可撓式基板上整合微陣列生物探針及薄膜電晶體放大器設計 林君明,侯忠慶
機械工程學系 工學院
This research provides a microarray bioprobe device integrated with an amplifier formed of bottom-gate thin film transistors, which utilizes a micro-electro-mechanical process as well as a semi- conductor process to integrate microarray bioprobes and an amplifier formed of bottom-gate thin film transistors on a flexible substrate. As such, the signal obtained by the microarray bioprobes can be amplified nearby to improve the signal-to- noise ratio and impendence matching. The microarray bio- probes are formed on the flexible substrate such that the present microarray bioprobe device can be dis- posed to conform to the profile of a living body’s portion so as to improve the electrical contact pro- perty between the bioprobes and the living body’s portion.
關鍵字：Microarray Bioprobe, Thin Film Tran- sistor, Flexible Substrate
