• 沒有找到結果。

平面鏡雙角度干涉儀PYAI: head-to-scale 間之距離有關,因此不適合量測距離過遠之物體。

抗偏擺式角度干涉儀ADAI:

6-2. 未來展望

參考文獻

【1】 J.B. Bryan, “Abbe Principle Revisied - Updated Intereption.” Precision Engineering-Journal of the American Society for Precision Engineering, 1(3), pp. 129-132, 1979.

【2】 J.B. Bryan and D.L. Carter, “Design of a new Error-corrected Coordinate Measuring Machine.” Precision Engineering-Journal of the American Society for Precision Engineering 1(3), pp. 125-128, 1979.

【3】 K.C. Fan, “Generalized Study of Volumetric Error Analysis for NC Machine Tools and CMMS, Parts One-Mathematical Model.” J. of CSME 10(2), pp.

135-144 , 1989.

【4】 K.C. Fan, “Generalized Study of Volumetric Error Analysis for Machine Tools and CMMS, Part Two-Applications.” J. of CSME, 10(2), pp. 145-152, 1989.

【5】 G.R. Gordon, “The LASER, Light Amplification by Stimulated Emission of Radiation” The Ann Arbor Conference on Optical Pumping, the University of Michigan, pp. 128, 15 June through 18 June 1959..

【6】 A.A. Michelson, “On the Relative Motion of the Earth and the Luminiferous Ether” American Journal of Science 22: 120–129, 1881.

【7】 P. Shi and E. Stijns, “New optical method for measuring small-angle rotations” Applied Optics, Vol.27, No.20. 4342-4346, 1988.

【8】 X. Liu, W. Clegg, D.F. Jenkins, and B. Liu, “Polarization Interferometer for Measuring Small Displacement” IEEE transactions of Instrumentation and Measuremen, Vol. 50, NO. 4, 868-871, August 2001.

【9】 S.R. Kitchen and C.D. Hansen, “Holographic Common-Path Interferometer for Angular Displacement Measurements with Spatial Phase Stepping and Extended Measurement Range” Applied Optics, Vol. 42, No.1 51-59, 1 January 2003.

【10】 王力,侯文玫,“基於 Koester 稜鏡的單頻干涉儀”,計量技術,No. 11 29-32,2006。

【11】 齊永岳,趙美蓉,林玉池,“高精度單頻激光干涉儀的設計與試驗研究”,

傳感器與微系統,2009 年第 28 卷第 4 期,50-53。

【12】 W. Schott, “Development in Homodyne Interferometry” Key Engineering Materials Vol.437, pp 84-88, 2010.

【13】 W. Huber, M. Allgauer, “Interferential linear and angular displacement apparatus having scanning and scale grating respectively greater than and less than the source wavelength,” U.S. Patent No. 5,424,833, 1995.

【14】 Y. Jourlin, J. Jay, and O. Parriaux, “Compact diffractive interferometric displacement sensor in reflection,” Prec. Eng., Vol. 26, pp.1-6, 2002.

【15】 吳乾琦,“繞射式雷射光學尺之研製”,國立台灣大學應用力學研究所博士 論文,2001。

【16】 潘政晟,“自校準繞射式雷射光學尺之設計與實驗”,國立台灣大學應用力 學研究所碩士論文,2002。

【17】 W. Gao, A. Kimura, “A Three-axis Displacement Sensor with Nanometric Resolution”, Annuals of the CIRP, Vol. 56/1, pp. 529-532, 2007.

【18】 A. Kimura, W. Gao, Y. Arai, Z. Lijang, “Design and construction of a two-degree-of-freedom linear encoder for nanometric measurement of stage position and straightness”, Percision Engineering A, Vol. 34/1, pp.145-155, 2010.

【19】 K. Ishizuka, and T. Nishimura, “Encoder with high resolving power and accuracy,” U.S. Patent No. 5,4164,085, 1992.

【20】 沈欣懋,“高對位公差之微小化雷射繞射式光學尺之研製”,國立台灣大學

【23】 C.F. Kao, S.H. Lu, H.M. Shen and K.C. Fan, “Diffractive Laser Encoder with a Grating in Littrow Configuration”, Japanese Journal of Applied Physics, Vol.47, No.3, 2008, pp.1833-1837, 2008.

【24】 X. Wang, X. Dong, J. Guo and T. Xie, “Two-dimensional displacement sensing using a cross diffraction grating scheme”, Journal of Optics: Pure and Applied Optics, 6 106-111, 2004.

