• 沒有找到結果。

對於以PLD 在不同縱向磁場下成長之 AZO 透明導電膜結構 的分析我們得到以下的結論:

(1) 由 GIXRD 及 Zn K-edge XANES 量測結果可知,在 C006 磁 場條件下成長的 AZO 薄膜有最佳的 ZnO(0 0 2)排序性以 及方向性。

(2) 由 O 及 Al K-edge XANES 能譜分析發現,電阻與 O 2p 懸 鍵的多寡及在 c 軸上 Al 與 O 共價特性的增加有關。

(3) 由 O Kα NXES 及 O K-edge XANES 的結果得知,AZO 薄膜 的能帶寬度保持不變。

(4) 於本研究中,AZO 薄膜電性的表現會受到樣品 c 軸上的排 序成長性、O 2p 懸鍵的多寡和 Al2O3共價特性的影響而改

變。

參考文獻

1. 〝透明導電膜〞, 楊明輝編著(藝軒圖書出版社, 2006).

2. 〝透明導電膜及其應用〞, 李玉華(科儀新知, 1990).

3. S. Ducourtieux, V. A. Podolskiy, S. Gresillon, S. Buil, B. Berini, P. Gadenne, A. C. Boccara, and V. M. Shalaev, “Near-field optical studies of semicontinuous metal films” , Phys. Rev. B 64, 165403 (2001) Impurity Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering” , Jpn. J. Appl. Phys. 24, 781 (1985).

9. Z. C. Jin, I. Hamberg, and C.G. Granqvist, J. Appl. Phys. 64, 5117 (1988).

10. http://ncsr.csci-va.com/materials/zno.asp 11. A. R. Hutson, Phys. Rev. 108, 222 (1957).

12. G. Peleckis, X. L. Wang, R. S. Liu , and S. X. Dou, IEEE transactions on magnetics 41, 2727 (2005).

13. M. Venkatesan, C. B. Fitzgerald, J. G. Lunney, and J. M. Coey,

B. Orlinskii, J. Schmidt, and P. G. Baranov, Phys. Rev. Lett. 88, 045504 (2002). Thin Solid Films, 403, 485 (2002).

21. Y. Kashiwaba, K. Sugawara, K. Haga, H. Watanabe, B. P. Zhang, and Y. Segawa, Thin Solid Films 411, 87 (2002).

22. K. C. Hsiao, S. C. Liao and Y. J. Chen, Material Science, and Engineering A 447, 71 (2007).

23. G. G. Valle, P. Hammer, S. H. Pulcinelli, and C. V. Santilli,

24. R. B. H. Tahar, Journal of the European Ceramic Society 25, 3301 (2005).

25. H. M. Ali, M. M. Abd El-Raheem, N. M. Megahed, and H. A.

Mohamed, Journal of Physics and Chemistry of Solids 67, 1823 (2006).

26. D. R. Sahu, Shin-Yuan, and Jow-Lay Huang, Microelectronic Journal 38, 245 (2007).

27. M. A. Martinez, J. Herrero, and M. T. Gutierrez, Solar Energy Materials and Solar Cells 45, 75 (1997).

28. Jyh-Ming, and B. S. Tsai, Materials Chemistry and Physics 72, 273 (2001).

29. Kh. A. Abdullin, A. B. Aimagambetov, N. B. Beisenkhanov, A.

T. Issova, B. N. Mukashev, and S. Zh. Tokmoldin, Material Science and Engineering B 109, 241 (2004).

30. H. Ko, W. P. Tai, K. C. Kim, S. H. Kim, S. J. Suh, and Y. S. Kim, Journal of Crystal Growth 277, 352 (2005).

31. B. Y. Oh, M. C. Jeong, W. Lee, and J. M. Myoung, Journal of Crystal Growth 274, 453 (2005).

32. H. Agura, A. Suzuki, T. Matsushita, T. Aoki, and M. Okuda, Thin Solid Films 445, 263 (2003).

33. R. K. Shukla, Anchal Srivastava, Atul Srivastava, and K. C.

34. S. S. Harilal, M. S. Tillack, B. O’Shay, C. V. Bindhu, and F.

Najmabadi, Phys. Rev. E 69, 026413 (2004).

35. D. J. Kwak, M. W. Park, and Y. M. Sung, Vacuum 83, 113 (2009).

36. W. Li, Y. Sun, Y. Wang, H. Cai, F. Liu, and Q. He, Solar Energy Materials & Solar Cells 91, 659 (2007).

37. S. S. Harilal, C. V. Bindhu, M. S. Tillack, F. Najmabadi, and A.

Technol. A 14, 1668 (1996).

41. 〝Introduction to solid state physics〞, Charles Kittel, 8th edition.

42. 〝Elements of X-ray diffraction〞, B. D. Cullity, and S. R.

Stock.

43. 國家同步輻射研究 http://www.nsrrc.org.tw/chinese/index.aspx 44. 〝User's Manual of the 6m-HSGM Beamline at SRRC〞, May

1996.

