Analytic of Design and Fabrication Interdigitated Electrodes Composite Piezoelectric Ceramic Device
張秉鈞、鄭江河
E-mail: [email protected]
ABSTRACT
The aims objective at make a suitable electrode which is interdigitated, and producing coupled-piezoelectric unit with high 33 d coefficient. Traditional piezoelectric ceramic risks breakup. To develops new type and high performance sensor and actuators and structure with self-adaptable ability have high potency for future. In order to prefer the sensor and actuator ability of it, we need the technology of interdigitate electro to make it. First we use ANSYS software to analysis the design of the electrode, and optimize the structure. Consider the electric field disburse when the structure under high polarized electric field. Use the result of analysis to collocate suitable polarized distance and thickness to polarize the structure. After get suitable interdigitated electrode and polarize the piezoelectric ceramic. We can make a normal process to make the piezoelectric ceramic. And we can get it’s coefficient and to make a compare with ANSYS analysis. In the future will goalward to high self-adaptable ability and high sensitivity and actuator.
Keywords : composite piezoelectric materials ； interdigitated electrode；polarization； ceramic fiber Table of Contents
第一章 緒論...1 1.1 前言...1 1.2 研究背景與動 機...1 1.3 文獻回顧...5 1.3-1 國內目前研究現
況...5 1.3-2 國外目前研究現況...6 1.4 研究目標與方 向...10 第二章 壓電理論...13 2.1 壓電現象及種 類...13 2.2 壓電性質...14 2.3 壓電理
論...16 2.4 鐵電性...19 2.5 壓電元件種
類...20 第三章 複合壓電陶纖指叉電極元件之設計分析...22 3.1 整體結構介
紹...23 3.2 壓電粉末的選擇...24 3.3 改變陶纖指叉電極元件之參數，進 行電場分析...25 3.3-1 黏結膠介電係數對極化過程的影響...26 3.3-2 黏結膠厚度對極化過程的影 響...27 3.3-3 極化間距對極化過程的影響...28 3.3-4 極化電壓對極化過程的影
響...29 3.4 位移量的探討...30 3.4-1 陶纖狀壓電元件之位移量的差 異...30 3.4-2 黏結膠介電係數對位移量的影響...34 3.4-3 黏結膠厚度對位移量的影 響...39 3.4-4 極化間距對位移量的影響...41 3.4-5 作用區的多寡對位移量的影
響...43 3.4-6 驅動電壓對位移量的影響...46 第四章 複合壓電陶纖指叉電極元件製程方 法...48 4.1 壓電生胚薄片製作...49 4.1-1 壓電粉料混合...49 4.1-2 壓電粉末鍛燒...50 4.1-3 粉末粉粹...50 4.1-4 結合劑混
合...51 4.1-5 刮刀成型...51 4.2 陶纖元件製
作...52 4.2-1 積層堆疊...52 4.2-2 熱水均壓...53 4.2-3 燒結致密...54 4.2-4 壓電元件精密切割...55 4.3 指叉銅箔軟板製
作...58 4.3-1 光罩設計...60 4.3-2 銅箔軟板...60 4.3-3 不銹鋼基板清潔燒結致密...61 4.3-4 旋塗光阻、曝光顯影...61 4.3-5 蝕
刻...62 4.4 陶纖指叉電極元件製作...65 4.5 陶纖指叉電極元件量測極化範 圍...66 4.6 壓電致動器極化製程...67 第五章 實驗方法與量
測...71 5.1 實驗設備...71 5.2 壓電陶纖指叉電極元件特性量 測...72 5.3 極化間距對特性的影響...75 5.4 PZT 切割寬度對特性的影 響...77 5.5 極化電壓對特性的影響...80 第六章 結
論...84 6.1 結論...84 6.1-1 陶纖壓電指叉元件結構設計分析方 面...84 6.1-2 陶纖壓電指叉元件製作方面...85 參考文獻...86 REFERENCES
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