未來展望

實驗結果得知 HIPIMS 鍍製的 HfO2經由不同的製程步驟處理，也能展 現出極化的現象。同時配合三組Sample 的結果相互比較，我們得知了 Sample 3 使用沉積氮化金屬給予外加應力來扭曲晶格的方式，所得到的殘留極化強 度效果是最好的。並且在 TiN 和 ZrN 兩個不同氮化金屬層在熱退火溫度方 面，量測出來的結果趨勢也不同。因此將來可以進一步分析 TiN 和 ZrN 經 熱處理後所產生之應力對 HfO2所造成的影響。除此之外，還可以嘗試鍍製 HfN 來代替現有的 TiN 以及 ZrN 結構，期望 HfN 能與 HfO2鐵電層有良好的 介面反應，同時又能帶來應力進而扭曲晶格相。

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