二維光子晶體雷射特性分析與設計
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(2) 二維光子晶體雷射特性分析與設計. 研 究 生：盧贊文 指導老師：李柏璁 教授. 國立交通大學光電工程研究所碩士班. 摘要 我們於本文中展示了二維光子晶體的基本設計以及特性分析。首先，我們利用三維 平面波展開法以及有限元素時域差分法來計算光能隙以及光子晶體微共振腔的缺陷模 態及其頻譜，藉此，我們得以在結構設計上達成優化的目的。除此之外，本文中亦簡單 的介紹了對稱與非對稱結構二維光子晶體雷射的製程技術。 為了量測並分析二維光子晶體的各種基本特性，我們架設了一套長波長共焦顯微光 譜系統。利用此系統，我們觀察並分析了光子晶體微共振腔中的共振模態以及雷射激發 模態，這其中包括了基本的雷射激發頻譜，光激發光輸出曲線，可調波長雷射行為，以 及雷射模態的偏極化現象。 最後，我們亦架設了一套熱電半導體定溫系統，利用這套系統，我們得以探討二維 光子晶體雷射的各種熱特性。在雷射波長熱調變的探討中，我們得到了與模擬結果相符 合的實驗結果。此外我們還分析了此元件的臨界激發能量對於激發條件以及基板溫度的 相關性。最後，我們計算了該元件的熱阻，並與目前的面射型垂直共振腔雷射做一比較。. ii.
(3) Design and Characterization of Two-Dimensional Photonic Crystal Lasers Student：Tsan-Wen Lu Advisor：Prof. Po-Tsung Lee. Department of Photonics & Institute of Electro-Optical Engineering. Abstract In this thesis, we show the basic design and characteristics of two-dimensional photonic crystal lasers. At first, a series of simulations are performed by using three-dimensional plane-wave-expansion (PWE) method and finite-difference time-domain (FDTD) method in order to calculate the band diagrams and defect modes of the photonic crystal micro-cavities. According to these simulations, we can optimize the structure of the devices. The fabrication of the membrane and the asymmetric structure are also introduced. We setup a micro-photo-luminescence (PL) system in order to characterize the two-dimensional photonic crystal lasers. The basic characteristics of the micro-cavities are investigated including resonance modes and lasing modes. The basic lasing properties are investigated such as lasing spectra, L-L curves, tuning properties and mode polarization. We setup a thermo-electro cooler (TEC) system in order to characterize the thermal properties of two-dimensional photonic crystal lasers under different conditions. The lasing properties under different substrate temperatures are investigated both in experiment and theory. We also investigate the threshold dependence on different substrate temperatures and pump conditions. At last, we calculate the thermal resistance of two-dimensional photonic crystal lasers and compare it with that of general VCSELs for our future work.. iii.
(4) Acknowledgements 首先我要感謝我的指導老師李柏璁教授，在過去這兩年中，經過她的細心教導，讓 我在光子晶體領域打下紮實的基礎。其次，我要對光電所張亞銜學長表示萬分的感激， 感謝他在實驗上提供了很多十分重要的意見，讓我能夠順利的量測到如此精細的元件。 還有也要特別感謝電子所黃世傑學長，身為一個光子晶體理論與製程的強者，他幫我解 了很多光子晶體相關的疑惑。還有實驗室的好同學們，不管是在生活，實驗，玩樂上， 你們都給予我相當大的協助，讓我得以在這兩年擁有一個很好的實驗室研究環境與氣 氛。. 此外，更要感謝行政院國家科學委員會(計畫編號：NSC-92-2218-E-009-023, NSC-)，經濟部學界科專計畫(計畫編號：)，以及台灣聯合大學系統(計畫編號：)的支持， 讓我在研究的過程中得到足夠的研究資源及經費。也要特別感謝交通大學光電所尖端光 電元件與材料實驗室和國研院儀器科學中心陳至信組長，鄭紹章先生在實驗技術上所給 予的支援。. 最後，還要感謝我的父母，親愛的小妹，可愛的女友小練，在精神上給予我莫大的 支持。同時也要感謝曾經幫助過我但是一時想不起來的人們，在碩士班研究的路上，我 碰到了一大群願意幫助我的人，在此對你們獻上由衷的感激。. 贊文 2005/07．于新竹交通大學. iv.
