提升式通道結構及鍺引致再結晶複晶矽薄膜電晶體之研製
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(2) 提升式通道結構及鍺引致再結晶複晶矽薄膜電晶體之研製. Fabrication of Low Temperature Processed TFTs with Elevated Channel Structure and Ge-induced Crystallization 研 究 生:施俊宏. Student:Chun-Hung Shih. 指導教授:葉清發 教授. Advisor:Dr. Ching-Fa Yeh. 國 立 交 通 大 學 電子工程學系 電子研究所碩士班 碩 士 論 文. A Thesis Submitted to Institute of Electronics College of Electrical Engineering and Computer Science National Chiao Tung University In Partial Fulfillment of the Requirements For the Degree of Master of Science In Electronics Engineering June 2005 Hsinchu, Taiwan, Republic of China. 中華民國九十四年六月.
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