Future works

The high dielectric constant material in MIM capacitors was investigated for a long time. The most important challenge for RF capacitors is the voltage nonlinearity. The other mechanisms of the voltage nonlinearity may be existed. In this thesis, we also found that the VCC- has proportional relationship with the capacitance density. It is tradeoff between the VCC- and the capacitance density. Therefore, to find a high dielectric constant material with small VCC properties or combine negative VCC material such as SrTiO3 are both good research directions.

different metals as the electrode might be used.

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