(5) Content Abstract (in Chinese)………………………………………………………….....ii Abstract (in English)…………………………………………...……………….iii Acknowledgements……………………………………………...………….…..iv List of Tables…………………………………………………...……………....vii List of Figures…. Chapter 1.. ……………………………………………...……….…viii. Introduction………………………………..…………1.. 1-1. Photonic Crystal……………………………………………………..1. 1-2. Basic Theory of 2D Photonic Crystal Lasers………………………..6. 1-3. History and Developments…………………………………………..9. 1-4. Motivation and Overview of Thesis………………………………..12.. Chapter 2. 2-1.. Structure Design...……………………………..……13.. Band Diagrams of Membrane Structure and Asymmetric Structure…………………………………………………...……….13. 2-1-1. Membrane Structure and Asymmetric structure………………...................13. 2-1-2. Band Diagrams…………………………………………………………….14.. 2-2.. Mode Analysis by FDTD Methods……………..…………………21.. 2-3.. Conclusion…………………………………...…………………….23.. v.
(6) Chapter 3.. Fabrication……………………..……………………24.. 3-1.. Membrane Structure……………………………...………………...24.. 3-2.. Asymmetric Structure…………………………...…………………31. 3-2-1. Wafer-Bonding……………………………………………………………..31. 3-2-2. Glue-Bonding…………………………………….………………………...33.. 3-3. Conclusion………………………………………...………………..36.. Chapter 4.. Measurement Results and Analysis………...……...37.. 4-1. Measurement Setup……….……………………...………………...37. 4-2. Basic Lasing Characteristics………...………...…………………...42. 4-3. Wavelength Tuning……………………………...………………….46. 4-4. Thermal Analysis…………………………………...………………50. 4-5. Conclusion………………………………………...………………..58.. Chapter 5.. Conclusion…………………………..……………….59.. References……………………………………….…………………61.. vi.
(7) List of Tables Table 2-1. Important parameters of two-dimensional photonic crystal slabs. (P.15) Table 4-1. Different pump conditions used in our experiments. (P.39) Table 4-2. The threshold pump powers with different substrate temperatures. (P.53). vii.
(8) List of Figures Chapter. 1 Fig. 1-1.. Photonic crystals can be divided into one-, two-, and three-dimensional photonic crystals. (P.1). Fig. 1-2. The reflection spectrum and the structure of distributed Bragg reflectors (DBRs). (P.2) Fig. 1-3.. A typical TE band diagram of photonic crystal. (P.4). Fig. 1-4. Photonic crystal line defect and point defect. (P.4-P.5) Fig. 1-5.. The basic structure of two-dimensional photonic crystals laser. (P.7). Fig. 1-6.. The typical TE-like band diagrams of photonic crystal slab with triangular lattice and square lattice. (P8). Fig. 1-7. The illustration and the L-I curve of the first electrically-driven single defect photonic crystal micro-cavity laser. (P.10-P.11) Chapter. 2 Fig. 2-1. The illustrations of two-dimensional photonic crystal membrane structure and asymmetric structure. (P.14) Fig. 2-2.. The index profile of a two-dimensional photonic crystal membrane structure. (P.16). Fig. 2-3.. The TE-like band diagram of a two-dimensional photonic crystal membrane. (P.16). Fig. 2-4.. The band-gap varies with different r/a ratios at a fixed lattice constant. (P.17). Fig. 2-5.. The band-gap varies with different d/a ratios at a fixed lattice constant and r/a ratio. (P.18). Fig. 2-6.. A good alignment between the PL spectrum and the photonic band-gap. (P.18). Fig. 2-7.. The index profile of the asymmetric photonic crystal slab structure. (P.19). viii.