【25】 C.F. Kao, S.H. Lu, M.H. Lu, “High resolution planar encoder by retro-reflection”, Review of Scientific Instruments, 76, 085110, 2005.

【26】 C.F. Kao, C.C. Chang and M.H. Lu, “Double-diffraction planar encoder by

conjugate optics”, Optical Engineering 44(2), 023603, 2005.

【27】 Heidenhain “Exposed Linear Encoders”, pp.36-37, February 2010.

【28】 Agilent technologies, “5530 Dynamic Calibrator Brochure”, 2011.

【29】 P. Zeeman, "The Effect of Magnetisation on the Nature of Light Emitted by a Substance", Nature 55, 347-347, 1897.

【30】 C.H. Menq, J.H. Zhang and J. Shi, “Design and development of an interferometer with improved angular tolerance and its application to x–y theta measurement”, Review of Scientific Instruments, Vol.71, No.12, 2000.

【31】 C.M. Wu, “Heterodyne interferometric system with subnanometer accuracy for measurement of straightness”, Applied Optics, Vol.43, No.19, 2004.

【32】 鄭德鋒,王向朝,李中梁,唐鋒,步揚,“一種使用雙稜鏡的動態小角度 測量方法”,中國激光,Vol.34,No.9,2007。

【33】 J.Y. Lee, H.Y. Chen, C.C. Hsu and C.C. Wu, “Optical heterodyne grating interferometry for displacement measurement with subnanometric resolution”, Sensors amd Actuators A 137, pp.185-191, 2007.

【34】 H.L. Hsieh, J.Y. Lee, W.T. Wu, J.C. Chen, R Deturche and G. Lerondel,

“Quasi-common-optical-path heterodyne grating interferometer for displacement measurement” , Meas. Sci. Technol. 21, 2010.

【35】 I. Hahn, M. Weilert, X. Wang and R. Goullioud, “A heterodyne interferometer for angle metrology”, Review of Scientific Instrument. 81, 2010.

【36】 J.Y. Lee, M.P. Lu, “Optical heterodyne grating shearing interferometry for long-range positioning applications”, Optics Communication 287, 857-862, 2011.

【37】 C.C. Wu, C.C. Hsu, J.Y. Lee, H.Y. Chen and C.L. Dai, “Optical heterodyne laser encoder with sub-nanometer resolution” , Meas. Sci. Technol. 19, 2008.

【38】 K.C. Fan, C.D. Su, and J.I. Mou, “Error analysis for a diffraction grating interferometric stylus probing system,” Meas. Sci. Technol., Vol. 12, pp.

482-490, 2001.

【39】 張良知,”實用光干涉學”,工業技術研究院,2003。

【40】 Heydamann “Determination and correction of quadrature fringe measurement errors in interferometers”, Appl. Opt., 1987.

【41】 F.L. Petrotti, L.S. Petrotti, “Introduction to Optics, 2nd Ed”, Prentice-Hall, Englewood Cliffs, 1996.

【42】 E. Hecht, “Optics”, Addison-Wesley, 1998.

【43】 范光照、張郭益,”精密量測”,高立圖書有限公司,2003。

【44】 E. Loewen “Diffraction Grating Handbook”, 2005.

【45】 L. Shi, L.J. Zeng, and L.F. Li, “Fabrication of optical mosaic gratings with phase and attitude adjustments employing latent fringes and a red-wavelength dual-beam interferometer”, Optics Experss, Vol.17 No.24, 2009.

【46】 Thorlabs, https://www.thorlabs.com .

【47】 林三寶,”雷射原理與應用”,全華圖書。

【48】 T.A. Heumier and J.L. Carlsten, “Mode Hopping in Semiconductor Lasers”, Application Note #8, 2005.

【49】 T. Keem, S. Gonda, I. Misumi, Q.X. Haung and T. Kurosawa, “Removing nonlinearity of a homodyne interferometer by adjusting the gains of its quadrature detector systems”, Applied Optics, Vol.43, No. 12, 2004.

【50】 S. Topcu, L. Chassagne, Y. Alayli, P. Juncar, “Improving the accuracy of homodyne Michelson interferometers using polarization state measurement techniques”, Optics Communications 247, pp.131-139, 2005.

【51】 B. Edlen, “The Reflractive Index of Air”, Meteologia, Vol.2, 1966.

【52】 R. Muijlwijk, “Update of the Edlen Formulae for the Refractive Index of Air”, Metrologia 25.189, 1988.

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