J-
2.
xili
TABLE OF CONTENTS
FOREWORD... v INTRODUCfiON . . . . 1
"Applications of Bulk and Thin-film Diamonds"
Michael Seal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3
"Studies and Development of Diamond Films and Related Materials in the USSR"
Vladimir A. Laptev . . . . . . . . . . . . . . . . . . . . . . . . . 9
"Diamond CVD Researches as Patent Applied"
Satoru Hosomi and Isao Yoshida . . . . . . . . . . . . . . . . . . . . . 15
"A Chemical Perspective on the Nucleation and Growth of Diamond from Hydrocarbons"
Walter A Yarbrough . . . . . . . . . . . . . . . . . . . . . . . . . . . . 25 DIAMOND CUTTING TOOLS . . . . 35 ''Tool Application of Diamond and CBN"
S. Yazu and T. Nakai . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
"Properties and Performance of Diamond Coated Ceramic Cutting Tools"
S. Soderberg, K. Westergren, I. Reineck, P.-E. Ekholm, and
H. Shahani . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 43
"Cutting Tool Performance of CVD Thick Film Diamond"
Rob A Hay and C.D. Dean . . . . . . . . . . . . . . . . . . . . . . . . . 53 ''Diamond Coated Inserts: Characteristics and Performance"
Noribumi Kikuchi, Hiroyuki Eta, Toshihiko Okamura,
and Hironori Yoshimura . . . . . . . . . . . . . . . . . . . . . . . . . . . 61 ''The Tool Life of Diamond Coatings in Milling on Al-Si Alloy"
K. Saijo, K. Uno, M. Yagi, K. Shibuki, and S. Takatsu . . . . . . . . . . . . . . 69
"Diamond Coated Cutting Tools Synthesized from CO"
T. Ito et al. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 77
"Characterization of CVD Diamond Grinding Powder"
M. Yoshikawa . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 85
xiv
"Determination of Thickness in Diamond Film Used for Brazed Cutting Inserts"
M. Murakawa and S. Takeuchi . . . . . . . . . . . . . . . . . . . . . . . . . . . . 93
"Effect of Wear Flat Configurations on the Temperature Distribution in Polycrystalline Diamond Compact Cutters During Orthogonal Rock Cutting"
V. Prakash . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 99
"Industrial Application and Quality Control of Crystalline Diamond Coated Tools"
T. Leyendecker, 0. Lemmer, A Jurgens, S. Esser,
and J. Ebberink . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 105
3. MECHANICAL PROPERTIES AND APPLICATIONS OF DIAMOND 111
4.
"Mechanical Properties of Diamond and Diamond-Like Films"
Carl J. McHargue . . . . . . . . . . . . . . . . . . . . . . . . . . . 113
"In-situ Measuring of Stress Development in Diamond Thin Films"
L. Schafer, X. Jiang, and C.-P. Klages . . . . . . . . . . . . . . . . . . . . . 121 ''The Preparation of Diamond-coated a-SiC Pins for Standardized
SEM Tribometry of Diamond-coated Substrates"
Michael N. Gardos, Bruce W. Buller, and J. Michael Pinneo . . . . . . . . . 129
"An Investigation of Diamond Growth on Ferrous Metals"
H. Chen, M.L. Nielsen, C.J. Gold, R.O. Dillon, J. DiGregorio,
and T. Furtak . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 137
"Adhesion of Metallic Films to Diamond and cBN in the Region of its Thermodynamic Stability"
A.V. Andreyev... 143
"Residual Stress in CVD Diamond Films"
H. Guo and M. Alam . . . . . . . . . . . . . . . . . . . . . . . . . . . 149 DIAMOND OPTICS . . . .
"Polycrystalline Diamond for Infrared Optical Applications Prepared by the Microwave Plasma and Hot Filament Chemical Vapor Deposition Techniques"
155
C. Willingham, T. Hartnett, C. Robinson, and C. Klein . . . . . . . . . . . 157
"CVD Diamond Coatings for the Infrared by Optical Brazing"
W.D. Partlow, R.E. Witkowski, and J.P. McHugh . . . . . . . . . . . . . . 163
5.
