A web services based collaborative management framework for semiconductor equipment

2006 IEEE International Conference on Systems, Man, and Cybernetics

October 8-11, 2006, Taipei, Taiwan

A

Web Services Based Collaborative Management

Framework for

Semiconductor

Equipment

Mu-Chen

Chen

Kai-Ying

Chen,

Ming-Fu Hsu, Cheng-Tah Yeh

Abstract-Web Services have afforded inter-enterprise

information technologies to integrate heterogeneous systems

inthee-manufacturing environment along the supply chain. In

asemiconductor foundry, the equipment failure has long been

recognized asamajor source of unpredicted production process

breakdown and excessive production loss. Equipment

maintenance management is one of the important tasks in

semiconductormanufacturing.Duetotheprosperityof Internet

andinformationtechnologies, e-diagnostics and e-maintenance

through Internet have been considered as important

applications in industry. Web Services can %sist the data

integration in heterogeneous e-manufacturing systems to

supportfaster andremotemaintenance functions.Inthis paper,

aWebServicesbasedCollaborativePlanning,Forecastingand

Replenishment (CPFR) platform, namely WS-CPFR, is

developed to collaboratively manage spare parts in

semiconductor equipment between equipment suppliers and

semiconductor factories. The global application involving

multi-factory andmulti-supplierof this WS-CPFRplatformcan

beeasilyachieved with Web Servicestechnology.

I. INTRODUCTION

I N recentyears, the architecture of

e-manufacturing

has

been

continuously

emerging with the substantial advancements in Intemet and information

technologies [1].

Through these

technologies,

e-manufacturing

seamlessly

integrates factory shop floor system,

e-diagnostics,

e-maintenance as well as ecollaboration. The intra- and inter-organizational information

integration

and

visibility

allow

enterprises

to

rapidly

respond

customers' diversified requirements and toreduce

production

cost. Web Services

have recently afforded an essential

opportunity

for

inter-enterprise

integration

along

the

supply

chaintorealizea

dynamic virtual network for

enterprises

[2].

In

practice,

however,mostbusinessapplications ofWeb Services focus

Mu-Chen Chen(Correspondingauthor) isaProfessor in theInstituteof Traffic andTransportation, National Chiao TungUniversity,Taipei, Taiwan,ROC.Email:bmcchen@ntut.edu.tw

Kai-YingChen isanAssistantProfessorinthe Department of Industrial Engineering and Management, National Taipei University of Technology,Taipei, Taiwan,ROC.Email:kychen@ntut.edu.tw

Ming-FuHsu gothisMBAfromInstituteof Commerce Automation and Management, National Taipei University of Technology, Taipei, Taiwan,ROC.

Cheng Tah Yeh is a PhD student in the Department of Industrial Management, NationalTaiwan University ofScience and Technology, Taipei, Taiwan,ROC.

on intra-organizational integration rather than

inter-organizational integration. Web Services enable the

integration among heterogeneous systems in the modern

e-manufacturing environment[3], [4].

Due to the high capital investment of semiconductor

equipment, theequipment failureandbreakdownresult inan

excessiveproduction loss.Semiconductor manufacturers can

improve theutilizationandavailability of equipment through

the effective mechanisms ofdiagnostics and maintenance.

Maintenance Management System (MMS) includes several

functions suchas qualitymanagement, supplier

evaluation,

maintenance reporting, spare part inventory control,

predictive maintenance, workorder dispatch, human resource

management, etc [5]. Spare parts areusedtoreplace the failed

partsinordertomaintaintheequipment availability.

Due tothehigh uncertainty ofspare part

demands,

it isvery

difficulttomanagetheinventory of spare parts.Collaborative Planning, Forecasting and Replenishment (CPFR) is a

relativelynewinitiativeproposed

by

Voluntary

Interindustry

Commerce Standards

[6]

to establish the collaborative

mechanisms for

trading

partners in

supply

chains. For

reducing uncertainty and cost, CPFR can be

adopted

by semiconductor manufacturers and

equipment

suppliers

to

collaborate on the spare part management. CPFR can be implemented in the environment of

e-manufacturing,

e-diagnostics and c-maintenance to

provide

a collaborative

mechanismsforspare partmanagement.

