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固態晶體Nd:YAG雷射結晶之複晶矽薄膜電晶體結晶機制分析與載子傳輸模型建立

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(1)國立交通大學 光電工程學系 顯示科技研究所 碩 士 論 文. 固態晶體 Nd:YAG 雷射結晶之複晶矽薄膜電 晶體結晶機制分析與載子傳輸模型建立 The Crystallization Mechanism and the Mobility Model of Poly-Si TFTs annealed by Solid-State Nd:YAG Laser. 研 究 生:黃章祐 指導教授:冉曉雯 博士 中華民國 九十五年六月.

(2) 固態晶體 Nd:YAG 雷射結晶之複晶矽薄膜電晶體 結晶機制分析與載子傳輸模型建立 The Crystallization Mechanism and the Mobility Model of Poly-Si TFTs annealed by Solid-State Nd:YAG Laser 研 究 生:黃章祐. Student:Chang-Yu Huang. 指導教授:冉曉雯 博士. Advisor:Dr. Hsiao-Wen Zan. 國 立 交 通 大 學 光電工程學系. 顯示科技研究所. 碩 士 論 文. A Thesis Submitted to Department of Photonics Institute of Display College of Electrical Engineering and Computer Science National Chiao Tung University in partial Fulfillment of the Requirements for the Degree of Master in Electro-Optical Engineering June 2006 Hsinchu, Taiwan, Republic of China. 中 華 民 國 九 十 五 年 六 月.

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