矽基片上積體抗諧振反射光波導(ARROW)化學與生化感測器之設計及研製(III)

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(2) (ARROW) 3/3 (Si-Based Integrated ARROW-type Waveguide Chemical and Biochemical Sensors 3/3) : NSC 88-2215-E009-003 878188731.

(3) e-mail: [email protected] http://iol.ee.nctu.edu.tw/

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(7) Keywords: chemical and biochemical sensors, fiber-optic sensors, integrated optics, antiresonant optical reflecting waveguides, MEMS

(8). !. become a multi-processing sensor system. In addition to the development of an ARROW-B surface plasmon resonance (SPR) chemical sensor, we have also studied the feasibility of using a high-index overlay to improve the sensitivity and the sensor factors of ARROW evanescent-wave sensors. Moreover, sensors based on multi-core dual ARROW’s are also been investigated and discussed.. "#$%&%'() (ARROW) *+,-./01 23(evanescent wave) 456789 : %;<,=.'. >,?@A(MEMS) %) B ,-. CDEFGHIJKL (WDM) ,MNO%IJ P Q R S # T U (ARROW-B) VW XYZ[\(10-5)% ] ^_`,?(aVb7cdef (high-index overlay) Mgb0123. *+% \ hi,jklmn o.p E *+qV rsP. t

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(13) ,Nk%\b, AV r %&%,'=.N O> *+¡]¢£¤P. Abstract The purpose of this project is to develop chemical and biochemical sensors based on optical absorptiometry or refractiometry of evanescent waves in the integrated antiresonant reflecting optical waveguides (ARROW’s). With microelectro-mechanical techniques developed recently, optical sensors can be miniaturized and integrated with WDM systems to. (antiresonant reflecting optical waveguides, ARROW’s) ¥ ¦§¨©)%*+,/=.' >%ª «¬ %A®cb

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(20) 1. M. A. Duguay, Y. Kokubun, and T. L. Koch, “Antiresonant reflecting optical multilayer waveguides in SiO2-Si structures,” Appl. Phys. Lett., vol. 49, no. 1, pp. 13-15, 1986. 2. G. Stewart, J. Norris, D. F. Clark, and B. Culshaw, “Evanescent-wave chemical sensors - a theoretical evaluation,” Int. J. Optoelectron., vol. 6, pp. 227-238, 1991. 3. G. Stewart and B. Culshaw, “Optical waveguide modeling and design for evanescent field chemical sensors,” Opt. Quantum Electron., vol. 26, pp. S249-S259, 1994. 4. D.-K. Qing, X.-M. Chen, Kiminori Itoh, and Masayuki Murabayashi, “A theoretical evaluation of the absorption coefficient of the optical waveguide chemical or biological sensors by group index method,” J. Lightwave Technol., vol. 14, pp. 1907-1917, 1996. 5. Y.-H. Chen and Y.-T. Huang, “Coupling efficiency analysis and control of dual antiresonant reflecting optical waveguides,” J. Lightwave Technol., vol. 14, no. 6, 1996. 6. Y.-T. Huang, J.-J. Deng, Y.-H. Chen, C.-H. Jang, and C.-L. Wang, “Dual antiresonant reflecting optical waveguide devices,” High Speed Electronics and System, vol. 8, no. 4, pp. 643-663, 1997 (Invited). 7. Y.-H. Chen and Y.-T. Huang, “A novel coupling structure for antiresonant reflecting optical waveguides,” SPIE San. ½

(21) ¾s¿ À§º»S#RÁBU (ARROW-B)01ÂiÃ (surface plasma resonance, SPR) . *+,-.±Ä %:,²W X .6 YZ[\ÅÆÇ È%]^_P Àt

(22) ½§\Érs 0123 *+,S#Vb7c def¸ 23 * +>ÊË¹ÌÍÎÏ,VÐq45G %Ñ,gb/ \,Ìt¥Ò qb7cdefE *+% cn fÓÔ%8Ì,Ì½É¥q>b 7cdef%¾,vÕÌEÖ²V ×Ä, c²Øvq>b7cdef MÙgÚPÌÛÜÎ c*+ÝÞ %8, ®¾ßà%*+F\á¥40 mmP â`,¥gb *+*+¯° %A®c,º»lmnp qVrsPãVäf% O¥±åA,ØvAGæ Aç>f è , ?q>b7cdefMgb cÊ Ë¹ÌéÍÎÏ,¹âS#jkêëb. cb±åA®c,ìí*+ÝÞ îïðPVÌñÍÎES#òÑ, æ¼ó *+%F\ôõ'20 mmö÷. cø²ù¦1%XúP. 2.