To achieve the

objective

ofcode and service reuse, the

CPFRsystem forspare part managementcanbe

developed

and

integrated based on Web Services

technology.

This

study

aims at

integrating

remote

equipment

data collection and monitoring with

e-diagnostics

and e-maintenancesystemsin orderto supportan

inter-enterprise

platform

based on Web Services, which allows semiconductor manufactures and equipment

suppliers

to collaborate on the

planning,

forecasting andreplenishmentfor spare parts. Therelatively

new information technology, Web Services, is adopted to

implement the proposed collaborative management system such that equipment engineers can effectively integrate all

maintenance related tasks among semiconductor

manufacturers and equipment suppliers. Semiconductor

manufacturers, therefore, can significantly improve the

equipment

availability

and utilization, and decrease the

inventorylevel and cost of spare parts. Equipment suppliers can improve the service level of spare part provisioning to

semiconductormanufacturers as well.

II. BACKGROUNDOFE-DIAGNOSTICS ANDE-MAINTENANCE

Recently,InternationalSEMATECH (ISMT) hasproposed

e-diagnostics guidelines [7] and guidebooks [8] with respect

to thefunctionalrequirements of e-diagnostics. Additionally,

International SEMATECH and Japan Electronics and Information Technology Association (JEITA) have started

their joint research on developing the architecture of

Equipment Engineering System (EES) for c-manufacturing.

E-diagnostics plays an essential role in e-manufacturingto

supporttheremotemonitoringand diagnosticsforequipment

suppliers. Furthermore, e-diagnostics can provide the

functionsof data collection and faultanalysisasthe basis of

e-maintenance to achieve the

capabilities

of

self-diagnosis,

predictive maintenance and automated notification.

International SEMATECH categorizes the capabilities of e-diagnosticsandpredictive maintenance into fourlevels [9]: Level 0-access andremotecollaboration, Level 1-connect and

control,Level 2- automatedanalysis,and Level 3-prediction.In

Level 3,e-diagnostics/maintenance canidentify thenegative

trend ofequipment health as well asnotify the message to

equipment engineers to perform related equipment maintenanceand repairoperationswithoutdelay.

There existsome remotediagnosticssystemsdeveloped for various industriessuchas semiconductor manufacturing [3],

[4],[10], [11],microscopeindustry [12], cement industry

[131,

machine faultdiagnoses [14], etc. By usinge-diagnostics and

e-maintenance, the equipment breakdowncan besubstantially

shrunk, and expectedly zero downtime be achieved [15].

Additionally, the smart and effective maintenance can be

realized by incorporating with intelligent agents and

e-business applications suchas Supply Chain Management

(SCM), Enterprise Resource Planning (ERP), Customer

Relationship Management (CRM), etc [1]. The remote

equipment evaluationinreal time needstointegrate a variety

oftechnologies involving devicesensors, intelligent agents,

communication, web-enabled monitoring, prognostics and

diagnostics, e-business integration tools and

self-maintenance.Ko, et al. [1] proposed an e-maintenance

platform in which Watchdog Agent is the kernel for

degradation prediction.

Theexisting remotediagnostics systems have four primary

drawbacks:using dedicatedISDN ortelephone connections,

applying

proprietary information integration, providing limited functions ofdownloading equipment data for analysis, and manually browsing and integrating data from websites [3], [4].

Toimprove the existing systems, Hung et al. [4]proposed a

WebServicesbasede-Diagnostics Framework (WSDF), which

can integrate various heterogeneous data and systems on

Intranetand Internet.

III. COLLABORATIVEPLANNING FORECASTING AND

REPLENISHMENT A. CPFR concepts

Collaborative Planning, Forecasting, and Replenishment

(CPFR)isarecent initiative for supply chainintegration and

collaboration initiative. Thenine-step CPFRprocessmodel is

proposedby Voluntary Inter-IndustryCommerce Standards[6]

forsupply chaincollaboration.

