射頻電漿濺鍍氮化鋁在有機薄膜電晶體閘極絕緣層之應用
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(2) 射頻電漿濺鍍氮化鋁在有機薄膜電晶體閘極絕緣層之應用 The Application of RF Sputtered AlN on the Gate Insulator of OTFTs 研 究 生:劉溥寬. Student:Pu-Kuan Liu. 指導教授:冉曉雯 博士. Advisor:Dr. Hsiao-Wen Zan. 國 立 交 通 大 學 光電工程學系. 光電工程研究所. 碩 士 論 文. A Thesis Submitted to Department of Photonics & Institute of Electro-Optical Engineering College of Electrical Engineering and Computer Science National Chiao Tung University in partial Fulfillment of the Requirements for the Degree of Master in Electro-Optical Engineering June 2006 Hsinchu, Taiwan, Republic of China. 中 華 民 國 九 十 五 年 六 月.
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