Ӏϡѣࢨ̮৵ڱ˷ᑅё̷౷˥જၗ̶ژ
ӓᇇ! ౘܫර! ᖡԠ
઼ϲލڌࡊԫ̂ጯ፟ୠր
ၡ! ࢋ
ώࡁտࢋߏӀϡѣࢨ̮৵ڱٺϠۏᗁጯ̍̚Ăజᇃھֹϡͽۣࠎૄغ
۞ᑅё̷౷˥ր̶ژĄӀϡᑅજѣჟޘăٽଠטă̈́࠷ਕ
ඈкีᐹᕇĂТॡΞᖣϤ፟ᄦౄԫఙซҖඕၹ̼̈ĄώࡁտࢵА੫၆˘
ᑅᚙᓖ߉ΐ̙Тᑅ˭̝ᐖၗ̶ژĂซҖѣࢨ̮৵ሀᑢඕڍᄃ၁រͧ၆Ăϫ
۞ࠎቁؠᑅѣࢨ̮৵ሀё۞ቁّĄѨĂͽۣࠎૄՄ۞˥෭ᖬᑅՄ फ़Ă߉ΐᑅޢ៍ീҜொត̼ณć၆ᑅ̷౷˥ซҖજၗ̶ژĂଣ፬ᒜᐛ தᄃٙ၆ᑕ۞ሀၗॎݭĂႬޢГ၆ᑅ̷౷˥ซҖᇶၗ̶ژĂՐᇶၗᜩᑕ ဦĂͽ೩ֻጯ۰ٕຽࠧనࢍăࡁտ̈́ฟ൴̷౷˥ٕயݡॡՀѣड़ৈĄ ᙯᔣෟĈᑅՄफ़ăѣࢨ̮৵̶ژăኑЪಞă̷౷˥Ą
FINITE ELEMENT DYNAMIC ANALYSIS OF A MICROCUTTER WITH A PZT ACTUATOR
Der-Ho Wu Hsin-Hua Chen Zhi-Jie Lan
Department of Mechanical Engineering National Pingtung University of Science and Technology
Pingtung , Taiwan 902, R.O.C.
Key Words: piezoelectric material, finite analysis, coupled field,
microcutter.
ABSTRACT
This paper presents a piezoelectric drive concept that could be easily integrated into a silicon based microcutter . A simple cantilever beam integrated with a PZT actuator was simulated first, to test the accuracy of the FEM model. The results are compared to experiments and show good accuracy. Next, static and dynamic analyses of microcutter were performed to investigate the resonant frequency and displacement sensitivity by finite element methods. The transient response is also included in this study to realize the deflection of microcutter subjected to an exciting voltage input.