In the beginning, most of the CPFR applications have

concentrated on grocery industry [16], [17]. The primary driving forces for CPFR adoptions in the grocery industry include fierce competition, shorterproduct life cycle, offshore

production andsupplychain coststructure [16]. Supply chain

collaboration has become a critical element in the complex

manufacturing environment, and CPFR applications in the

manufacturingfield are increasing (e.g.,

[17D.

CPFR mainly consists of three stages: planning stage,

forecasting stage,andreplenishmentstage [6]. Furthermore,

these three stages arefurther dividedinto nine steps, which

apply an iterative approach to develop the agreed

collaborative business planning, forecasting and replenishmentamong partners.Thedetails ofsteps adopted in CPFRdepend on the capability ofpartners, role of supply

chain, informationsourceandconsensus among partners.

CPFR steps and details embraced in the supply chain

collaboration between partners can be decided by mutual

discussions.Retailer orthe vendormayplaya lead role in sales

forecast,orderforecast, and ordergeneration in CPFRprocess.

Therefore,CPFR model can be divided into four scenarios ofA,

B, C, and D, as shown in Table I [6]. In scenario A the

TABLEI Key CPFR scenarioleads.

Sales forocast Order

forecast Scenario A Scenario B Scenario C ScenarioD Buyer Buyer Buyer Buyer Seller Buyer Order

gRencration

Buyer Seller Seller

Seller Seller Seller

replenishment ordermanagement is led by the buyer, where

thebuyer leads forecast and order generation. Inscenarios B,

C,

and

D,

theorder generationisassigned to the seller, similar

to VMIstrategy.

Readers arereferred to[6] forthe furtherdetails of CPFR.

The nine steps of CPFR arebrieflydiscussed as below:

Step 1. DevelopCollaborationArrangement

Step 2. Create Joint BusinessPlan

Step 3. Create SalesForecast

Step 4. Identify Exceptions forSalesForecast

Step 5 Resolve/Collaborate on Exception Items for Sales

Forecast

Step 6. Create Order Forecast

Step 7. Identify Exceptions for Order Forecast

Step & Resolve/Collaborate on Exception Items for Order Forecast

Step 9. Generate Order

IV. DEVELOPMENT OFWS-CPFR

A. Foundation of WS-CPFR

The equipment maintenance cost contributes a major

portion of the production costs in semiconductor

manufacturing firms. The primaryobjective ofthe spare part

inventorymanagementisto ensurethatthe failedequipment

items can be replaced right away to maintain satisfactory

productivity. The characteristics of spare partssignificantly differ from thatofproduction itemsoncriticality, specificity, demand pattem and part value [18]. Additionally, the

proposed Web Services based CPFR system, namely WS-CPFR, considers the

diagnostics

and maintenance requirements suchaswork orderrelease and

auditing,

failure resolution, preventive maintenance, predictive maintenance

and corrective maintenance, etc. With this collaborative

management system, MeanTime Between Failure(MTBF)can

belengthenedaswellasMeanTimeto

Repair (MTTR)

canbe

shortened.

TheWSDFdeveloped by Hungetal. [3] and Hungetal.

[4]

can automatically integrating diagnostics information with

Web Services

technologies.

With

WSDF,

the functions of

e-diagnostics and e-maintenance such as

automatically

collecting equipment

data,

remotely

diagnosing, fixing,

and

monitoring equipment, and

analyzing

and

predicting

the

equipment performancecanbe achievedoverthe Intranet and

Internet. TheproposedWS-CPFRisconstructedonthe basis

of WSDF. Similar toWSDF, WS-CPFRcan

collect,

integrate

and exchange data and information among cross-network,

cross-platform, and

heterogeneous

systems.In

WS-CPFR,

not

only the

diagnostics

and maintenance related

data,

information and systemsare integrated, but also those ofthe

spare partlogisticsmanagementare

integrated

tosupportthe

maintenance managementobjectiveofnear-zerodowntime.