''High Density Amorphous Carbon Films and the Preparation of Diamond Membranes for X-Ray Lithography''
XV
Jerome J. Cuomo, J.P. Doyle, David L. Pappas, Katherine L. Saenger,
C.R. Guarnieri, and S.J. Whitehair . . . 169
"Critical Assessment of Optical Properties of CVD Diamond Films"
A. Feldman and L.H. Robins . . . 181
"High Quality Flame Deposited Diamond Films for Infrared Optical Windows"
Y. Tzeng and R. Phillips . . . 189
"Polycrystalline Diamond Films for Optical Applications"
C. Wild, W. Muller-Sebert, T. Eckermann, and P. Koidl . . . 197 'Transparent Diamond Film Deposited by Optimized DC Arc
Plasma Jet"
Li Rongzhi, Shi Hailiang, Yan Zhen, Tang Sen, and Zhu Hesun . . . 207
"Preparation and Characterization of Optically High Quality Diamond Film"
Qi Lichang, Pu Xin, Yang Peichun, Xuan Zhenwu, Liu Erkai,
and Hou Li . . . 213
"Liquid Jet Impact Measurements in Diamond Coated Ge Substrates"
M. Thomas, D. Price, M. Wilson, I. Perez, J.B. Boodey, W.R. Scott,
R. Monro, and A.B. Harker . . . 217 POLISHING OF DIAMOND FILMS . . . .
"Reactive Polishing of Polycrystalline Diamond and Measured Spectroscopic Properties"
221
Alan B. Harker . . . 223
"Smoothing of Diamond Films by Ion Beam Irradiation"
Atsushi Hirata, Hitoshi Tokura, and Masanori Yoshikawa . . . 227
"Anti-Reflection/Anti-Oxidation Coatings and Polishing Results for PECVD Diamond Optics"
Mark B. Moran, Karl A. Klemm, and Linda F. Johnson . . . 233
"Polishing of CVD Diamond Film"
H. Tokura and M. Yoshikawa . . . 241
xvi
6.
7.
''Light-induced Polishing of Diamond Films"
Vladimir N. Tokarev, Vitaly I. Konov . . . 249 TlffiRMAL MANAGEMENT . . . .
"Application of Synthetic Diamond Substrates for Thermal Management of High Performance Electronic
257
Multi-Chip Modules"
R.C. Eden . . . 259
"Critical Properties of CVD Diamond Films for Heat Sink and Thermal Radiator Applications"
S. Holly . . . 267 ''Electronic Circuits on Diamond Substrates"
Paul Lux and Kent Roberts . . . 269 'Thermal Conductivity Measurement Using the Converging
Thermal Wave Technique"
Grant Lu . . . 273
"A Study of Diamond Laminated Surfaces in Evaporative Spray Cooling"
M.S. Sehmbey, M.R. Pais, and L.C. Chow . . . 275 'Thermal Conductivity and Optical Transmission of CVD
Diamond"
K.J. Gray . . . 283 DIAMOND ELECTRONICS . . . . 285
"Novel Electron Devices Based on the Unique Properties of Diamond"
M.N. Yoder . . . 287
"Fabrication and Properties of Diamond Devices"
Y. Nishibayashi, H. Shiomi, and N. Fujimori . . . 295
"A Review of the Electrical Characteristics of Metal Contacts on Diamond"
K. Das, V. Venkatesan, K. Miyata, D.L. Dreifus, and J.T. Glass
"Diamond Cold Cathodes"
M.W. Geis, N.N. Efremow, J.D. Woodhouse, and M.D. McAleese
301
309
8.