Good dynamic characteristics were obtained.
˘ă݈! ֏
ܕѐֽംᇊݭඕၹ۞ԫఙ൴णҡᐌ፟८͕ԫ ఙቿݎ൴णĂྻϡቑಛ˵ֽᇃĂӀϡᑅՄफ़үࠎᜭ
જጡĂΞͽޝटٽ྿זѼĂ҃ᑅજጡΞٚצᒠมજ
ၗᄃؠצ˧Ăдѣྶॡ၆ᑅயϠϒᑅड़ᑕćጱ
ᑅҜਕயϠᇆᜩĂซ҃Լតᜭજ̝ҜொณĄ˘ਠᑅՄ फ़ડ̶ࠎᜭજጡ̈́ຏീጡᙷĂЯࠎᑅᜭજጡΞͽᜭજ
ೀѼ۞ҖĂ߇૱૱ົజϡֽүࠎؠҜրĂ҃д፟
ր˵གྷ૱జኢĄHwang Parkt[1]̈́ Chen ඈˠ[2]
ᑅͯͽᚙᓖሇ͞ё̶ژĂ̶ژજၗېၗĂΞۢҋ
ᐛத̈́ᐛதᜩᑕဦćPaolo Rolardo[3]дᚙᓖሇ˯˭Ч ෭ᑅՄफ़Ă˯ࢬࠎᜭજጡĂ˭ͯࠎຏീጡĂ֭ᄲځఈ ٸ̂۞ࣧநĄStephen[4]ĂSun Zhong[5]̈́ Wu ඈˠ[6-8]
ጯ۰ĂӀϡથຽ̼CAD/CAE யݡซҖᑅજጡᄃຏീ
ጡሀᑢ̈́నࢍĂ̶ژјݡ۞ӚЪޘĂͽӀ࣒Լ̈́រᙋ֭ͷ ഴ͌јώᒔޝрඕڍĄ
дϠۏᗁጯ̍̚૱ϡ۞ፆү࿅ࢋѣ̂
ᙷ̷౷ፆүĈڦडፆү̷౷ፆүĂፆүд னϠۏᗁጯࡁտ̚Ӯҫᅳܧ૱ࢦࢋ۞гҜĄϫ݈ொᖼ જങۏૄЯѣड़ăᖎܮ۞͞ڱߏଳϡڦडԫఙĂ҃
дϠۏ็̍̚۞Ω˘̂ᙷፆүԫఙߏ̷౷ፆ үĄԆј̷౷ፆүᄃڦडፆү̝ր۞ૄώඕၹᜭજ
ࣧந̂˯࠹ТĂፆү۞ыბొ̶ӮߏѼ৺Ă̙
࿅̷౷ፆүր۞ҜொؠҜჟޘᑕӮͧڦडրᔘ
Ă၆̷౷ፆү҃֏ĂдϠۏᗁጯࡁտĂপҾߏ̷ੵཚ ሳٕϨ̰ᅪ͘ఙඈჟγࡊ͘ఙӮѣ˩̶ࢦࢋ۞ᑕ ϡĄЯѩĂϠۏᅳા̚ଂְፆү۞ࡁտˠࣶ၁រፆү ˠࣶౌԓ୕ਕૉ೩ڦडፆү̷౷ፆүրĂֹፆ үᖎಏ̼ăҋજ̼Ăซ҃၁ன̼̈́Ąᗁጯ˯੫၆ˠវ̰
ొ۞ጡءٕࡪซҖ̶ژ̈́ᑭរ̝Ϡۏͯă߹րሀ ᑢ̶̈́ژ[9]ăڦˢጡ[10]ă̷౷˥[11,12]̈́ӵ
[13]ඈ۞ฟ൴Ă۞ϫ۞ߏயݡ̼̈ĂΑਕ̙ົ
ಉεĂ҃ͅՀਕᆧૻड़ৈĂಶϫ݈҃֏̷౷˥̏ᇃھ гӀϡдҋજ̼̍ຽᅳાᄃᗁ̍ᅳાĄ
ܕֽӀϡ፟ԫఙ̈́؉Ѽԫఙ൴ण̝ඕၹആ ˠᙷڱԆј۞Їચ͟ᔌពĂ̚ͽӀϡᑅՄफ़ֹ
ϡٺજጡᄃຏീጡࠎᇃھĄͽـ็ΐ̍ڱυืА ઇԆሀݭޢĂГॲፂᕇుՎ࣒ԼĂѣॡᔘυืֶያགྷ រڱĂЯѩ૱ົౄјјώ۞̈́ˠְϡ೩ඈĂ ซ҃ഴ͌Ըྤಡ࿌தĂ˵ЯࠎтѩĂӀϡCAE/CAD ྍᅳ
ા̝Αਕᑕϡдඕၹᄃր̝ሀݭޙϲᄃሀᑢ̏ు
႙ࠎˠࣇତצĂࢋᐹᕇࠎΞ༼࠷̂ณˠ˧ᄃੑ˧ă ᒺൺயݡ˯ξॡม̈́ࢫҲјώĂ֭೩၆யݡ۞Ξያޘ ඈĂ҃ώ͛ଳϡѣࢨ̮৵హវANSYS ซҖᑅ̷౷˥
