矽離子佈植二氧化矽中雜質與奈米矽晶特性分析
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(2) 矽離子佈植二氧化矽中雜質與奈米矽晶特性分析 Characteristics of Defects and Naoncrystallite Silicon in Silicon Implanted Silicon Dioxide. 研 究 生：余國正. Student：Kuo-Cheng Yu. 指導教授：林恭如. Advisor：Gong-Ru Lin. 國 立 交 通 大 學 光 電 工 程 研 究 所 碩 士 論 文. A Dissertation Submitted to Institute of Electro-Optical Engineering College of Science National Chiao Tung University In partial Fulfillment of the Requirements for the Degree of Master of Engineering in Electro-Optical Engineering. July 2004 Hsinchu, Taiwan, Republic of China. 中華民國九十三年七月.
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