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前瞻矽元件製作技術開發與感測器應用之研究

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國 立 交 通 大 學

電子工程學系電子研究所

博 士 論 文

前瞻矽元件製作技術開發

與感測器應用之研究

Studies of Exploratory Silicon Device

Fabrication and Sensor Application

研 究 生 :陳豪育

指導教授 :簡昭欣 博士

(2)

前瞻矽元件製作技術開發與感測器應用之研究

Studies of Exploratory Silicon Device Fabrication

and Sensor Application

研究生:陳豪育 Student: Hou-Yu Chen

指導教授:簡昭欣 博士 Adviser:Dr. Chao-Hsin Chien

國立交通大學

電子工程學系 電子研究所

博士論文

A Dissertation

Submitted to Department of Electronics Engineering and Institute of Electronics

Collage of Electrical and Computer Engineering National Chiao Tung University

in Partially Fulfillment of the Requirements For the Degree of

Doctor of Philosophy in

Electrical Engineering March 2011

HsinChu, Taiwan, Republic of China

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