AccordingtoWSDF, in WS-CPFR, Simple ObjectAccess

Protocol (SOAP) is adopted as the messaging

protocol

to

realize the inter-operation ofcross-platform and distributed

heterogeneous systems [19].Aswell, Universal Description

Discovery and Integration (UDDI) performs the directory

function forlocatingthe servicesonWeb [20]. Web Services

are programmable business application components expressed by Web Services Description Language (WSDL),

and they are published on Web [21]. The heterogeneous

information can be integrated and exchanged among

cross-network and cross-platform by expressing data with

eXtensibleMarkup Language (XML) [22].

In WSDF,the sub-systems in manufacturing factory side

mainly include Equipment with Embedded Agents (EEA),

On-site Diagnostics/Maintenance Server (ODMS), Local

Diagnostics/Maintenance Database (LDMD), APC/OEE

Server (AOS), and On-site Diagnosability/Maintainability

Evaluator (ODME). In equipment supplier side, the sub-systems include Remote Diagnostics/Maintenance

Server(RDMS), Global Diagnostics/Maintenance Database

(GDMD), and Remote Diagnosability/Maintainability Evaluator (RDME) [3], [4].

The On-site Logistics Management Server (OLMS) in

semiconductor factory side and Remote Logistics

Management Server(RLMS) in equipment supplier side are

two primary sub-systems added into the WS-CPFR for

collaboratively managing spare parts. In WS-CPFR,

Equipment Engineering System (EES) connects equipment with plant, enterprise and equipment suppliers. By Data

AccessControl (DAC), EES can store and retrieve equipment

engineeringdata. Thesedatacanbetransferred viaInternet to

the relatedequipmentengineering applications developedby

semiconductor manufacturers and equipment suppliers. In

general, the equipment engineering applications include

e-Diagnostics, Equipment Health Monitoring (EHM), Advanced Process Control (APC), Fault Detect and

Classification(FDC),OverallEquipment Effectiveness (OEE),

etc. For ensuring the security of information access, the

integratedsystemincorporates anAuthentication Service (AS) mechanismdeveloped byHungetal.[3].

In WS-CPFR, OLMS and RLMS incorporate with the

e-diagnostics/maintenance system for semiconductor

equipmentin WSDF.

Therefore,

WS-CPFR

mainly

includes six

sub-systems:(1 ) Equipment with Embedded Agents

(EEA), (2)

On-site

Diagnostics/Maintenance

Server

(ODMS)

and Database, (3) AdvancedProcessControl (APC) and Overall Equipment Effectiveness

(OEE),

(4) On-site

Diagnosability/MaintainabilityEvaluator(ODME), (5) On-site Logistics Management Server (OLMS), and (6) Remote

Logistics Management Server (RLMS). The first four

sub-systems were developed in WSDF [3], [4]. OLMS is

developed according to the requirements of

e-diagnostics/maintenance tobuild the logistics networkof

spare parts.OLMSandRemoteLogistics ManagementServer

(RLMS)arelinkedby WS-CPFR, whichcanallow b oth sidesto

collaborateontheplanning, forecasting and replenishmentof spare parts.

B. WS-CPFR architecture

The CPFR guidelines proposed by VICS mainly aim at

reducing the uncertainties of demand, process and supply

through effective information sharing and collaboration

betweentrading partners. Inthe WS-CPFR for spare parts of

semiconductorequipment, the semiconductor manufacturing

firmact asbuyer and the equipment supplier as seller. With

manufacturing firms share the information involving

preventive maintenance, predictive maintenance, corrective

maintenance, demand forecast, part degradation prediction,

maintenanceschedule,OEE toequipment suppliers.

With the shared information ofpreventive

maintenance,

equipment supplierscanprepare therequired spare parts for

manufacturing firms in advanced. With the information of

predictivemaintenance, equipment suppliers also can more

accurately predict the required spare parts for failed items.