ඕၹሀᑢĂഇ୕ਕд၁រ݈Ă੫၆ඕၹү˘ాҚ۞̶
ژĂͽܮ༼࠷јώĄ
˟ăᑅё̷౷˥ࡁտ͞ڱ
1. ᑅůඕၹኑЪಞ̶ژ၆ᑅՄफ़҃֏Ăග˷γΐᑅ˧ӈົயϠԛតĂ࠹
ͅг˵ΞјϲĄࣧЯߏᑅՄफ़дಞүϡ˭Ă̬ࣃ̚
̙Тّ۞ఈயϠ࠹၆۞ҜொĂ˵ಶߏᄲĂ࣎࠹ዐҭ
̙Тّ۞ᗓ̄ொજז̙Т۞ҜཉĂֹ࢝ඕၹயϠត̼Ă ซֹ҃Ҝொ൴ϠĄѩត̼۞ࣧநĂԧࣇ˵ΞͽགྷϤ˭ё
۞ᑅ͞ё࠻Ă༊ԧࣇග˷ᑅॡĂ̬Մफ़ܮົ൴
ϠҜொड़ᑕĂ҃ໂ̼ณੵ˞ΞЯᑕត҃ԛј̝γĂᑕ ត˵ົᐌಞ҃யϠĂѩன෪ԧࣇჍ̝ࠎᑅड़ᑕĄ
͞ёಶߏϤα࣎តᇴٙјĂ࣎̚ࠎ፟ୠᇅّณĂ
ᑕ˧σ ̈́ᑕត SĂ҃Ωγ࣎ࠎ̬ณĂಞ E ̈́Ҝொ
DĄ
=
3 2 1 6 5 4 3 2 1
33 11 11
33 31 31
15 15
15 15
33 31 31
66 44 44 33 13 13
13 11 12
13 12 11
3 2 1 6 5 4 3 2 1
0 0
0 0
0 0
0 0 0
0 0 0
0 0
0 0
0 0 0
0 0 0
0 0
0 0
0 0
0 0
0 0
0 0 0 0 0
0 0
0 0 0
0 0 0
0 0
0 0 0
0 0 0
0 0 0
E E E
d d d
d d
d d
d d d
S S S S S S
S S S
S S S
D D D S S S S S S
E E E E E E
E E E
E E E
σ σ σ σ σ σ
ε ε ε
σ σ σ
(1)
̚ {ɨ} = ᑕ˧ШณĂ{D} = ҜொШณĂ{S} = ᑕតШ ณĂ{E} = ಞૻޘШณĂ[d]Ŷᑅᑕត૱ᇴੱĂ[εσ] =
̬ࣃܼᇴੱĄ 2. ᑅѣࢨ̮৵͞ё
Ӏϡѣࢨ̮৵ڱซҖᑅՄफ़ሀၗăҋᐛதᄃᇶၗ
̶ژࠎϫ݈జᇃھؕϡٺᑅ̶ژĄࢋᐹᕇࠎѣࢨ̮
৵ڱдՐྋ༼ᕇྋॡĂ҂ᇋז༼ᕇྋ۞кតّ̮৵តԛ בᇴ۞ኑᗔّĂӀϡᑅඕၹኑЪಞ̮৵ᒔඕၹតԛॡ
۞ܕҬྋĄώኢ͛ଣᑅᜭજ̷౷˥дᇶၗᜩᑕॡĂ ଳϡANSYS ̚ Full Method ̶ژĂߏЯࠎ Full MethodĂΞ ͽྋՙܧቢّᙯܼ̝߇Ăѩ͞ڱдॡม᎕̶࿅̚ଳϡ Newmark time integration methodĂপҒࠎॡมᗓј ᇴ࣎᎕̶ՎូĂ݈˘Վូࠎܐؕ୧ІĂՐྋԆޢГෛү˭
˘࣎ॡม᎕̶۞ܐؕ୧ІĂͽѩᙷଯĂՐޢᇶၗᜩᑕ בᇴĂᇶၗᜩᑕт˭ёĈ
[ ] [ ]
[ ] [ ] [ ] [ ] [ ] [ ]
[ ]
[ ] [ ]
[ ]{ } { }
{ } { }
=
+
+
L F v u K K
K K v C u
v M u
p T d p
. .
