本論文中,我們藉由元件的阻抗量測分析,推估其主動層的 SRH 復合速率、
輻射復合速率、歐傑復合速率。量測的實驗樣品分別為 1.5μm-QWLD1490、
1.3μm-QDLD936 以及 430nm-BlueQWLD,萃取出來的復合速率參數如表 5.1 所 示,與找到的文獻相比是相當接近的,說明我們所建立的阻抗量測分析的方式應 該是相當成功的,未來可將其應用在量測新型的雷射結構上。
𝝀(𝝁𝐦) 𝑨(𝟏/𝒔) 𝑩(𝒄𝒎𝟑/𝒔) 𝑪(𝒄𝒎𝟔/𝒔) QWLD14 0 1.5 8.08 × 10 4. 6 × 10−11 5.63 × 10−29
QDLD 36 1.3 ~10 ~10−11 ~10−29 BlueQWLD 0.43 ~10 10−12~10−11 10−31~10−29
表 5.1 QWLD1490、QDLD936 以及 BlueQWLD 的復合速率參數
然而,我們的阻抗分析技術其實還存在著三大問題尚須要去克服。
建立多速率方程式(multi-level rate equation)
由於本論文中,我們忽略載子在量子井或量子點內的捕捉與逃離效應,導致 參數𝑅𝑠與參數𝐿隨電流的變化無法給予明確的解釋,甚至有可能因此影響到復合 係數的精準度,所以未來需要建立多速率方程式模型來考慮載子的捕捉與逃離效 應。
封裝寄生阻抗
封裝阻抗也應當加入到電路模型中,本論文的樣品在未考慮封裝阻抗的模型
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下都能擬合得很好,但是有些元件卻不是如此,圖 5.1 為一藍光 LED 的 Re{Z}
圖,可以明顯看到實驗點與理論模型有極大的不一致,這個問題將嚴重的限制可 量測的樣品。
1 10 100
0 5 10 15 20 25
0.9mA
Re{Z}(ohm)
frequency(MHz)
Rs=3.035(ohm) Rd=20.383(ohm) Td=67.948(ns)
圖 5.1 藍光 LED 的 Re{Z}圖
元件控溫
我們曾經嘗試自製過適合 HP4291B 阻抗分析儀的控溫銅座,但是卻會造成 阻抗量測出現異常的雜訊,導致無法分析,所以如何在不影響量測的前提下控溫,
將是未來努力的目標。未來將針對這三個問題去做改進。
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參考文獻
[1] G. E. Shtengel, D. A. Ackerman, P. A. Morton, E. J. Flynn, and M. S. Hybertsen,
“Impedance-corrected carrier lifetime measurements in semiconductor lasers,” Appl.
Phys. Lett., vol. 67, pp. 1506-1508, 1995.
[2] A. A. Dikshit, Vishnu Vangapally, and J. M. Pikal, “Carrier lifetime in 1.3 μm InAs quantum-dot lasers using small-signal modulation technique,” Proc. of SPIE, vol.
6017, 60170L-1, 2005.
[3] R. Paoletti, M. Meliga, and I. Montrosset, “Optical modulation technique for carrier lifetime measurement in semiconductor lasers,” IEEE Photon. Technol. Lett., vol. 8, pp. 1447-1449, 1996.
[4] G. E. Giudice, D. V. Kuksenkov, and H. Temkin, “Measurement of differential carrier lifetime in vertical-cavity surface-emitting lasers,” IEEE Photon. Technol. Lett., vol.
10, pp. 920-922, 1998.
[5] M. Shatalov, A. Chitnis, A. Koudymov, J. Zhang, V. Adivarahan, G. Simin and M. A.
Khan, “Differential carrier lifetime in AlGaN based multiple quantum well deep UV light emitting diodes at 325nm,” J. Appl. Phys., vol. 41, L1146, 2002.
[6] S. Nakamura, “RT-CW Operation of InGaN multi-quantum-well structure laser diodes,” Mat. Sci. and Eng., B50, pp. 277-284, 1997.
[7] 盧廷昌, 王興宗, 半導體雷射導論, 五南出版社, 第二章, 2008.
[8] 郭浩中, 賴芳儀, 郭守義, LED 原理與應用, 五南出版社, 第二章, 2009.
[9] R. Olshansky, C. B. SU, J. Manning, and W. Powazinik, “Measurement of radiative and nonradiative recombination rates in InGaAsP and AlGaAs light sources,” IEEE J.
