新型壓電致動器的設計與製作 涂昇利、鄭江河
E-mail: [email protected]
摘 要
最近在壓電陶瓷的領域裡，已致力於提高壓電致動器的致動能力，且不失其承載力，因而有了各式各樣的製程設計，如
”RAINBOW”及”THUNDER”等，它們有個共通的特點就是其外型都是類似彩虹一樣的圓弧形。由於圓弧形的壓電致 動器具有較大的橫向位移量，因此本設計也將以不同於”RAINBOW”和”THUNDER”的製程設計，而以電鑄的方式，
將鎳電鍍於壓電複合材料的金屬基板上，增加其內應力，使其壓電致動器具有圓弧形的結構且增加承載力。 在進行電鑄實 驗上，選用全氯化物浴，以Optimas影像擷取軟體精密計算出拱起高度及鍍膜厚度，以得到電鑄時間對拱起高度及厚度的 關係，進而利用Stoney所提的內應力理論得到電鑄浴的內應力。另外，在實際電鑄壓電致動器試片上，則採用三片試片來 探討不同電鑄時間對壓電致動器位移量及承載力的影響，最後，更利用有限元素ANSYS分析軟體來印證實驗的結果。
關鍵詞 : 壓電、致動器、電鑄、內應力
目錄
第一章諸論--P1 1.1 壓電材料簡介--P1 1.2 研究背景—各式壓電致動器概論--P4 1.3 研究動機--P9 1.4 本文架構--P10 第二章壓 電理論--P11 2.1 壓電性質及材料--P11 2.2 壓電理論--P14 第三章有限元素法搭配田口式法求得產生大位移大承載力之最佳 設計--P20 3.1 不同種類基材及不同拱起高度對位移量及承載力的關係--P20 3.1.1 分析步驟--P21 3.1.2 材料性質--P21 3.1.3 有 限元素法搭配田口式法分析--P24 3.2 結果討論--P28 第四章壓電晶片之製程與壓電致動器模組之製作--P29 4.1 壓電晶片製 作程序及量測結果--P30 4.1.1 壓電晶片製作程序--P30 4.1.2 壓電晶片材料特性的量測--P39 4.2 壓電致動器模組之製作--P45 第五章電鑄成型法--P48 5.1 電鍍液的種類--P48 5.2 電鍍浴的選擇--P51 5.2.1 內應力的種類--P52 5.2.2 內應力的特點--P53 5.2.3 電鑄浴的決定--P56 5.3 電鑄法製作新型弧形壓電致動器--P57 5.3.1 建置電鑄設備--P57 5.3.2 電鑄成型--P58 第六章結果 與討論--P63 6.1 電鑄時間與壓電致動器鎳鍍層厚度及拱起高度之關係--P63 6.1.1 電鑄時間與鎳鍍層厚度之關係--P63 6.1.2 電鑄時間與鎳鍍層厚度之關係--P66 6.1.3 內應力的探討--P68 6.1.4 壓電致動器拱起高度與電鑄時間關係--P69 6.2 靜態位移 量及承載力之量測--P71 6.2.1 靜態位移量之量測--P72 6.2.2 有限元素模擬壓電致動器之靜態位移量--P82 6.3 動態特性量 測--P85 6.4 結果討論--P91 第七章結論與未來努力方向--P93 7.1 結論--P93 7.2 未來努力方向--P93 參考文獻--P95 附 錄A--P100 附錄B--P102
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