xvii
'Thin Film Diamond Microstructure Applications"
T. Roppel, C. Ellis, R. Ramesham, D. Jaworske, M.E. Baginski,
and S.Y. Lee . . . . . . . . . . . . . . . . . . . . . . . . . 311
"Applications of Diamond-like Carbon Films to Electronic Components"
H. Kurokawa, H. Nakaue, T. Mitani, and T. Yonezawa . . . . . . . . . . 319
"Ion Beams and Diamond: Modification, Doping, Growth and Simple Devices"
Johan F. Prins . . . . . . . . . . . . . . . . . . . . . . . . 327
"Electrical and Electronic Properties of Diamond Films"
R.E. Harper, C. Johnston, P. Chalker, D. Totterdell, I.M. Buckley-Golder, and K. Kobashi . . . . . . . . . . . . . . . . . . . . . . 335 'Temperature Dependent Photoconductivity Measurements on
Type Ila Diamonds and Polycrystalline Diamond Films"
L.S. Pan, D.R. Kania, P. Pianetta, O.L. Landen, and M. Landstrass . . . . 341
"A Thin Film Schottky Diode Fabricated from Flame Grown Diamond"
J.W. G!esener, A.A. Morrish, and K.A. Snail . . . . . . . . . . . . . . . . 347
"Characterization of Titanium Silicide Contacts Deposited on Semiconducting Diamond Substrates"
T.P. Humphreys, Hyeongtag Jeon, J.V. LaBrasca, K.F. Turner,
R.J. Nemanich, K. Das, and J.B. Posthill . . . . . . . . . . . . . . . . . 353
"Interface Reactions of Titanium on Single Crystal and Thin Film Diamond Analyzed by UV Photoemission Spectroscopy"
J. VanderWeide and R.J. Nemanich . . . . . . . . . . . . . . . . . 359
"Diamond Films for Thermionic Applications"
Richard L.C. Wu, Alan Garscadden, and Patrick Kee
"CVD Diamond Coated Cylinders for Advanced Thermionic Fuel Element"
365
S.F. Adams and M.l. Landstrass . . . . . . . . . . . . . . . . . 371
DIAMOND NUCLEATION AND SELECTIVE DEPOSITION 377
"Effect of Substrate Materials on CVD Diamond Growth"
F. Akatsuka and F. Shimura . . . . . . . . . . . . . . . . . . 379
xviii
"Influence of Substrate Topography on the Nucleation of Diamond Thin Films"
Paul A Denning and David A Stevenson . . . . . . . . . . . . . . . . . . . . . 383
"Metastable Surface Recrystallization of Diamond from the Liquid Phase: Substrate Effects"
Kuruvilla A Cherian . . . . . . . . . . . . . . . . . . . . . . . . . . . . 389
"Enhancement of Diamond Nucleation by Graphite Fibers Local to Substrate Surfaces in H2 - CH4 rf Discharges"
R.A. Rudder, G.C. Hudson, R.C. Hendry, R.E. Thomas, J.B. Posthill,
and R.J. Markunas . . . . . . . . . . . . . . . . . . . . . . . . . . . 395
"Nucleation Behavior of Hot Filament CVD Diamond"
Jeoung-Woo Kim, Young-Joon Baik, and Kwang Yong Eun
"Nucleation of Diamond onto Silicon by Low Pressure Plasma-CVD"
399
S. Hag, J.A. Savage, and D.L. Tunnicliffe . . . . . . . . . . . . . . . . . . . . 405
"Selective Growth, Characterization, and Microstructure Fabrication of Undoped and Doped Polycrystalline Diamond Thin Films"
R. Ramesham, C. Ellis, and T. Roppel . . . . . . . . . . . . . . . . . . . . . . 411
"Laser-assisted Selective Area Deposition of Diamond Films"
N.J. Chapliev, V.l, Konov, S.M. Pimenov, A.M. Prokhorov, and
A.A. Smolin . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 417
"Electrophoretic Deposition of Colloidal Diamond for Selective CVD Growth of Diamond Films"
J.L. Valdes, J.W. Mitchell, J.A. Mucha, L. Seibles, and H. Huggins 423
9. HIGH-RATE AND LARGE-AREA DIAMOND Ffi.M PRODUCTION 429
"Growth Process of Diamond Film by Arc Discharge Plasma Jet CVD"
N. Ohtake, M. Yoshikawa, K. Suzuki, and S. Takeuchi . . . . . . . . . . . . . 431
"Synthesis of Large-area Diamond Films by a Low Pressure DC Plasma Jet"
R.L. Woodin, L.K. Bigelow, and G.L. Cann . . . . . . . . . . . . . . . . . . . . . 439
"A New Class of CVD Diamond Composite Materials for Cost-Sensitive, Large-area Applications"
J. Michael Pinneo . . . . . . . . . . . . . . . . . . . . . . . 445
10.
