Hf(hfo2) Hf-O Hf-O
18.29 16.63
Fig. 4-30 The Hf 4f ESCA spectra of the HfO2 LTPS-TFT without plasma treatment.
22 21 20 19 18 17 16 15 14 13
0 10000 20000 30000 40000 50000 60000
Cou nt s
Binding Energy (eV)
Hf(hfo2) Hf-O Hf-O Hf-F Hf-F
Fig. 4-31 The Hf 4f ESCA spectra of the HfO2 LTPS-TFT with dual plasma treatment.
159
675 680 685 690 695
2.3x105 2.3x105 2.3x105 2.3x105 2.3x105 2.4x105 2.4x105
Cou nt s
Binding Energy (eV)
F 1s
Fig. 4-32 The F 1s ESCA spectra of the HfO2.
160
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