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The study of microstructure process using hot embossing 郭?彰、吳政憲

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The study of microstructure process using hot embossing 郭?彰、吳政憲

E-mail: [email protected]

ABSTRACT

In recent years, plastics have begun to show great commercial potential especially in manufacturing microstructured parts. Injection molding and hot embossing are two major microfabrication methods. Replication accuracy was investigated for these two methods.

Polymethyl methacrylate (PMMA) was used as the polymer substrate. The mold insert (or master) was fabricated by LIGA-type method. Hot embossing was found to have better replication accuracy for microstructure than injection molding does. This research describes the application of hot embossing to produce parts with microstructure. An embossing machine, designed for

microfabrication, was used to emboss PMMA substrate. Injection molding was also applied for comparison. Both the injection molded part and the hot embossed part were observed under microscope to compare the replication accuracy. During the

production process, it is imperative to found out one set of appropriate processing parameters for the hot embossing so as to obtain better product quality. In the conventional parameter adjustment, most of them are adjusted by try and error method that has usually wasted lots of time and cost. Therefore, it is necessary to develop a wisest method (ex: Taguchi's quality method).

Keywords : injection molding、hot embossing、microstructure

Table of Contents

封面內頁 簽名頁 授權書... iii 中文摘要... v 英文摘 要... vi 誌謝... vii 目

錄... viii 圖目錄... xi 表目

錄... xv 第一章 序論 1.1 前言... 1 1.2 本文目 標... 2 第二章 文獻回顧 2.1 熱壓成型的發展... 7 2.1.1 國外相 關文獻... 7 2.1.2 國內相關文獻... 10 2.2 文獻總

結... 14 第三章 研究方法與步驟 3.1 微熱壓機與微射出機... 16 3.1.1 微熱壓機... 16 3.1.2 微射出機... 18 3.2 塑膠材

料... 19 3.2.1 壓克力(PMMA) ... 19 3.3 實驗模具和模仁的製作方 法... 20 3.3.1 微熱壓模具設計... 20 3.3.2 微射出模具設

計... 21 3.3.3 LIGA製程與LIGA-like製程簡介... 21 3.3.4 矽模仁的製作方法與步 驟... 23 3.3.5 鎳模仁的製作方法與步驟... 26 3.4 微熱壓成型與微射出成型製 程... 28 3.4.1 微熱壓成型製程... 28 3.4.2 微射出成型製

程... 29 3.5 田口實驗規劃... 30 3.6 成品量

測... 34 3.6.1 微結構表面輪廓量測... 35 3.6.2 微結構外形觀 察... 35 3.6.3 應力分佈觀察... 35 3.6.4 接觸式位移

計... 36 第四章 實驗結果與討論 4.1 熱壓轉印性... 59 4.2 原始製 程參數設計之成型性研究... 59 4.2.1 OM觀察結果... 59 4.2.2α- step量測結 果... 60 4.3 田口實驗分析... 61 4.3.1 微熱壓成型田口實驗分

析... 61 4.3.2 微射出成型田口實驗分析... 62 4.4 最佳製程參數設計之成型性研 究... 63 4.4.1 OM觀察結果... 63 4.4.2 SEM觀察結

果... 63 4.4.3α- step量測結果... 63 4.5 微熱壓過程曲線分 佈... 64 4.6 應力分佈... 65 第五章 結論 5.1 成型性研究方 面... 99 5.2 最佳化參數設計方面... 99 5.2.1 微熱壓實 驗... 99 5.2.2 微射出實驗... 100 5.3 應力分

佈... 100 5.4 未來展望... 101 參考文 獻... 102

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參考文獻

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