xix
"Upscaling of the Hot-filament CVD Process for Deposition of Diamond Films on Large-area Substrates"
L. Schafer, M. Sattler, and C.-P. Klages . . . . . . . . . . . . . . . 453
"Formation of Functionally Gradient Diamond Films"
Kazuaki Kurihara, Ken-ichi Sasaki, Motonobu Kawarada, and
Yasuyuki Goto . . . . . . . . . . . . . . . . . . . . 461 DIAMOND GROWIH ... . 467
"Fabrication Process of Diamond Materials by HTHP Methods"
0. Fukunaga . . . . . . . . . . . . . . . . . . . . . . . . 469
"Combustion Flame Diamond Coating Method (Hirose Method); from its Birth to the Present
Yoich Hirose . . . . . . . . . . . . . . . . . . . . . . . 471
"Selected Nucleation Epitaxy (SENTAXY) and State-of-the-Art and Future Scope of Diamond Active Devices
Akio Hiraki . . . . . . . . . . . . . . . . . . . . . . . . 473 'The State-of-the-art in Studies of Diamond Synthesis from the
Gaseous Phase and Some Unsolved Problems"
B.V. Spitsyn . . . . . . . . . . . . . . . . . . . . . . . 475
"Effects of Multiple Filament Geometry in the Hot Filament Deposition of Diamond Films"
E.N. Farabaugh, A Feldman, and L.H. Robins . . . . . . . . . . . 483
"Growth Mechanisms of CVD Diamond Films Determined by a Novel TEM Technique"
Z.L. Wang, J. Bentley, R.E. Clausing, L. Heatherly, and L.L. Horton 489
"Heteroepitaxy of Carbon on Copper by High Temperature Ion Implantation"
S.-T. Lee, S. Chen, G. Braunstein, X. Feng, I. Bello, and W.M. Lau . . . 495
"Diamond Film Deposition Using Microwave Plasmas under Low Pressures"
Y.H. Shing, F.S. Pool, and D.H. Rich . . . . . . . . . . . . . . . . . . . . 497 'The Growth of Diamond Film by Flat Flame Combustion Method"
Franklin Chau-Nan Hong, Hon-Ming Chang, Jing-Chuang Hsieh,
Gou-Tsau Liang, and Dawson Chang . . . . . . . . . . . . . . . . . . . . . . 503
XX
11.
"Heat Transfers for Diamond Deposition Controlling"
A. Gicquel, C. Heau, E. Anger, D. Fabre, F. Cansell,
and J.P. Petitet . . . 509 ''The Influence of Surface Roughness and Grain Size on
ARC Jet Diamond Applications"
P.D. Goldman and A.G. Johnson . . . 515
"Growth Shape of Diamond in C-H-0 System"
Young-Joan Baik and Kwang Yong Eun... 521 ''The Orientation of Diamond Crystal Face Synthesized by
the Combustion Flame Method"
S.J. Choi and Y.S. Shin . . . 527
"Research of the Growth and Nucleation Mechanisms of Diamond Films by Optical Emission Spectra and Raman Spectra"
Fangqing Zhang, Yafei Zhang, Yinghu Yang, Wenjun Zhang,
Guanghua Chen, and Xiangliu Jiang . . . 533
"Synthesis of Diamond Films by Using Hot Filament CVD with Acetone Hydrogen Mixture"
Zheng Zhihao and Xiang Jinzhong . . . 537
"Influence of Gas Phase Parameters on the Deposition Kinetics and Morphology of Thin Diamond Films"
R. Beckmann, W. Kulisch, H.J. Frenck, and R. Kassing . . . 543
"Monitoring of Crystal Defects in Natural Diamond"
Guo Qizhi and Bi Yongjun . . . 549
"CVD Diamond Growth with Hot Filament Processes"
Shu-Cheng Yu and Fon-Shu Guo . . . 555 ''Diamond Deposition by Hot Filament and Microwave CVD: Influence of Deposition Parameters on Phase Purity, Surface Roughness
and Film Quality"
P. Joeris, C. Benndort, S. Bohr . . . 561 HALOGEN ASSISTED DIAMOND GROWTH . . . . 567 ''Thermochemical Vapor Deposition of Diamond in a Carbon-
Halogen-Oxygen and/or Sulfur Atmospheric Hot Wall Reactor"
D.E. Patterson, C.J. Chu, B.J. Bai, N.J. Komplin, R.H. Hauge,
and J.L. Margrave . . . 569
12.
13.
14.
xxi
'The Growth of Diamond Film by Halogenated Methane"
Franklin Chau-Nan Hong, Gou-Tsau Liang, Dawson Chang, and
Su-Jen Yu . . . . . . . . . . . . . . . . . . . . . . . . . . . 577
"Dense Nucleation of Polycrystalline Diamond Films Using CF4 - H2 Low Pressure rf Discharges"
R.A. Rudder, G.C. Hudson, D.P. Malta, J.B. Posthill, R.E. Thomas,
and R.J. Markunas . . . . . . . . . . . . . . . . . . . . . . 583 MODELING AND STANDARDS . . . .
