

_𝐹𝑒

₂

_𝑂

₃ 整理後我們可得到下式

x = 24 ∙ 𝑀

_Sm

₂

_O

₃ 3 ∙ 𝑀

_Sm

₂

_O

₃ + 5 ∙ 𝑀

_𝐹𝑒

₂

_𝑂

₃

利用上面的所得到的式子可以知道所需要使用的粉末重量分別為多少，下表 8 為我們製作靶材使用的粉末重量。

78

靶材配方表

𝒀

_𝟑−𝒙

𝑺𝒎

_𝒙

𝑭𝒆

_𝟓

𝑶

_𝟏𝟐

𝒙: 𝟎~𝟑 重量(g) 𝒀

_𝟑

𝑭𝒆

_𝟓

𝑶

_𝟏𝟐

𝐘

_𝟑

𝑭𝒆

_𝟓

𝑶

_𝟏𝟐 8

X=0 𝐒𝐦

_𝟐

𝐎

_𝟑 --

𝒀

_𝟐.𝟓

𝑺𝒎

_𝟎.𝟓

𝑭𝒆

_𝟓

𝑶

_𝟏𝟐

𝐘

_𝟑

𝑭𝒆

_𝟓

𝑶

_𝟏𝟐 1.7617

X=0.5 𝐒𝐦

_𝟐

𝐎

_𝟑 6.2418

𝒀

_𝟐

𝑺𝒎

_𝟏

𝑭𝒆

_𝟓

𝑶

_𝟏𝟐

𝐘

_𝟑

𝑭𝒆

_𝟓

𝑶

_𝟏𝟐 3.3096

X=1.0 𝐒𝐦

_𝟐

𝐎

_𝟑 4.6915

𝒀

_𝟏.𝟓

𝑺𝒎

_𝟏.𝟓

𝑭𝒆

_𝟓

𝑶

_𝟏𝟐

𝐘

_𝟑

𝑭𝒆

_𝟓

𝑶

_𝟏𝟐 4.6833

X=1.5 𝐒𝐦

_𝟐

𝐎

_𝟑 3.3184

𝒀

_𝟏

𝑺𝒎

_𝟐

𝑭𝒆

_𝟓

𝑶

_𝟏𝟐

𝐘

_𝟑

𝑭𝒆

_𝟓

𝑶

_𝟏𝟐 6.4697

X=2.0 𝐒𝐦

_𝟐

𝐎

_𝟑 1.5314

𝒀

_𝟎.𝟓

𝑺𝒎

_𝟐.𝟓

𝑭𝒆

_𝟓

𝑶

_𝟏𝟐

𝐘

_𝟑

𝑭𝒆

_𝟓

𝑶

_𝟏𝟐 7.0125

X=2.5 𝐒𝐦

_𝟐

𝐎

_𝟑 0.9938

𝑺𝒎

_𝟑

𝑭𝒆

_𝟓

𝑶

_𝟏𝟐

𝑭𝒆

_𝟐

𝑶

_𝟑 3.4686

X=3 𝐒𝐦

_𝟐

𝐎

_𝟑 4.5376

79

不同摻雜厚度𝒀

_𝟑−𝒙

𝑺𝒎

_𝒙

𝑭𝒆

_𝟓

𝑶

_𝟏𝟐

, 𝒙 = 𝟎~𝟑，鍍膜速率表

各摻雜比例對應晶格常數

𝑌

_3−𝑥

𝑆𝑚

_𝑥

𝐹𝑒

₅

𝑂

₁₂

立方晶格 a = b = c , (Å) 𝑥 = 0.0 12.39304 𝑥 = 0.5 12.3854 𝑥 = 1.0 12.39794 𝑥 = 1.5 12.30463 𝑥 = 2.0 -- 𝑥 = 2.5 -- 𝑥 = 3.0 12.46693

𝒀

_𝟑−𝒙

𝑺𝒎

_𝒙

𝑭𝒆

_𝟓

𝑶

_𝟏𝟐

鍍膜速率-時間(min/nm) 𝒀

_𝟑

𝑭𝒆

_𝟓

𝑶

_𝟏𝟐

, 𝒙 = 𝟎. 𝟎 2.61 ±0.11

𝒀

_𝟐.𝟓

𝑺𝒎

_𝟎.𝟓

𝑭𝒆

_𝟓

𝑶

_𝟏𝟐

, 𝒙 = 𝟎. 𝟓 2.08 ± 0.05 𝒀

_𝟐

𝑺𝒎

_𝟏

𝑭𝒆

_𝟓

𝑶

_𝟏𝟐

, 𝒙 = 𝟏. 𝟎 1.66 ± 0.05 𝒀

_𝟏.𝟓

𝑺𝒎

_𝟏.𝟓

𝑭𝒆

_𝟓

𝑶

_𝟏𝟐

, 𝒙 = 𝟏. 𝟓 2.25 ± 0.17 𝒀

_𝟏

𝑺𝒎

_𝟐

𝑭𝒆

_𝟓

𝑶

_𝟏𝟐

, 𝒙 = 𝟐. 𝟎 2.86 ± 0.11 𝒀

_𝟎.𝟓

𝑺𝒎

_𝟐.𝟓

𝑭𝒆

_𝟓

𝑶

_𝟏𝟐

, 𝒙 = 𝟐. 𝟓 2.21 ± 0.06 𝑺𝒎

_𝟑

𝑭𝒆

_𝟓

𝑶

_𝟏𝟐

, 𝒙 = 𝟑. 𝟎 2.55 ± 0.02

80

樣品與與釔鐵石榴石拉曼訊號對照表

YIG Raman shift(cm^-1)

理論 x=0.0 x=0.5 x=1.0 x=1.5 x=2.0 x=2.5 x=3.0

T2g 194 195.03 197.05 192.01 195.03 199.73

Eg 319 320.36 325.91 320.40 319.17

Eg 346 347.40 343.39 346.38 353.81 346.43

T2g 378 378.51 371.51 374.90

T2g 445 446.36 444.36

A1g 504 510.47 504.43 505.70 508.68 506.37

Eg 624 620.10 613.70 616.01 612.41 619.88

樣品與與 Fe

³⁺

拉曼訊號對照表

Fe

2

O

3

Raman shift(cm

^-1

)

理論 x=0.0 x=0.5 x=1.0 x=1.5 x=2.0 x=2.5 x=3.0

E

g

243 245.10 246.14

E

u

659 669.83 671.80 672.10 668.58 663.57 668.38

2E

u

1316 1330.90 1329.13 1331.08 1329.20 1293.93 1333.01

樣品與 Sm

³⁺

拉曼訊號對照表

Sm 2 O 3 Raman shift(cm ^-1 )

理論 x=0.0 x=0.5 x=1.0 x=1.5 x=2.0 x=2.5 x=3.0

A g 244.25 245.10 246.14

E g 472.59 469.63

81

不同摻雜比例與方均粗糙度(Rq)

𝒀

_𝟑−𝒙

𝑺𝒎

_𝒙

𝑭𝒆

_𝟓

𝑶

_𝟏𝟐

, 𝒙 = 𝟎~𝟑

RMS roughness, Rq

𝐱 = 𝟎. 𝟎

23.0805

𝐱 = 𝟎. 𝟓

7.45276

𝐱 = 𝟏. 𝟎

7.68897

𝐱 = 𝟏. 𝟓

7.51731

𝐱 = 𝟐. 𝟎

6.83912

𝐱 = 𝟐. 𝟓

10.3201

𝐱 = 𝟑. 𝟎

14.678

在文檔中 摻雜釤元素的釔鐵石榴石之磁性探討 (頁 80-88)