With the information of corrective maintenance, equipment supplierscan morequickly respondtherequiredspare partsto the manufacturing firms, which results in the reduction of production loss due to machine breakdowns. The demand

forecastandOEEinformationallow both sides tomakemore

accurate replenishment decisions through CPFR. The

uncertainty of spare parts ofsemiconductor equipment and

replenishment lead times can be reduced by

implementing

CPFR, andthe spare partinventorycost,equipmentcostand

production losscanthus be decreased.

The proposed WS-CPFR system is developed by Web

services architecture (refer to Fig. 1). WS-CPFR mainly

integratesOLMS inthemanufacturing firm(factory side) and

RLMS in theequipment supplier (supplier side). Due to the

transmissionflexibility of Web services, OLMS andRLMS can

easily incorporate with WS-CPFR and usethe applications providedby Web services. Since the transmissionbetween OLMS and RLMS is via SOAP protocol, WS-CPFRcanbe easily extendedtothe vision ofglobalization (refertoFig. 2). Multi-supplier and multi-factorycanbeincludedintheglobal

Factory

Sid4

'9-;-'

M:'

I..., Suppher Side

~~~N4N.4"

Fig. The framework of WS-CPFR.

architectureas inWSDF.

C. System analysisfor WS-CPFR

The proposed WS-CPFR system for semiconductor

equipment is developed according to the requirements of

diagnostics and maintenance, and the CPFR guidelines by

VICS. The service components are developed forthe CPFR

steps, which can support the functions and operations of

OLMSandRLMS.The ninestepsofWS-CPFR for spareparts

of semiconductorequipment arebrieflydiscussed as below:

Step 1. DevelopCollaborationArrangementforspare parts

of semiconductor equipment: Semiconductormanufacturing

firm (buyer side) and equipment supplier (supplier side) agree

on implementation principles and related guidelines to

establish a collaborative relationship, and thus enter into a

collaboration agreement for planning, forecasting and

replenishment for spare parts. Collaboration agreement

defines theobjectives, resource requirements, shared data and

confidentiality conditions for the WS-CPFR initiative on

I

.. g

:s.5

.^, ,,, 'I g"P''"g t...0>. >..5>*Q 1 5^. + Wy5 ,,

o^.9.^.v.o.v.ow6

tyoMe g

5if

gs S ,,,

: :"

Xt_t |iY§/lilll Fe .' 08

Fig.2.TheglobalWSCPFR architecture.

managing thesparepartsof semiconductorequipment.

Step2.CreateJoint Maintenance Plan: Both sides identify partnership strategies, communicationand operational plan,

exception criteria for managing variation. Themanagement

profiles ofspareitemsuchasordercommitment, lead times and

order intervalsare establishedinthis step.This step mainly

identifies the items for collaboration management, and the

sharedinformation of maintenancepolicy and data.

Step3.Create Demand Forecast forSpare Parts: In general,

themaintenancetypes ofsemiconductor equipmentconsist of

preventive maintenance, predictive nmintenance and

corrective maintenance. In this step, the actual spare part

demands from the semiconductor manufacturing firm are

shared to generate the more accurately demand forecast.

OLMS integrates theOEEdata supportedbyAOS, ODE and

ODMS togeneratethe schedule and prediction ofpreventive

maintenance and predictive maintenance. With such

information, theWS-CPFRcangenerate the spare partdemand