Quantum Electron., QE-20, pp. 838-854, 1984.
[10] Esquivias, S. Weisser, B. Romero, J. D. Ralston, and J. Rosenzweig, “Carrier
59
dynamics and microwave characteristics of GaAs-based quantum-well lasers,” IEEE J.
Quantum Electron., vol. 35, pp. 635-646, 1999.
[11] G. Lin, C. Y. Chang, W. C. Tseng, C. P. Lee, K. F. Lin, R. Xuan, and J. Y. Chi, “Novel chirped multilayer quantum-dot lasers ,” Proc. SPIE, vol.6997, 69970R, 2008.
[12] J. Tatum, D. Smith, J. Guenter and R. Johnson, “High speed characteristics of VCSELs,” Proc. of SPIE, vol. 3004, 1997.
[13] G. E. Giudice, D. V. Kuksenkov and H. Temkin, “Small-signal impedance characteristics of quantum-well laser structures,” Appl. Phys. Lett. vol. 78, pp.
4109-4111, 2001.
[14] T. J. Houle, J. C. L. Yong, C. M. Marinelli, “Characterization of the temperature sensitivity of gain and recombination mechanisms in 1.3-μm AlGaInAs MQW lasers,”
IEEE J. Quantum Electron., vol. 41, pp. 132-139, 2005.
[15] O. Anton, C. S. Menoni, J. Y. Yeh, L. J. Mawst, J. M. Pikal, and N. Tansu, “Increased monomolecular recombination in MOCVD grown 1.3-μm InGaAsN–GaAsP–GaAs QW lasers from carrier lifetime measurements,” IEEE Photon. Technol. Lett., vol. 17, pp. 953-955, 2005.
[16] J. M. Pikal, C. S. Menoni, H. Temkin, P. Thiagarajan, and G. Y. Robinson, “Carrier lifetime and recombination in long-wavelength quantum-well lasers,” IEEE J.
Quantum Electron., vol. 5, pp. 613-619, 1999.
[17] D. G. McConville, S. J. Sweeney, A. R. Adams, S. Tomic and H. Riechert,
“Temperature and pressure dependence of the recombination mechanisms in 1.3 μm and 1.5 μm GaInNAs lasers,” Phys. Stat. Sol. (b), vol. 244, pp. 208-212, 2007.
[18] H. Yoshida, M. Kuwabara, Y. Yamashita, K. Uchiyama, and H. Kan, “Radiative and nonradiative recombination in an ultraviolet GaN/AlGaN multiple-quantum-well laser diode,” Appl. Phys. Lett., vol. 96, 211122, 2010.
[19] S. H. Han, D. Y. Lee, S. J. Lee, C. Y. Cho, M. K. Kwon, “Effect of electron blocking
60
layer on efficiency droop in InGaN/GaN multiple quantum well light-emitting diodes,”
Appl. Phys. Lett., vol. 94, 231123, 2009.
[20] Y. Y. Kudryk, and A. V. Zinovchuk, “Efficiency droop in InGaN/GaN multiple quantum well light-emitting diodes with nonuniform current spreading,” Semicond.
Sci. Technol., vol. 26, 095007, 2011.
[21] H. Y. Ryu, H. S. Kim, and J. I. Shim, “Rate equation analysis of efficiency droop in InGaN light-emitting diodes,” Appl. Phys. Lett., vol. 95, 081114, 2009.
[22] K. A. Bulashevich1, and S. Yu. Karpov, “Is Auger recombination responsible for the efficiency rollover in III-nitride light-emitting diodes?,” Phys. Stat. Sol. (c), vol. 5, pp.
2066-2069, 2008.
[23] K. T. Delaney, and P. Rinke, “Auger recombination rates in nitrides from first principles,” Appl. Phys. Lett., vol. 94, 191109, 2009.
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簡歷 (Vita)
姓名:馬江智 (Jiang-Jhih Ma)
性別:男
出生年月日:民國 75 年 12 月 15 日
籍貫:台灣桃園
學歷: 桃園縣國立中壢高級中學 ( 91.9 ‐ 94.6 ) 中興大學電機工程學系學士 ( 94.9 ‐ 98.6 ) 交通大學電子研究所碩士班 ( 98.9 ‐ 101.6 )
碩士論文題目:
以阻抗特性量測來分析半導體發光元件之微分載子生命期
Analysis of differential carrier lifetime in semiconductor light emitting devices by impedance measurement