"Computer Modelling of a Hot Filament Diamond Deposition Reactor"
589
Maria A Kuczmarski, Paul A Washlock, and John C. Angus . . . . . . . . 591
"Model for the Hydrogen Atom Flux Developed in a Microwave Plasma Jet Under Diamond Synthesis Conditions"
Steven M. Gasworth . . . . . . . . . . . . . . . . . . . 597
"Requirements of a Standard for the Chemical Characterization of CVD Diamond by Raman Spectroscopy"
E.S. Etz . . . . . . . . . . . . . . . . . . . . . . . . . . . 603
"Diffusion Coefficient of Electrons in Diamond"
M.A. Osman, M. Imam, and N. Nintunze . . . . . . . . . . . . . . . 611
"Monte-Carlo Simulation of Electron Properties in a Magnetized Microwave Discharge"
S.C. Kuo and E.E. Kunhardt . . . . . . . . . . . . . . . . . . . . 615 ECONOMIC ANALYSIS OF DIAMOND TECHNOLOGY ... .
"Economic Assessment of HPHT Diamond Synthesis Technology"
J.Y. Busch, J.P. Dismukes, N.Y. Nallicheri, and
621
K.R. Walton . . . . . . . . . . . . . . . . . . . . . . . . . . . 623
"Economic Assessment of CVD Diamond Synthesis Technologies"
J.P. Dismukes, J.Y. Busch, N.Y. Nallicheri, and K.R. Walton . . . . . . 635 CUBIC BORON NITRIDE (cBN) TECHNOLOGY AND
APPLICATIONS . . . . 645
"Growth and Polar Properties of Cubic Boron Nitride"
0. Mishima . . . . . . . . . . . . . . . . . . . . . . . . . . . . 647
"Characterizations of Pulsed Laser Deposited Boron Nitride Films"
G.L. Doll, J.A. Sell, C.A. Taylor II, and R. Clarke . . . . . . . . . . . . 653
xxii
15.
"A Deposition Method of c-BN Film and Potential Applications"
M. Murakawa and S. Watanabe . . . . . . . . . . . . . . . . . . . . . . . . . . 661
"A Tnbological Study on Cubic Boron Nitride Film"
S. Miyake, S. Watanabe, M. Murakawa, R. Kaneko, and T. Miyamoto 669
"Wear Resistant Boron Nitride Base Coatings"
G.A. Mrotchek and B.A. Eizner . . . . . . . . . . . . . . . . . . . . . . . . . 675 PROTECTIVE COATINGS AND TRffiOLOGICAL APPLICATIONS
OF DIAMOND-LIKE CARBON (DLC) FILMS . . . . 681
"Applications of Diamond-Like Carbon in Computer Technology"
A. Grill, V. Patel, and B.S. Meyerson . . . . . . . . . . . . . . . . . . . . . . 683
"Micro-tnbological Properties and Applications of Super-hard and Lubricating Coatings"
S. Miyake and R. Kaneko . . . . . . . . . . . . . . . . . . . . . 691 ''Tribological Studies of Amorphous Hydrogenated Carbon Films
in a Vacuum, Spacelike Environment"
Kazuhisa Miyoshi . . . . . . . . . . . . . . . . . . . . . . . . . . . 699
"Application of DLC Films to Optical Windows and Tools"
Alan H. Lettington . . . . . . . . . . . . . . . . . . . . . . . . . . . 703
"Application of Glow-discharge Plasma Deposited Diamond Like Film on Prosthetic Artificial Heart Valves"
Chang-qiong Zheng, Jun-guo Ran, Guang-fu Yin,
Wenhua Lei, and Wen Lei . . . . . . . . . . . . . . . . . . . . . . 711
16. MECHANICAL PROPERTIES AND APPLICATIONS OF DLC FILMS 717
"An Application of DLC Film to Knife for Cutting Piled Aluminum Thin Sheets"
M. Murakawa, N. Koga, S. Watanabe, and S. Miyake . . . . . . . . . . . 719
"Application of DLC Film as Protective Coating of Metallic Film Tape"
Cao Weimin, Zhou Kunlin, Zhou Ruihua, Zhang Jiren, and
Zhang Pingyu . . . . . . . . . . . . . . . . . . . . . . . . . 725
"Diamondlike Thin Films as Protective Layers"
T. lvanova, D. Latev, D. Parvanova, and D. Dimitrov 731
17.
18.