forecast of spare parts. After coordination, the generated

demand forecast becomes the common

guidance

for mutual

subsequent order forecastingof spareparts.

Step4.Identify Exceptions forDemand Forecast for Spare

Parts: This step focuses onidentifyingthe exception items

thatdonotsatisfytheagreedcriteriadefinedbybothsidesin demand forecast.

Step 5.Resolve/CollaborateonException Items forDemand

Forecast: This step involves resolving demand forecast

exceptions by querying shared

data, email,

telephone

conversations,

meetings,

and so on and

submitting

any

3787

4

I

77 _N- p

resulting changes todemand forecast. The increased real-time

collaboration enabled by WS-CPFR fosters effectivejoint

decision-making between both sides, which is expected to

graduallyincrease confidence in the eventual committed order. Step 6 Create Order Forecast for Spare Parts: Demand

forecasts of spare parts from Step 3 is incorporated with maintenance information, casual information and inventory policies from OLMS to support the order forecast in this step. The short-term use oforder forecast is to generate orders while

thelong-term application exists in maintenance planning and

partnership strategies of spare parts. In scenarios A and C, the

semiconductormanufacturingfirmisresponsibleforthisstep.

Inscenarios B, and D, the equipment supplieris responsible

forthis task.

Step 7 Identify Exceptions for Order Forecast ofSpare

Parts:Thisstepis similartothe step (Step 4)ofidentifying

exceptions for demand forecast. Exception items for order

forecast are explored based on pre-determined exception

criteria.

Step 8 Resolve/Collaborate on Exception Items for Order

Forecast of Spare Parts: Similar to the step (Step 5) of

resolving/collaborating on exception items for demand

forecast, thisstepinvolvesthe processofinvestigatingorder

forecast exceptions through querying shared data, email,

telephoneconversations, meetings, andso onandsubmitting

anyresulting

changes

toorderforecast.

Step 9 Generate Order of

Spare

Parts: Once the order

forecasts are agreed, they can be changed into committed

orders. No matter wh ich side generates orders for

replenishment, the focus is on

meeting

the

replenishment

procedure. In ScenarioA, the semiconductor manufacturing fim is responsiblefor this step. InScenariosB,C,andD,the

equipmentsupplieris

responsible

for this task.

V. SYSTEMIMPLEMENTATION

A. System architecture

i(!fki: :j:ifi-fiSE:di:- it.E. t:SS-;f E

::g-:t .Rifi:-.LiigEP._:.ifit.:E.D iS: r. tiDy:t:iR,.\D

...::.::A:aa^sW.Sv>aE.^<AMB;RzC/.t{.V+RV.ia.:.:...:a::.:.E.:.E

E: :f:j::: ::X:i::X:::: Vi :SEl-, :B,li,i, cywiikxw-,_i :E::: ::: ::::: T:: ::XiLi:0::: it:

0: .;<,! S!m?-=r<Yf: :w?? :::::: S::::: ::::::::: i: >:o.0.'.': ,... a.s.::,i -&:N¢..42 -..;ti.i;-....n ;.::-:::.:::Z.::. :n i.4i;, .. 0'- ii:$ ,, .:Di iES.. t_ ,' i, h,_.,, ,,_: i=X_::: 7:, _,_,T ::: t::: :t

:swPlEat_911::.F_:Q7

::,:: .'iR ':iC' '':: 'i:: '. 'i iL.:::':::: :::::::;t:0::::::y:::: iS: i::E :t:fF t:::: ::f0:::::: ::f

..: i: ': A.::: L::E.E:::.:.:r

40v*|i; itS;Tf ttt4iTttE-00000tSE ftS tt

.s...AE...7.v.7.:.isV...r...H

_.B=Li..s)>.>=iai

tz 7;

m .wDrF t

i-SSDi0Ei7.iSt.-.g.ii2

:z{.;r;ZM....;2.2.i=.S\.U.h.ih;.Zii-.viB.fi

:i-:A,Di-: :::f C:0f:Ef:it0ff::-i:j:::::E: T:::: :; t::;:-:f:

02*-'Sl-E:---2---S-LE--E-S-4FiSiS-iVi'---iiiAiiC--{-f+tiASd'+-+-2Q-it-i*>-=st'SRi'

SS iC:.::: :::: ;-ww.mv-v i-di.

zititaSiD-..v&W

C:: ai :i.: ::t: d:: :3.r.-*":>:: 0:: :::: 000 i:::0

-i

S

S

4 4 d a a

2000 Server. Additionally, the database management system is

SQL Server 2000. The WS-CPFR system provides a

collaborative management platform based on Web Services for semiconductor spare parts. This platform connects OLMS in semiconductor factory side and equipment supplier side. The

main functions of WS-CPFR are illustrated in Fig. 3. The

architectures of OLMS and RLMS are shown in Fig. 4 and 5, respectively.

With Web Services, the proposed collaborative

management platform, WS-CPFR, can easily integrate

bi kAki- 4 k t

n31

x ,,, _ 4}::0.~.o: bb..Izu.amwaed

Fig. 4.The architecture of OLMS.

.-,"::x aE a 1. niJ';? y:tY,yie

L_:;;fS;:::;::f

7-. :: :: ::g::: :7:

-.t5E:$:-<d;:;:Q:>fj::-X)gg...{q.qq::;.LP...:ffg,

paF fi , wa3B_ <: x

r3i.33w11r.r3*v:s__:vA

\4 :: ,Jrf 7-1"!3.3:::|:S:::::Q ::: a >_3_y= ss_ if30; i7i \.v :2 w :_-, J-tC S! ^.S.::S:k:: :::::: ... > :9. :¢:ES: ... SE SS

.,.::S:b::.

33X3?::3s::::::;::::::j

§31Sf^NK6{E:<:A:;::9y¢A:/,,::<A>eA:S

M:XM 9>4 :,,;,_._j3 &i0 ' SS Xs1 S6;Sui.ii:i*ii3:5,jyss

:::_:}tEr:5mj-3:33::|3.-?8:vr

_{-_3>.Sl>/)..3>...S1<lA:...'<.:3^:::.2:,:1:<>}

''--;i;tt*}0f;0

Vi-::si-:b=_.:i

:::: 7::: ::: :: 0:::-:

|->tS S-=Eyw:

o t_:

Fig.5. The architecture ofRLMS.

maintenance management system and CPFR as well as

synchronize with other e-business applications. In

semiconductor manufacturing, the vision of

Device-to-Business (D2B) can be achieved through the

proposed system.

VI. CONCLUSIONS

With the rapid advancement ofInternet and information

technologies, the e-business applications have been

broadened to e-diagnostics and e-maintenance in

semiconductor industry. Through these advanced

technologies, semiconductor manufacturers can remotely

collect and monitor thereal-time equipment data. Therefore,

3788

Fig.3. Mainfunctions ofWS-CPFR.

The proposed WS-CPFR is implemented by Microsoft

Visual Studio net, and the system is operated on Windows

I .;... ..

&0*4*"-44**m4, kc*Wr**.

4-A-Ar f4siow" o"kawaaw. 44-mv AI-OA

OU

i

theycan moreaccuratelypredict the failurepattemand failure

time ofequipment.Thisremotedata collectionandmonitoring

mechanisms can be incorporated with

e-manufacturing

in order to provide the

inter-enterprise integration

and

informationvisibilityfor

equipment

status.

The nine steps and primary four scenarios of CPFR

proposedbyVICSonlyprovide guidelinesforimplementation,

and these guidelines can be further

designated

for various industries byconsidering their characteristics. Withrespectto

therequirements ofspare parts in semiconductor

equipment,

this study develops a Web Services based CPFR system,

WS-CPFR, for

collaboratively

planning,

forecasting

and replenishing spare parts between fabs and

suppliers.

The developedWS-CPFR systemassist maintenanceengineersto

make right decisionsonreplenishmentof spare parts toreduce equipmentdowntime, maintenancecostand

production

loss.

ACKNOWLEDGMENT

This work is partially supported by National Science Council, Taiwan,ROCundergrant NSC

94-2212-EB027-001.

REFERENCES

[1] M. Koc,J.Ni,J.Lee, and P.Bandyopadhyay,2003, Introduction