..
..
0 0
0 0
0 0
(2)
̚Ă[M]ܑඕၹኳณੱĂ[Cd]ܑඕၹܡκੱĂ[K] ܑ ඕၹݏޘੱĂ[Kp]ܑᑅኑЪੱĂ{u}ܑ༼ᕇҜொШ ณĂ{v}ܑ༼ᕇҜШณĂ{F}ܑ༼ᕇ˧Шณăܑࢬ˧ăҋ Ϥវ˧Ă{L}ܑ೩ֻ༼ᕇఈШณĄ̚ඕၹܡκੱ[Cd] Ξᖼೱј[M]̈́[K]ੱ̝Ăܑϯт˭Ĉ
[Cd]Ŷɗ[M]Ůβ[K] (3)
ܡκɗ̈́β Ⴭࠎ Rayleigh ૱ᇴâਠ҃֏ĂдᑅՄफ़ፆ үᐛதҲٺ1 MHz ̶ژ̚ĂΞనɗŶ7.5ĂβŶ2 Ű10-5Ą
ܑ˘! PZT-5H Մफ़ّኳܑ
Stiffness (1010N/m2)
C11 C12 C13 C14
12.6 7.95 8.41 0 C33 C44 C66 −
11.7 2.3 2.35 − Piezoelectric Stress (C/m2)
e11 e14 e15 e22
0 0 17 0 e31 e33 − −
-6.5 23.3 − − Permittivity (10-8F/m)
ɛ11 ɛ22 ɛ33
2.7 2.7 2.9
90mm×10mm×0.3mm 60mm×10mm×0.191mm
ဦ 1! ᑅᚙᓖሇ̝ѣࢨ̮৵ሀݭ
ˬăሀᑢ̶ژᄃኢ
1. ᑅᚙᓖሇᐖၗሀᑢᄃ၁ររᙋࢵА੫၆˘ᑅᚙᓖሇซҖѣࢨ̮৵ᐖၗ̶ژĂϫ۞
ࠎቁؠᑅѣࢨ̮৵ሀё۞ቁّĄώሀᑢଳϡ ANSYS హវ̚۞Solid 45 ̮৵ޙϲҲ᐀ૄڕĂͽኑЪಞ̶ژ̮
৵Solid 5 ֽޙϲᑅ̮ІĂᑅኑЪಞ̶ژߏ˘҂ᇋז ඕၹᄃಞม̝࠹̢ᇆᜩ۞̶ژĂΞϡֽՐྋᑅүϡд ᑅՄफ़˯ٙயϠ۞តԛ̈́ՐྋᑅՄफ़дצ˧តԛޢٙ
யϠ۞ᑅĄӀϡѣࢨ̮৵ڱ̶ژᑅᚙᓖሇ̝ᐖၗᜩ ᑕĂဦ1 ࠎᚙᓖሇ̝ѣࢨ̮৵ሀݭĂૄՄ͎̇ࠎ 90mmŰ 10mm Ű0.3mmĂܼͩᇴࠎ 169 Ű109 N/m2Ăڗͧ0.3Ă
ޘ 7869 kg/m3Ăᑅ͎ͯ̇ࠎ 60mm Ű10mm Ű0.191 mmĂޘ 7800 kg/m3Ăᑅّࣣ૱ᇴੱăᑅܼᇴੱă
̬ܼᇴੱтܑ˘ٙϯĄ
ࠎᒢྋᑅᚙᓖሇ۞ᇦѡপّ̈́រᙋѣࢨ̮৵ሀݭ
۞ቁّĂώ༼ซҖᑅᚙᓖሇצ˘ᑅயϠҜொ̝၁ រĂ҂ᇋᑅ̮І۞Ҝொณྵ̈ĂЯѩᏴϡณീჟޘྵ
۞डҜொณീրĂͧྵѣࢨ̮৵ሀݭᑅᚙᓖሇ ҋϤბ̝ᇦޘĂ၁រߛၹтဦ2 ٙϯĄ
ܑ˟! ᐖၗ̶ژᇴፂܑ
ᑅࣃ(V) 模擬值(mm) 實驗值(mm) 誤差百分比(%) 20 0.328 0.348 5.7 40 0.661 0.708 6.6 60 0.992 1.074 7.6
ܑˬ! ̷౷˥Іܑ
Іཱི ЩჍ Մफ़
1 Cutter Silicon
