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具殘留應力薄膜結構的熱彈聲波波傳

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圖 4.9 鍺[010]方向徹體波的波慢與殘留壓應力關係圖    50  圖 4.10 鍺[010]方向熱波的波慢與殘留壓應力關係圖    50  圖 4.11 鍺的徹體波相速度,實線代表未受應力,虛線代表 σ 2 = − 5 GPa 51  圖 4.12  鍺的徹體波相速度,實線代表未受應力,虛線代表          σ 1 = σ 2 = − 5 GPa     51  圖 4.13 鍺的熱波相速度,實線代表未受應力,虛線代表 σ 2 = − 5 GPa 52  圖 4.14 鍺的熱波相速度,實線代表
圖 1.1 麥克風和光聲腔體搭配之光聲感測示意圖 圖 1.2 雷射和光電位置感測器搭配之光聲感測示意圖ModulatorLight SourceModulated Laser microphoneCellSampleModulatorLight SourceModulated LaserSample
圖 1.3 壓電換能器感測光聲效應的示意圖 圖 2.1 自然狀態、初始狀態、最終狀態與對應的座標系統ModulatorLight SourceModulated LaserLensPiezoelectricTransducerSampleXxξξxufξXuiuufuiνNnnaturalinitialfinal
圖 2.2 以初始座標為觀察座標描述預變形材料的動態擾動 圖 3.1 晶格不匹配產生薄膜壓應力final state(dynamic disturbance)natural state(static)initial state(static deformation) natural coordinate natural coordinateinitialcoordinate stressGeSifilmfilmsubstratesubstrate
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