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The Application of Precision Positioning Table with Filtered Sliding Mode Control 李昶毅、林志哲

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The Application of Precision Positioning Table with Filtered Sliding Mode Control 李昶毅、林志哲

E-mail: [email protected]

ABSTRACT

This study is focused on the design problem for precision positioning system. For experimental requirements, the XY table system with the ball-screw driven mechanism was implemented for investigations. The PC-based control architecture, due to their open and flexible architecture, is applied to implement and validate the proposed control algorithm. Friction is one of the most significant sources of nonlinear disturbance for the motion control which caused by the relative motion of different contact surface at very low velocity. The nonlinear component of friction such as static friction and Coulomb friction should be overcome so that the tracking error will be eliminated. The experiments are divided into two parts. The first focuses on the precision positioning tasks and the second is the contour tracking tasks. The precision position experiments utilize the disturbance observer and sliding mode controller to achieve the precision positioning without feedforward compensation with friction model. The tracking problems are compensated by using the friction model combined with the high-gain observer to estimate velocity, which resists unnecessary disturbances by adding disturbance observer and filtered sliding mode controller.

Keywords : Precision position、Friction、Disturbance observer、 Sliding mode controller、High-gain observer Table of Contents

第一章 緒論...1 1.1 前言...1 1.2 文獻回顧...3 1.3 本文內容...5 第二章 精密定位平台建構...6 2.1 滾珠導螺桿所構成的機械系 統...6 2.2 卡氏機械臂...8 2.3 定位系統架構...11 2.3.1 雷射光學 尺...12 2.3.2 dSPACE控制器...13 2.3.3 驅動器硬體設備...15 2.3.4 保護 裝置之設計 ...15 第三章 系統模型與摩擦力分析 ...17 3.1 系統模型建立與鑑別方法

...17 3.2 摩擦力種類與分析 ...18 3.3 系統模型鑑別 ...21 3.4 摩擦力模 型鑑別 ...26 第四章 控制器設計與穩定性分析 ...31 4.1 半閉迴路與全閉迴路控制

...31 4.2 高增益觀測器(High-gain observer) ...33 4.3 干擾觀測器(disturbance observer) ...35 4.4 順滑模態控制器(sliding mode controller) ...38 4.5 具濾波型順滑模態控制器 ...42 第五章 實驗結果 ...44 5.1 單軸定位實驗 ...44 5.2 雙軸循圓實驗 ...59 第六章 結論 ...71 6.1 控制器優缺點 ...71 6.2 結論與未來研究方向

...73 參考文獻 ...74 REFERENCES

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參考文獻

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