2 PZT PZT-5H
3 Fork − 4 Sleeve −
ဦ 2! ၁រన౯ߛၹဦ
3 2
1
4 X
Z
Y
0.55
5
80
unit: 10−3m
ဦ 3 ௐ˘̷౷˥ሀݭ(෭ᖬٺۣૄՄ˯۞ᑅͯజӵ
ז۞ࢬ᎕ࠎፋͯ)
̶ҾᏮˢᑅࣃࠎ 20ă40ă60 ЄপĂՐᑅᚙᓖ ሇҋϤბ̝ᇦޘ̂ࣃĄ၁រᄃሀᑢඕڍͧྵтܑ˟ٙ
ϯĂ۰ඕڍ࠹ҬĂඕڍពϯᑅດ̂Ξౄјྵ̝̂ҋϤ ϐბҜொĄϤѩΞቁؠӀϡѩሀᑢሀё̝ΞያّĂซҖՀ ซ˘Վ̷౷˥̶ژĄ
2. ᑅ̷౷˥̝ॎજҜொሀᑢᄃ̶ژ
ώࡁտଳϡ۞̷౷˥˜ॲፂ͛ᚥ[11]۞ሀݭĂࢋ
ૄՄࠎۣĂӀϡᑅͯࠎᜭજĄ̷౷˥۞ؠཌྷࠎϒ૱
ଐڶ̝˭Ă̍үҜொࠎ0~40µmĂॎજᐛதࠎ 50k~150kHzĂ дֱ୧І̝˭Ă̷౷˥ӈΞ྿ז̍үϫ۞Ąд྆ԧ ࣇଳϡ̷౷˥నࢍĂ̷౷˥ሀݭ̶Ҿࠎဦ 3
̈́ဦ4Ăܑˬࠎᑅ̷౷˥̝ІܑĂ̚І 3 ᄃ
І4 ߏૄळ۞ЪĂ҃ᑅͯ(І 2)෭ᖬдۣ˥ͯ(
ܑα! ᑅᄃҜொณត̼(ௐ˘)
ᑅ (Volt) Ҝொณ (10-6 m) 2
6 10 20 50 80 100
0.525 1.57 2.62 5.25 13.1 21.0 26.2
ܑ̣! ᑅᄃҜொณត̼(ௐ˟)
ᑅ (Volt) Ҝொณ (10-6 m) 2
6 10 20 50 80 100
0.805 2.42 4.03 8.05 20.1 32.2 40.3
3 2
1 4
X Z
Y
0.55
5
80
unit: 10−3m
ဦ 4 ௐ˟̷౷˥ሀݭ(෭ᖬٺۣૄՄ˯۞ᑅͯజӵ
ז۞ࢬ᎕ࠎ˘Η)
І1)˯â׀జૄळٙӵĄ̷౷˥۞मளдٺૄ
ळ۞ӵ͞ё(ᙝࠧ୧І)̙ТĂௐ˘ૄळٙӵ۞Ҝཉ Βӣ˞ፋᑅͯĂ҃ௐ˟ᑅ่ͯజૄळӵז˘
ΗĄкۣ˥̮৵ଳϡSolid 45Ăܼͩᇴࠎ 169 Ű109 N/m2Ăڗͧ0.3ĂᑅՄफ़̮৵ଳϡ Solid 5ĂᏴϡ e-typeĂ
࠹ᙯ̝Մफ़ّኳтܑ˘Ąͽ ANSYS ѣࢨ̮৵హវซ Җᐖၗሀᑢ̶ژĂᑅ̮І̝ໂ̼Ҝཉࠎz ͞ШĂ߉ΐ
ᑅВ20 ЄপĂซ҃Ր̷౷˥̝Ҝொត̼ณĂтဦ 5ă ဦ6 ̶Ҿࠎௐ˘ᄃௐ˟̷౷˥̝ҜொᇦޘဦĄ
ͽ˯̷౷˥̝Ҝொត̼ณ̶Ҿߏ 5.25µm 8.05µmĂ۰۞ᇴፂӮߏͽ 20 Єপ۞ᑅٙĄтܑ
αܑ̣ಶߏ̷౷˥۞ᑅᄃҜொณតܑ̼Ă҃ဦ 7ăဦ 8 ߏ̷౷˥۞ᑅᄃҜொณត̼ဦĄ̶ژඕ ڍពϯĂ୬Լត̷౷˥۞ҜொณĂੵ˞ᄃ߉ΐᑅѣᙯ
̝γĂΩγૄळӵ۞͞ё˵ᇆᜩ̷౷˥۞ҜொณĂ҃ౄ
јѩன෪۞ࣧЯᄃૄळӵᑅͯ۞ࢬ᎕̂̈ѣᙯĂӵ
5.25 (10−6m)
ဦ 5! ௐ˘̷౷˥ᇦޘဦ
8.05 (10−6m)
