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具奈米尺度及新穎結構的高效能低溫複晶矽薄膜電晶體的製作與特性研究

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(1)國 立 交 通 大 學 電子工程學系 電子研究所. 博 士 論 文. 具奈米尺度及新穎結構的高效能低溫複晶矽薄膜 電晶體的製作與特性研究 Fabrication and Characterization of Novel Structure with Nano-Scale High-Performance Low-Temperature Polysilicon Thin-Film Transistors. 研 究 生 :吳 永 俊 指導教授 :張 俊 彥. 博 士. 中華民國 九十四 年 十 月.

(2) 具奈米尺度及新穎結構的高效能低溫複晶矽薄膜電晶體的製作 與特性研究 Fabrication and Characterization of Novel Structure with Nano-Scale High-Performance Low-Temperature Polysilicon Thin-Film Transistors 研 究 生 :吳 永 俊 指導教授 :張 俊 彥. Student: Yung-Chun Wu 博 士. Advisor: Dr. Chun-Yen Chang. 國 立 交 通 大 學 電子工程學系. 電子研究所. 博 士 論 文 A Dissertation Submitted to Department of Electronics Engineering & Institute of Electronics College of Electrical Engineering and Computer Science National Chiao Tung University In partial Fulfillment of the Requirements for the Degree of Doctor of Philosophy in Electronics Engineering October 2005 Hsinchu, Taiwan, Republic of Chian. 中華民國九十四年十月.

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