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偏光片-樣品-析光片之影像式橢圓偏光術

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國 立 交 通 大 學

光電工程研究所

博 士 論 文

偏光片-樣品-析光片之影像式橢圓偏光術

Polarizer-Sample-Analyzer imaging ellipsometry

研 究 生:李 康 源

指導教授:趙于飛 教授

(2)

偏光片-樣品-析光片之影像式橢圓偏光術

Polarizer-Sample-Analyzer imaging ellipsometry

研究生:李康源 Student:Kan-Yan Lee 指導教授:趙于飛 Adviser:Dr. Yu-Faye Chao

國 立 交 通 大 學 光電工程研究所

博士論文

A Dissertation

Submitted to Institute of Electro-Optical Engineering

College of Electrical Engineering and Computer Science National Chiao Tung Univeristy

In Partial Fulfillment of the Requirements For the Degree of

Doctor of Philosophy In

Electro-Optical Engineering September 2005

Hsinchu, Taiwan, Republic of China

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