ဦ 6! ௐ˟̷౷˥ᇦޘဦ
30 25 20 15 10 5 0
2 6 10 20 50 80 100 (Volt)
(µm)
ဦ 7! ௐ˘ሀݭᑅᄃҜொณត̼ဦ
50 40 30 20 10
0 2 6 10 20 50 80 100
(Volt) (µm)
ဦ 8! ௐ˟ሀݭᑅᄃҜொณត̼ဦ
ܑ̱! ̷౷˥̝ҋᐛதᄃٙ၆ᑕ̝ሀၗॎݭ Mode ҋᐛதĞHzğ ሀၗॎݭ
1 52507 Torsion 2 56286 Sway
3 62172 Bending
4 66295 Sway 5 68163 Torsion 6 69202 Sway
7 71678 Bending
8 76755 Bending
9 78004 Sway 10 81054 Torsion
ဦ 9! ̷౷˥̝Ҝொѡቢ
ဦ 10! ̷౷˥̝ሀၗဦ(mode 1)
ࢬ᎕ດ̂ĂҜொດ̈Ăࢋߏӵቑಛດ̂Ă၆ᑅͯ
யϠໂ̼ޢ۞តԛྈޘѣ˞Հ̂۞ࢨטĂЯѩഴ͌˞̷
౷˥۞ҜொณĄ
3. ᑅ̷౷˥̝፬ᒜᐛதሀᑢᄃ̶ژ
上節的部份提到，微切割刀欲真正達到工作目的，除 了必須考量位移大小外，另外一個必需考量的因素，就是 壓電激盪頻率的範圍，此段落就是要來探討激盪頻率對微 切割刀操作之影響。首先利用 ANSYS 有限̮৵హវ၆
̷౷˥(ဦ 3)үሀၗ̶ژĄϤٺА݈೩ז̷౷˥ࡶຐ྿ז
ৌϒ۞̍үϫ۞Ă֤ᆃ۞፬ᒜᐛதಶυื྿ז 50k~150 kHzĂЯѩĂд ANSYS ̶ژహវ̚Ăԧࣇଣҋᐛத۞
ဦ 11! ̷౷˥̝ሀၗဦ(mode 2)
ဦ 12! ̷౷˥̝ሀၗဦ(mode 3)
ဦ 13! ̷౷˥̝ሀၗဦ(mode 4)
ቑಛಶؠཌྷд50k~150kHzĂٙඕڍಶߏдቑಛ̰Ξਕ
ன۞ᇴ࣎ҋᐛதͽ̈́࠹၆ᑕ۞ሀၗॎݭĂ҃ᙝࠧ୧І ԧࣇಶనؠZ ͞Шؠ(̷౷˥Ъॡӵٺૄळ)Ą
གྷ࿅ ANSYS ̶ژޢĂซ҃זҋᐛதᄃሀၗॎ
ݭĄܑ̱ࠎ݈˩ҋᐛதᄃሀၗॎݭĂဦ10 Ҍဦ 14Ă ࠎ݈̣۞̷౷˥ሀၗဦĂ̂˯ពϯѣᝈѡăԮᖼă Όၦă̈́ᖘѡ̝ԛតĄ
ᑅ̷౷˥ࢋ˜Ӏϡᑅ̝ͯቭЪܼᇴd Ă፬31 ᒜඕၹ۞ᓂШВॎሀၗ(longitudinal resonant mode)Ă྿ז
̷౷۞ϫ۞Ăтဦ9 ٙϯĂϤဦ 10 Ҍဦ 14ĂΞۢд̙Т
۞ᐛத˭Ăඕၹវצזᑅͯ፬ᒜ҃யϠ̙Тॎજ۞ݭ
ဦ 14! ̷౷˥̝ሀၗဦ(mode 5)
20 18 16 14 12 10 8 6 4 2 0
VALG
0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 5 Time
ဦ 15! ՎลᏮˢᑅᄃॡมᙯܼဦ
?
