化學機械研磨機台製程設備模擬器及控制器之設計與實作
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(2) 化學機械研磨機台製程設備模擬器及控制器 之設計與實作 Development of simulator and control system for CMP process equipment 研究生：陳鼎銘. Student：Ting-Ming Chen. 指導教授：林家瑞. Advisor：Dr. Chia-Shui Lin. 國立交通大學 機械工程學系 碩士論文. A Thesis Submitted to Department of Mechanical Engineering College of Engineering National Chiao-Tung University in partial Fulfillment of the Requirements for the Degree of Master of Science in Mechanical Engineering June 2006 Hsinchu, Taiwan, Republic of China. 中華民國九十五年六月.
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