of e-Manufacturing, [Onlinc]. Available:

http://www.e-insite.net/semiconductor/, (download on2004/9).

[2] J. van Hillegersberg, R. Boeke, and W.J. van den Heuvel, "Potential Web services to enable smart business networks," Journal ofInformationTechnology, vol. 19, pp. 281 -287, 2004. [3] M.-H. Hung, K.-Y. Chen, R. W. Ho, and F.-T. Cheng, "Development of an eDiagnostics/Maintenance framework for semiconductor factories with security considerations," Advanced EngineeringInformatics,vol. 17, pp. 165-178, 2003.

[4] M. H. Hung, F. T. Cheng, and S. C. Yeh, "Development of a

web-services-based c-Diagnostics framework for the

semiconductor manufacturing industry," IEEE Transactions on SemiconductorManufacturing, vol. 18, no. 1, pp. 122-13 5, 2005. [5] A. Raouf, A. Zulfiqar, and S. 0. Duffuaa, "Evaluating a

computerized maintenance management system," International Journalof Operations & ProductionManagement, vol. 13, no. 3,

pp.38-38, 1993.

[6] VICS, 2002, Collaborative Planning Forecasting and Replenishment Voluntary Guidelines. [Online]. Available: www.vics.org/.

[7] c-DIAGNOSTICS and EEC Workshop (2003, Jul. 18). [Online]. Available:

htt://www.cematcch

org/resources/emaniifactuiring/meetings/200

30718/index.htm.

[8] c-Diagnostics Guidebook (2002, Oct.). [Online]. Available:

http://www.sematech.org/resources/cmanufacturing/ediap/guide.ht

m.

[9] International SEMATECH, 2001, eDiagnostics Guide Book Version 1. I.,[Online].Available:htty:/Hwww.scmatech.org/.

[10] M. Locy,"Theimpact of c-diagnostics One yearlater," in Proc. 2001IEEE Int. Symp. Semiconductor Manufacturing, pp.

435-438,Oct.8-10, 2001.

[11] M. Inaba,T.Aizono,K. Sonobe, H.Fukube, T. lizumi, J. Arima, and Y. Usami, "The development of security system and visual service supportsoftwareforon-linediagnostics," inProc. 2001 IEEEInt. Symp. Semiconductor Manufacturing, pp. 45-48, Oct. 8-10, 2001.

[12] N. H. M. Caldwell, B. C. Breton, and D. M. Holburn, "Remote instrumentdiagnosisontheinternet," IEEE Intelligent (Expert)

Systems,vol. 13,no.3,pp.70-76, May-Jun. 1998.

[13] R. A. Errath and J. J. Dominguez, "Remote drive condition monitoring," in Proc. Conf Rec. 1999 IEEE-IASIPCA Cement Industry Tech.ConJf,Roanoke, VA,pp.31-48, Apr. 11-15, 1999. [14] A. C. M. Fong and S. C. Hui, "An intelligent onlinemachinefault diagnosticssystem," Computing Contr. Eng. J., vol. 12,no.5,pp. 217-223, Oct. 2001.

[15] Center for Intelligent Maintenance Systems (IMS), 2004,[Online]. Available: http:l/www.imscenter.net/.

[16] G. Fliedner, "CPFR: an emergingsupply chaintool," Industrial Management & DataSystems, vol. 103,no. 1,pp. 14-21, 2003. [17] W. W. C. Chung and S W. F. Leung, "Collaborativeplanning,

forecasting and replenishment:acasestudyincopperclad laminate industry," Production Planning and Control,vol. 16, no. 6, pp. 563-574, 2005.

[18] J. Huiskonen, "Maintenance spare part logistics: Special characteristics and strategic choices," International Journalof Production Economics,vol. 7 1, no. 1-3, 125-133, 2001.

[19] SOAP Specification. [Online]. Available:

http://www.w3c.org/tr/soap.

[20] UDDISpecification. [Online]. Available:http://www.uddi.org.

[21] WSDL Specification. [Online]. Available:

http:Hwww.w3c.or2/tr/wsdl.

[22] XML Specification. [Online]. Available:

http://www.w3c.org/XML