0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 5 Time
VALG
1.2 3 4 0 -4 -6 -1,2 -1.6 -2 -2.4 -2.5
ဦ 16! ᇶၗᜩᑕᏮপّဦ
ၗĂ̚ဦ10 ̈́ဦ 14 ࠎԮᖼ(Torsion mode)ٽౄјඕၹԮ ѡᕝෘĂᑕᔖฟѩ̍үᐛதĄ
4. ᑅ̷౷˥̝ᇶၗ̝ሀᑢᄃ̶ژ
ࢵАώ༼˜͔ϡ˯༼ٙޙϲ۞ᑅ̷౷˥ሀݭٺ ANSYS ̚ซҖᇶၗᜩᑕ̶ژĂͽ˘ՎลᑅүࠎᏮˢĂт ဦ15 ٙϯĂд 0.5 ࡋॡᏮˢᑅࠎ 20 ЄপĂ1 ࡋޢᑅࣃ ࠎĂ̶ژඕڍтဦ16Ăဦ 16 ࠎ̷౷˥ٺ 20 Єপ̝Վ ลᑅᏮˢࣃ˭Ă0~5 ࡋม۞ᇶၗᜩᑕĂ҃ဦ̚۞ॎ಼̂
̈ࠎ˥ዡыბҜཉٙീĂ҃Ϥᇶၗᜩᑕ̶ژဦ̚ԧࣇΞͽ ޝ۞࠻זĂ༊̷౷˥д0.5 ࡋᏮˢ 20 ЄপᑅॡĂ
̷౷˥ϲӈயϠᐛॎજĂ҃д1 ࡋޢઃͤᏮˢᑅĂ
̷౷˥ӔனҋϤॎજٺࡗ2.5 ࡋޢઃͤॎજĄ
αăඕ! ኢ
Яࠎѝഇڱᅅٽгᒔٕщ྅ᑅ̈́ඕၹ̝ѣࢨ ኑЪ̮৵ĂЯѩਕ၆ᑅ̮ІઇኑЪಞ̶ژ̙टٽĂܕֽ
થຽ̼ѣࢨ̮৵హវ೩ֻ၆ᑅඕၹซҖᐖၗăሀၗඈ
̶ژ̝ਕ˧ĂΞߏ̪̚ᅮࢋޝк̙ᕝ۞ဘྏĄώࡁտͽ
ۣࠎૄՄ̈́ᑅ̮ІࠎᜭજጡٙЪ۞̷౷˥үࠎࡁտ ၆෪ĂӀϡ FEM ၆ᑅ̷౷˥үሀᑢ̶ژĂ֭ଂॎજ Ҝொ፬ᒜᐛத۞៍ᕇֽүሀᑢĂ༊̷౷˥צז˘ᐛ தҲᑅॡĂົயϠ̈Ҝொ۞ᐛॎજĂซ҃୬̷
౷ۏ̷౷Ąᒔ˭ЕඕኢĈ
1. ߉ΐ̙Т۞ᑅΞ̷ֹ౷˥யϠ̙Т۞ҜொĂ҃
࠹Тᑅă߉ΐٺᙝࠧ୧І̙Т۞୧І̷̝౷˥˭Ă
ٙயϠ۞Ҝொ˵̙ТĄЯѩĂֹϡ۰Ξֶҋ̎۞ᅮՐĂ አፋᑅٕአፋૄळ۞ӵҜཉֽ྿זٙࢋ۞Ҝொჟ ޘĄӀϡሀၗ̶ژΞ˞ྋд̙Т፬ᒜᐛத̈́ͽૄळӵ
ొҜүࠎᙝࠧ୧І̝˭۞ᑅ̷౷˥̝၆ᑕ۞ሀၗ
ॎݭ̈́ҜொĂ̙҃Т፬ᐽᐛதٙ၆ᑕ۞ሀၗॎݭౌѣЧ ҋ̙Т۞ݭёĄ
2. Ӏϡѩᑅ̶ژ͞ڱΞྻϡٺඕၹրనࢍ
˯ĂА၁ᅫ۞ሀݭүሀᑢ̶ژĂͽ͞ܮ͟ޢ۞࣒ϔ́
ԼචĂтѩܮΞͽ༼࠷็ྏᄱڱٙ۞ॡมĂЯ ѩĂCAD/CAE តՀሀݭ̈́నࢍ˯ߊ࠷ॡ˫ѣड़தĄԧ ࣇԓ୕ਕѩඕڍ೩ֻጯ۰ᄃຽࠧүણ҂ٕᑕϡ˷
࠹ᙯயݡ˯Ą
ᄫ! ᔁ
ຏᔁ઼ࡊົࢍထ NSC92-2212-E-020-007 ೩ֻొЊགྷ
͚೯Ą
ણ҂͛ᚥ
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2. Chen, C. Q., Wang, X. M., and Shen, Y. P., “Finite Element Approach of Vibration Control Using Self- Sensing Piezoelectric Actuators,” Composite & Structures Vol. 60, No. 3, pp. 505-512 (1996).
