Research Express@NCKU - Articles Digest
Research Express@NCKU Volume 17 Issue 4 - February 18, 2011 [ http://research.ncku.edu.tw/re/articles/e/20110218/4.html ]
Nanoscale Fabrication and Characterization with Micro/Nano Probes
Weng-Sing Hwang,
a*In-Gann Chen,
aJyh-Ming Ting,
aLien-chung Hsu,
aTzong-Yow Tsai,
bChangshu Kuo
aDepartment of Materials Science and Engineeringa and Institute of Microelectronicsb, National Cheng Kung University, Tainan 701, TAIWAN
NCKU Landmark Project《R048》
T
his integrated research project was encouraged by the advantages of micro/nano thermal probes in the collaboration with the scanning probe lithography technique, which allowed the fabrications of metallic micro/nano scaled patterns and interconnects.In this technique, the in-situ and localized heating process were carried at the relatively high temperature, while the effective heating was confined in the desired domains. Main challenges in this research project are (1) the consistent fabrications of micro/nano scaled patterns and interconnects from the suspensions containing metallic
nanoparticles, and (2) the low-temperature processes allowing the cost-effective fabrications and more importantly the uses of plastic substrates in the so-called soft-electronic applications.
In this project, several metallic nanoparticle
suspensions, including gold, silver and copper, have been developed and formulated for the inkjet printing technique or the spinning coating process. Suspension concentrations and stabilities were particularly
investigated in order to achieve the reliable fabrications of patterning and interconnects. Thermal treatments that sintered the metallic nanoparticles were successfully demonstrated at the relatively low temperatures by the vapor of reduction agents or the addition of decomposition accelerators. As shown below, gold nanoparticles on a polyimide substrate has
been sintered at the probe temperature of 300℃ with lithography resolution as small as 2 •m. More details are available in Banyan Express: 9(5), 2009, W.S. Hwang; 12(10), 2010, J.M. Ting; 13(4), 2010, T.Y. Tsai; 13(10), 2010, I.G. Chen; 15(1), 2010, C. Kuo.
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