''Plasma Deposited Carbon Films as a Possible Means for Divertor Repair"
xxiii
J.J. Beulens, A.J.M. Buuron, P. Groot, J. Bakker, and D.C. Schram . . . 737
"Adhesion and Mechanical Properties of Amorphic Diamond Films Prepared by a Laser Plasma Discharge Source"
F. Davanloo, T.J. Lee, D.R. Jander, J.H. You, H. Park, P.O. Stevens,
and C.B. Collins . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 743
"Mechanical Characterization of Laser Plasma Diamond Prepared Without Hydrogen"
A.M. Jones, C.J. Bedell, G. Dearnaley, C.B. Collins, and F. Davanloo . . 749 DLC AND SiC ELECfRONICS . . . .
"MIS Photosensor with a Thin Diamond-like Carbon Film as the Insulating Layer"
755
P.I. Perov, V.I. Polyakov, O.N. Ermakova, M.G. Ermakov,
V.M. Elinson, and V.V. Sleptsov . . . . . . . . . . . . . . . . . . . 757
"Characteristics of a Reversible Memory Elements using a Diamond-like Carbon Film as the Storing Medium"
M.G. Ermakov, V.I. Polyakov, O.N. Ermakova, P.I. Perov,
V.M. Elinson, and V.V. Sleptsov . . . . . . . . . . . . . . . . . 761
"Electric and Photoelectric Characteristics of MQW Structures Based on Diamond-like Carbon Films"
V.I. Polyakov, M.G. Ermakov, O.N. Ermakova, P.I. Perov,
V.V. Sleptsov, and V.M. Elinson . . . . . . . . . . . . . . . . . . . . . . . 765
"Silicon Carbide Devices for Active Electronics and Optoelectronics"
V.A. Dmitriev, P.A. Ivanov, Ya.V. Morozenko, V.E. Chelnokov,
and A.E. Cherenkov . . . . . . . . . . . . . . . . . . . . . . . . . 769 DLCOPTICS . . . .
"Study of a-C:H Material as Protective Coating for C0
2 Laser Copper Mirrors"
775
S. Scaglione, L. Caneve, and G. Salvetti . . . . . . . . . . . . . . 777
"Magnetron Sputtered DLC Coatings for KCI Optics for High Power Industrial C02 Laser"
F.X. Lu, B.X. Yang, D.G. Chen, R.Z. Ye, W.X. Yu, and J.B. Sun . . . . . 783
"Applications of Diamond-like Carbon Films to Optical Wi~dows"
Fangqing Zhang, Yafei Zhang, and Guanghua Chen . . . . . . . . . . . . . . . 791
xxiv
19.
"Antireflection, Hard Carbon Coatings for IR Optics"
S. Mitura, A Sokolowska, J. Szmidt, and A Balasinski 0 • • • • • • • • 0 • • •
"Laser Induced Graphitization of Diamond-like Carbon Films:
Applications to Optical Storage"
795
V.Yu. Armeyev, A.H. Arslanbekov, N.l. Chapliev, V.l, Konov,
V.G. Ralchenko, and V.E. Strelnitsky . . . 799
"Luminescence in Diamond-like Carbon Thin Films"
D. Das-Gupta . . . 805
"Optical Properties and Structure of an Annealed Hydrogenated Amorphous Silicon-carbon Alloy Film"
Deeppak Kumar Basa . . . 811 DLC DEPOSITION TECHNOLOGY . . . .
"Preparation and Properties of Amorphous Carbon and Hydrocarbon Films"
817
F. Richter, K. Bewilogua, H. Kupfer, I. Muhling, B. Rau, B. Rother,
and D. Schumacher . . . 819
"Large Area Deposition of Diamond-like Carbon by Ion-beam Decomposition of Polyphenyl Ether"
C.J. Bedell, A.M. Jones, and G. Dearnaley . . . 827
"Diamond-like Carbon from the Ion-beam Decomposition of Polyphenyl Ether"
C.J. Bedell, A.M. Jones, G. Dearnaley, and C. Johnston . . . 833 ''The a-C:H Films Deposited by PECVD Method"
Yuliang He, Shulin Gu, Zhichao Wang, and Hong Liu 0 • • • • 0 • • • • • • • 839
"Hard Carbon Coatings by the Pulsed Arc-Discharge Method"
J. Koskinen, A Anttila, and J.-P. Hirvonen . . . 845
"Plasma Deposition and Etching of Diamond-like Carbon Films"
J. Seth, R. Padiyath, and S.V. Babu . . . 851
"Laser Detonation DLC Films"
Stephen L. Thaler . . . 857
"Super-Hard Diamond-Like Carbon Prepared by New Ionized Method"
Osamu Nakamura and Akio Hirayama . . . 863
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