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337-344 (2003).
7. ӓᇇăᗞ࣫ăᖡԠౘܫරĂĶӀϡ FEM ˷ᑅ
જጡ̝ᇶၗ̶ژķĂௐ̣بБ઼፟ၹᄃ፟ጡనࢍጯ ఙࡁົĂ઼ϲฯᑕϡࡊԫ̂ጯĂέ៉(2002)Ą 8. ӓᇇăԠ̥ĂĶᑕϡѣࢨ̮৵ڱٺᑅᜭજαా
፟ၹᇶၗ̶ژķĂБ઼˧ጯົᛉĂέ៉(2002)Ą 9. Lee, S., and Chung, J., “Micro Fluid Device Using Thick
Layer Piezo Actuator Prepared on Si Micro-machined Structure,” Proceeding of the 2001 IEEE International Conference on Robotics & Automation, Seoul, Korea, pp.
616-619 (2001).
10. Lal, A., and White, R. M., “Micromachined Silicon Needle for Ultrasonic Surgery,” IEEE Ultrasonics Symposium, pp. 1593-1596 (1995).
11. Lal, A., and White, R. M., “Silicon Micromachined Ultrasonic Micro-Cutter,” IEEE Ultrasonics Symposium, pp. 1907-1911 (1995).
12. Arai, F., and Amano, T., “Microknife Using Ultrasonic Vibration,” International Symposium on Micromecha- tronics and Human Science, pp. 195-200 (2000).
13. Haddab, Y., and Chaillet, N., “A Microgripper Using Smart Piezoelectric Actuators,” Proceeding of the 2000 IEEE/RSJ International Conference on Robots and Systems, Takamatsu, Japan, pp. 659-664 (2000).
2003 ѐ 06 ͡ 05 ͟! ќቇ 2003 ѐ 11 ͡ 01 ͟! ܐᆶ 2003 ѐ 12 ͡ 04 ͟! ኑᆶ 2003 ѐ 12 ͡ 16 ͟! ତצ
