• 沒有找到結果。

本論文中,我們藉由元件的阻抗量測分析,推估其主動層的 SRH 復合速率、

輻射復合速率、歐傑復合速率。量測的實驗樣品分別為 1.5μm-QWLD1490、

1.3μm-QDLD936 以及 430nm-BlueQWLD,萃取出來的復合速率參數如表 5.1 所 示,與找到的文獻相比是相當接近的,說明我們所建立的阻抗量測分析的方式應 該是相當成功的,未來可將其應用在量測新型的雷射結構上。

𝝀(𝝁𝐦) 𝑨(𝟏/𝒔) 𝑩(𝒄𝒎𝟑/𝒔) 𝑪(𝒄𝒎𝟔/𝒔) QWLD14 0 1.5 8.08 × 10 4. 6 × 10−11 5.63 × 10−29

QDLD 36 1.3 ~10 ~10−11 ~10−29 BlueQWLD 0.43 ~10 10−12~10−11 10−31~10−29

表 5.1 QWLD1490、QDLD936 以及 BlueQWLD 的復合速率參數

然而,我們的阻抗分析技術其實還存在著三大問題尚須要去克服。

建立多速率方程式(multi-level rate equation)

由於本論文中,我們忽略載子在量子井或量子點內的捕捉與逃離效應,導致 參數𝑅𝑠與參數𝐿隨電流的變化無法給予明確的解釋,甚至有可能因此影響到復合 係數的精準度,所以未來需要建立多速率方程式模型來考慮載子的捕捉與逃離效 應。

封裝寄生阻抗

封裝阻抗也應當加入到電路模型中,本論文的樣品在未考慮封裝阻抗的模型

57

下都能擬合得很好,但是有些元件卻不是如此,圖 5.1 為一藍光 LED 的 Re{Z}

圖,可以明顯看到實驗點與理論模型有極大的不一致,這個問題將嚴重的限制可 量測的樣品。

1 10 100

0 5 10 15 20 25

0.9mA

Re{Z}(ohm)

frequency(MHz)

Rs=3.035(ohm) Rd=20.383(ohm) Td=67.948(ns)

圖 5.1 藍光 LED 的 Re{Z}圖

元件控溫

我們曾經嘗試自製過適合 HP4291B 阻抗分析儀的控溫銅座,但是卻會造成 阻抗量測出現異常的雜訊,導致無法分析,所以如何在不影響量測的前提下控溫,

將是未來努力的目標。未來將針對這三個問題去做改進。

58

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簡歷 (Vita)

姓名:馬江智 (Jiang-Jhih Ma)

性別:男

出生年月日:民國 75 年 12 月 15 日

籍貫:台灣桃園

學歷: 桃園縣國立中壢高級中學 ( 91.9 ‐ 94.6 ) 中興大學電機工程學系學士 ( 94.9 ‐ 98.6 ) 交通大學電子研究所碩士班 ( 98.9 ‐ 101.6 )

碩士論文題目:

以阻抗特性量測來分析半導體發光元件之微分載子生命期

Analysis of differential carrier lifetime in semiconductor light emitting devices by impedance measurement

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