Catalyst-Free Fabrication of align Ag Nanorods Using Mixed-Gases Sputtering

Catalyst-Free Fabrication of align Ag Nanorods Using Mixed-Gases Sputtering

Bo-Cheng Lin5, Jay Chang1, Sheng-Po Chang4

1

Institute of Electro-Optical Science and Engineering, Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan 701, TAIWAN.

2_{Institute of Nanotechnology and Microsystems Engineering, Center for Micro/Nano Science and Technology, National}

Cheng Kung University, Tainan 701, TAIWAN.

3_{Institute of Microelectronics & Department of Electrical Engineering, Center for Micr/Nano Science and Technology,}

National Cheng Kung University, Tainan 701, TAIWAN.

4_{Institute of Microelectronics, National Cheng Kung University, Tainan 701, TAIWAN.}

5_{Department of Electronic Engineering National Taiwan University of Science and Technology, Taipei 106, TAIWAN}

* Corresponding author:

[email protected]

This study is the first to demonstrate an oxidation reduction growth (ORG) technique with mixed-gas sputtering to create Ag nanorod arrays without any chemical solutions or contamination from aqueous solution via oxide-assisted growth. The ORG methodology is used to deposit an Ag buffer layer with silver oxide nanoclusters to obtain Ag nanorods arrays using a two-step mixed gaseous process. The success of the technique provides support for the oxidation reduction growth (ORG) mechanism, and proves suitable for fabrication of Ag nanorods in the semiconductor industry. Figure 1 show growth of Ag nanorod arrays by sputtering and Ag nanorods grew from the thermal-reduced Ag particles. SEM images of Ag nanorods and silver oxide nuclei are shown in Figure 2. The crystallization of both the silver oxide nanoseeds and Ag nanorods were investigated using XRD in Figure 3.

Figure 1 Growth mechanism of Ag nanorod arrays by sputtering

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Figure 2 SEM images of (a) Silver oxide nuclei, (b) Ag nanorod s. Figure 3 XRD spectra of Ag nanorods and silver oxide clusters.