利用X光光刻技術製備凹面型微光柵分光儀之技術研究
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(2) 利用 X 光光刻技術製備凹面型微光柵分光儀之技術研究 A Study on X-ray Lithography Technique for the fabrication of micro cylindrical concave grating demultiplexer 研 究 生：徐士哲. Student：Shih-Che Hsu. 指導教授：周長彬. Advisor：Chang-Pin Chou. 許博淵. Bor-Yuan Shew. 國立交通大學 機械工程研究所 碩士論文. A Thesis Submitted to Institute of Mechanical Engineering National Chiao Tung University in partial Fulfillment of the Requirements for the Degree of Master Science in Mechanical Engineering June 2004 Hsinchu, Taiwan, Republic of China. 中華民國九十三年六月.
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