(9) Fig. 2-8.. The typical band diagram of an asymmetric photonic crystal slab structure. (P.20). Fig. 2-9.. The band-gap varies with different r/a ratios. (P.20). Fig. 2-10. The spectrum of resonance modes of D3 micro-cavity. (P.21) Fig. 2-11. The lasing mode profile of the D3 micro-cavity at 1577nm. (P.22) Chapter. 3 Fig. 3-1.. The epitaxial structure of InGaAsP MQWs for photonic crystal membrane lasers. (P.24). Fig. 3-2.. The first part of photonic crystal membrane lasers fabrication processes. (P.25). Fig. 3-3.. SEM picture top view showing the photonic crystal patterns defined on the PMMA layer. (P.26). Fig. 3-4.. The cross section SEM picture of the photonic crystal patterns transferred to MQWs layer. (P.26). Fig. 3-5.. SEM picture of photonic crystal patterns transferred to MQWs by dry etching processes. (P.27). Fig. 3-6.. There is a 40° etching stop plane in (0, 1, -1) direction of InP materials. (P.28). Fig. 3-7.. There is a 95° etching stop plane in (0, -1, -1) direction of InP materials. (P.28). Fig. 3-8.. The top-view of two-dimensional photonic crystal membrane laser arrays. (P.29). Fig. 3-9.. The tilted view SEM picture of a two-dimensional photonic crystal laser array. (P.29). Fig. 3-10.. The overview of fabrication process of two-dimensional photonic crystal membranes lasers. (P.30). Fig. 3-11. The epitaxial structure of InGaAsP MQWs for wafer-bonding process. (P.31). ix.
(10) Fig. 3-12.. An overview of fabrication process of asymmetric structure with sapphire substrate. (P.32). Fig. 3-13. The SEM picture of top view of the asymmetric photonic crystal laser structure after FIB process. (P.34) Fig. 3-14. The SEM picture of the asymmetric photonic crystal laser structure with a tilt angle. (P.34) Fig. 3-15. An overview of fabrication process of asymmetric photonic crystal laser structure using glue-bonding technology and the FIB systems. (P.35) Chapter. 4 Fig. 4-1.. The configuration and the photography of micro-PL system. (P.37-P.38). Fig. 4-2.. Two operation modes of the TTL laser. (P.39). Fig. 4-3.. The image of a two-dimensional photonic crystal laser array captured from the monitor. (P.40). Fig. 4-4. Fig. 4-5.. A typical PL spectrum of our MQWs. (P.41) The typical lasing spectra above threshold and near threshold of a two-dimensional photonic crystal laser. (P.42-P.43). Fig. 4-6. Fig. 4-7.. The L-L curve of a two-dimensional photonic crystal laser. (P.44) A significant side mode at the wavelength 20nm shorter than the lasing wavelength. (P.44). Fig. 4-8.. There are over ten resonance modes observed in the D3 photonic crystal micro-cavity. (P.45). Fig. 4-9.. The top view SEM picture of a two-dimensional photonic crystal lasers array. (P.47). Fig. 4-10. The two-dimensional photonic crystal laser arrays with different r/a ratios. (P.47) Fig. 4-11. The lasing wavelengths of one photonic crystal laser array. (P.48). x.
(11) Fig. 4-12. The photonic crystal laser arrays with different lattice constant. (P.49) Fig. 4-13. The lasing wavelength tuning caused by different lattice constants. (P.49) Fig. 4-14.. The lasing spectra pumped by different condition with lower and higher duty cycles. (P.50-P.51). Fig. 4-15. The red shift of lasing wavelength caused by the increasing pump power. (P.52) Fig. 4-16. The simple configuration of our TEC systems. (P.52) Fig. 4-17.. The measured and simulated lasing wavelengths with increasing substrate temperature. (P.54). Fig. 4-18.. The strong dependence of threshold pump power on the duty cycle of the pump source. (P.55). xi.
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