Design and Fabrication of Piezoelectric Actuated Microvalve 吳東益、鄭江河
E-mail: [email protected]
ABSTRACT
This paper present the design, experiment, and fabrication of an active microvalve as applied in micropumps. The actuators select the piezoelectricity material, when actuate piezoelectricity actuator to produces the single axial displacement may enable the microvalve to achieve open or close movement. This microvalve structural design has two kind of models, normally close or open.
The operating fluid uses the DI Water (De Ion Water), the flow rate of 11.29~22.23 ml/min and the 6~12 kPa hydraulic pressure by the piezoelectricity pump output, when matches the structure which normally the microvalve close, gives the actuator voltage from 0 V to 100 V, the flow rate of 0.02~2.13 ml/min, each minute maximum flow rate error is 1.4~10%; when matches the structure which normally the microvalve open, the flow rate of 0.01~3.19 ml/min, each minute maximum flow rate error is 0.9~10%.
Keywords : Active microvalve、Piezoelectricity actuator、Flow rate、Microfluidic Table of Contents
第一章 緒論 1 1.1前言 1 1.2研究動機 2 1.3文獻回顧 2
第二章 壓電式微致動閥之設計與分析 9 2.1壓電式微致動閥之設計 9
2.2模擬分析結構元件規格設定 11
2.3相同PZT搭配不同厚度轉接板之位移分析 13 2.4不同厚度轉接板實際測試與模擬分析比較 14 第三章 微閥門結構元件製作 16
3.1黃光製程 16 3.2蝕刻製程 17
3.3蝕刻測試與速率探討 19 3.4 PDMS製作流程 21 3.5壓電致動器之製作 22 3.6壓電式微致動閥組裝 24 第四章 實驗量測與探討 25 4.1設備架設說明與前置量測 25 4.2壓電式微致動閥流量量測 30
4.2.1不同入水壓力下NC閥與NO閥的流量量測 30 4.2.2 NC閥與NO閥在長時間做動下的流量量測 34 4.3入水壓經過NC閥與NO閥後的壓力量測 34 第五章 結論 39
參考文獻 40 REFERENCES
[1]I. Chakraborty, W.C Tang, D.P. Bame and T.K Tang, “MEMS micro-valve for space applications,” Sensors and Actuators 83 (2000) 188 –193.
[2]T. Rogge, Z. Rummler and W.K. Schomburg, “Polymer micro valve with a hydraulic piezo-drive fabricated by the AMANDA process,”
Sensors and Actuators A 110 (2004) 206–212.
[3]A. Doll, M. Wischke, H.-J.Schrag, A. Geipel, F. Goldschmidtboeing and P. Woias, “Characterization of active silicon microvalves with piezoelectric membrane actuators,” Microelectronic Engineering 84 (2007) 1202–1206.
[4]I Fazal and M C Elwenspoek, “Design and analysis of a high pressure piezoelectric actuated microvalve,” J. Micromech. Microeng. 17 (2007) 2366–2379.
[5]M. Sobocinski, J. Juuti, H. Jantunen and L. Golonka, “Piezoelectric unimorph valve assembled on an LTCC substrate,” Sensors and Actuators: A Physical (2008), doi:10.1016/j.sna.2008.11.025.
[6]Levent Yobas, Michael A. Huff, Frederick J. Lisy, and Dominique M. Durand, “A novel bulk-micromachined electrostatic microvalve with a curved-compliant structure applicable for a pneumatic tactile display,” Journal of microelectromechanical systems, VOL. 10, NO. 2, JUNE 2001.
[7]H Kahny, M A Huffz and A H Heuery, “The TiNi shape-memory alloy and its applications for MEMS,” J. Micromech. Microeng. 8 (1998) 213–221.
[8]Barth, P.W., Proceedings of Transducers ’95, the 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX;
Stockholm, Sweden, June 1995, pp. 276–277.
[9]Mircea Capanu, James G. Boyd, IV, and Peter J. Hesketh, “Design, Fabrication, and Testing of a Bistable Electromagnetically Actuated Microvalve,” Journal of microelectromechanical systems, VOL. 9, NO. 2, JUNE 2000.
[10]P.J. Hesketh, J.S. Bintoro, R. Luharuka, “Microvalve for Fuel Cells and Miniature Gas Chromatographic System,” School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332 2004.
[11]P Nageswara Rao and Deepak Kunzru, “Fabrication of microchannels on stainless steel by wet chemical etching,” J. Micromech. Microeng.
17 (2007) N99–N106.
[12]Sudipta Chatterjee, Motoki Ujihara, Dong Gun Lee, Jerry Chen, Stanley Lei and Greg P Carman, “Spray etching 2 μm features in 304 stainless steel,” J. Micromech. Microeng. 16 (2006) 2585–2592.
