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以氫化物氣相磊晶技術在獨立式氮化鎵基板上再成長氮化鎵厚膜

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國立交通大學

電子物理研究所

碩士論文

以氫化物氣相磊晶技術在獨立式氮化鎵基板上再成

長氮化鎵厚膜之研究

Regrowth Of Thick Films On Free-Standing GaN Substrates

By HVPE

研 究 生:高仲山

指導教授:李威儀 博士

(2)

以氫化物氣相磊晶技術在獨立式氮化鎵基板上再成長氮化

鎵厚膜之研究

Regrowth Of Thick Films On Free-Standing GaN Substrates By

HVPE

研 究 生:高仲山 student:Zhong-Shan Gao

指導教授:李威儀 博士 Advisor:Dr. Wei-I Lee

國立交通大學

電子物理研究所

碩士論文

A Thesis

Submitted to Institute of Electrophysics College of Science

National Chiao Tung University

in partial Fulfillment of the Requirements for the Degree of Master of Science

In

Electrophysics July 2009

Hsinchu, Taiwan, Republic of China 中華民國九十八年七月

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