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矽化鈷在奈米級超大型積體電路應用之研究

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國立交通大學

材料科學與工程研究所

博士論文

矽化鈷在奈米級超大型積體電路應用之研究

The Application of Cobalt Silicide on Nano-scaled

USLI Semiconductor Devices

研究生 : 陳燕銘

指導教授 : 涂肇嘉 博士

(2)

矽化鈷在奈米級超大型積體電路應用之研究

The Application of Cobalt Silicide on Nano-scaled USLI Semiconductor Devices

研究生 : 陳燕銘 Student : Yen-Ming Chen 指導教授 : 涂肇嘉博士 Advisor : Dr. George C. Tu

國立交通大學

材料科學與工程研究所 博士論文

A Dissertation

Submitted to Institute of Materials Science and Engineering National Chiao-Tung University in Partial Fulfillment and

Requirements for the Degree of Doctor of Philosophy in Materials Science and Engineering

July 2005

Hsinchu, Taiwan, Republic of China 中華民國九十四年七月

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