45. 〝Data adapted from handbook published by Taiwan SRRC〞.

46. 〝X-Ray Absorption:Principles, Application, Techniques of EXAFS, SEXAFS, SEXAFS and XANES〞, edited by D. C.

Koningsberger, and R.Prins, Chem. Analysis 92 (John Wiley &

Sons,Canada,1988).

47. D. E. Sayers, E. A. Sayers, E. A. Stern, and F. W. Lytle, Phys.

Rev. Lett. 27, 1024 (1971).

48. 〝NEXAFS Spectroscopy〞, edited by Joachim Stohr (Srin-ger-Verlag 1991).

49. 〝X 射線吸收精細結構及其應用〞, 王其武編著(科學出版社, 1994).

50. 〝EXAFS , Basic Principle and Data Analysis〞, edited by Boon K. Teo (Springer-Verlag 1986).

51. 〝同步輻射應用概論〞, 馬禮敦、楊福家編著(復旦大學出版 社,2005).

52. 〝EXAFS and Near edge structure〞, edited by A. Bianconi, L.

Incoccia and S. Stipcich (Springer-Verlag, Heidelberg, 1983).

53. J. Hajdu and I. Andersson,“Fast Crystallography and Time-Resolved Stuctures”, Ann Rev Biophys Biomol Struct. 22,

467 (1993).

54. W. A. Hendrickson,“Synchrotron Crystallography”, Trends

Biochem Sci. 25, 637 (2000).

55. R. C. Stevens, S. Yokoyama, and I. A. Wilson, “Global Effects in structural Genomics” , Science. 294, 89 (2001).

56. W. Thomlinson, M. Ando, and C. Uyama, “Synchroteon Radiation Applications in Medical Research” , Medical App-lcations of Synchrotron Radiation (Springer-Verlag, Tokyo, 1998).

57. W. Thomlinson,“Medical Application of Synchrotron Radia-tion”, Phys. Med. Biol. 48, R1 (2003).

58. E. H. George, “Macromolekule Structur Eigenschaften Synt-hsen”, (Huthig & Wepf Verlag Basel, Heidelberg , 1972).

59. A. Sapelkin, S. Bayliss and A. Lyapin, J. Syn. Rad. 6, 492 (1999).

60. F. Sette, C. T. Chen, Y. Ma, S. Modesti, and N. V. Smith, AIP Conf. Proc. 215, 787 (1990).

61. C. S Hwang, F. Y. Lin., C. H. Lee, K. L. Yu, P. K. Tseng, J. T.

Lin, H. C. Tseng, W. C. Su, J. R. Chen, T. L. Lin, and W. F.

Pong, Rev. Sci. Instrum. 69, 1230 (1998).

62. B. K. Teo, and D. C. Joy, “The EXAFS Family Tree: a Personal History of Development os EXAFS” , EXAF Spectroscopy Techniques and Application New York, Plenum

63. J. H. Guo, L. Vayssieres, C. Persson, R. Ahuja, B. Johansson, and J. Nordgren, J. Phys.: Condens. Matter 14, 6969 (2002).

64. J. W. Chiou, J. C. Jan, H. M. Tsai, C. W. Bao, W. F. Pong, M.-H.

Tsai,I.-H. Hong, R. Klauser, J. F. Lee, J. J. Wu, and S. C. Liu, Appl. Phys. Lett. 84, 3462 (2004).

65. E. P. Mikheeva, S. V. Koscheev, S. Ph. Ruzankin, G. M.

Zhidomirov, S. A. Leontiev, V. G. Devjatov, and A. E.

Ch-erkashin, J. Electron Spectrosc. Relat. Phenom. 94, 59 (1998).

66. P. J. Møller, S. A. Komolov, and E. F. Lazneva, J. Phys.

Condens. Matter 11, 9581 (1999).

67. J. W. Chiou, J. C. Jan, H. M. Tsai, C. W. Bao, and W. F. Pong, Appl. Phys. Lett. 84, 3220 (2004).

68. D. Li, and G. M. BlNcnorr, American Mineralogist Volume 80, 432 (1995).

69. I. L. Dehmer, “Evidence of effective potential barriers in the X-ray absorption spectra of molecules” , J. Chem. Phys. 56, 4496 (1972).

70. G. E. Brown, F. D. Dikman, and D. A. Waychunas, “Total electron yield K-XANES and EXAFS investigation of aluminum in amorphcus and crystalline aluminosilicates” ,

71. J. A. Tossell, “The electronic structures of silicon, aluminum

and magnesium in tetrahedral coordination with oxygen from SCF-XαMO calculations” , Journal of American Chemical Society 97, 484 (1975).

72. T. Mizoguchi, M. Yoshiya, J. Li, F. Oba, I. Tanaka, and H.

Adachi, Ultramicroscopy 86, 363 (2001).

73. P. Schröer, P. Krüger and J.Pollmann, Phys. Rev. B 47, 6971 (1993).

74. E. Y. M. Lee, N. Tran, J. Russell and R. N. Lamp, J. Appl. Phys.

92, 2996 (2002).

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