結論 - 可撓式全固態鋰離子薄膜電池

本實驗藉由射頻磁控濺鍍沉積陰極材料鋰鈷氧化物 (lithium cobalt oxide; LiCoO2) 薄膜與固態電解質鋰磷氧氮化物 (Lithium phosphorous oxynitride; LiPON)薄膜，並以熱蒸鍍法蒸鍍鋰金屬與 aromatic polyurea，組裝全固態鋰離子薄膜電池。對於所選擇之參數，

其結論如下:

1. LiCoO2 薄膜以高溫爐 (furnace) 與快速熱退火爐 (rapid thermal annealing; RTA)熱處理皆具晶相產生，於 x 光繞射圖譜(x-ray diffraction; XRD)、拉曼光譜與掃描電子顯微鏡(scanning electron microscope; SEM)圖譜相較難判別其優劣。但於充放電量測之過程，可知以 RTA 熱處理，並以升溫時間 2 min 所製作 LiCoO2薄膜，具較佳之電化學特性，雖於 LiPON 薄膜未進行熱處理時仍無法避免剝落之情況，但於全電池組裝之過程下，藉此參數製作陰極材料應可取得較佳之數據。

2. LiPON 薄膜於 200°C 熱處理下，可使鋰金屬蒸鍍於固態電解質薄膜上，而無任何剝落之狀況，且於阻抗量測下，發現 200°C 之熱處理可稍微提高離子導電度。全電池之組裝上亦可成功點亮 LED 燈，故認為藉此參數所作之固態電解質，適合用於全電池上。

3. Aromatic polyurea 薄膜使用 4,4’-diaminodiphenylmethane (MDA)

與4,4’-diphenylmethane diisocyanate (MDI)作為材料，利用蒸鍍機於 MDA 通入電流 20 A 與 MDI 通入電流 40 A 下進行共鍍。形成之薄膜附著於全固態薄膜電池上，可使全固態薄膜電池於一般環境下點亮 LED 燈。

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在文檔中可撓式全固態鋰離子薄膜電池 (頁 107-111)