(23) Diego '94, International Symposium on Integrated Optics, San Diego, U.S.A., July 1994. 8. Y.-H. Chen and Y.-T. Huang, “A novel power divider based on dual antiresonant reflecting optical waveguides,” IEEE CLEOS/Pacific Rim '95, Chiba, Japan, July 1995. 9. Y.-H. Chen and Y.-T. Huang, “Coupling efficiency analysis and control of dual optical waveguides,” 5th Microoptics Conference (MOC '95), Hiroshima, Japan, Oct. 1995. 10. J.-J. Deng and Y.-T. Huang, “A novel hybrid coupler based on antiresonant reflecting optical waveguides,” IEEE CLEO/Europe-EQEC ‘96, Hamburg, Germany, Sept. 1996. 11. J.-J. Deng and Y.-T. Huang, “Eigenmode expansion analysis in dual antiresonant reflecting optical waveguides with step discontinuities,” Photonics/Taiwan ’96, Hsinchu, Taiwan, ROC, Dec. 1996. 12. J.-J. Deng and Y.-T. Huang, “Loss reduction of abrupt waveguide-bends using Fabry-Perot cavity,” SPIE Photonics West ‘97, San Jose, CA, USA, Feb. 1997. 13. Y.-T. Huang and Y.-H. Chen, “A novel power divider based on dual antiresonant. reflecting optical waveguides,” Patent 316683, ROC, Aug. 1997. 14. S.-Y. Chen, “Investigation on ARROW-B SPR chemical sensors,” Master Thesis, Institute of Electronics, NCTU, June 1997. 15. M.-C. Chou, “Antiresonant reflecting optical waveguide (ARROW) evanescent-wave sensors,” Master Thesis, Institute of Electronics, NCTU, June 1998. 16. Y.-T. Huang, S.-H. Hsu, C.-H. Jang, and J.-J. Deng, “ARROW polarizarion beam spillters,” Topical Meeting of the International Commission for Optics (ICO), Optics for Information Infrastructure, (OII ’98), Tianjin, China, Aug. 1998 (Invited). 17. Y.-T. Huang and J.-J. Deng, “A low-loss optical waveguide-bend structure for optical interconnects,” Patent 342459, ROC, Nov. 1998. 18. Y.-T. Huang and J.-J. Deng, “A novel hybrid coupler based on antiresonant reflecting optical waveguides,” Patent 350544, ROC, Jan 1999. 19. M.-C. Chou and Y.-T. Huang, “Antiresoant reflecting optical waveguide (ARROW) evanescent-wave sensors,” Optics and Photonics Taiwan’99, Taoyuan, Taiwan, ROC, Dec. 1999.. 3.

(24) 0.06. sensing length z. nabs-jni abs. 0.05. Sen sitiv ity. dh nh df nf d1 n1 d2 n2. 0.04. ns n. 0.03 3.0. Fig. 1 A qua si-single mode ARRO W e va ne sc ent-w ave sensor with a high- inde x overla y.. 3.2. 3. 4. 3.6. Co re thic kne ss (um). Fig. 2 Sensitivity of a quasi- single m ode ARROW sensor.. 0. 855. 1.0. 0.8. Se nsi ti vity. Sensitiv ity. 0. 850. 0.6. 0.4. 0. 845. 0.2. 0.0. 0. 840 1.9. 2. 0. 2. 1. Co re thi ckn ess (u m). 2.2. 2. 3. 0. Fig. 3 Se nsiti vity of a qua si-single mode ARROW sensor with a hi gh-index over lay... 20. 40. 60. 80. Sensing length (mm). 1 00. Fig. 4 Se nsitivity of a quasi- single m ode ARROW w ith a high-index over lay for diff er ent se nsing l ength.. 1.0 coupling region Lc. Ls. nb. nhi dhi main core antiresonant core. nm dm na 1 d a1 na2 da2 nmse p dm se p nsep d sep. mul ti-core AR ROW wi th high-index overlay. separa tion region. nbsep dbse p bottom ARROW core. nbc. 0.8. Sensitivity. db. sensing region. 0.6. dbc bottom ARROW. input coupling nb1 db1 nb2 d b2 ns. 0.4. n. 0. Fig. 5 A m ulti- core dual A RRO W with a high-index over lay for diff er ent se nsing le ngth.. 4. 2. 4. 6. Sensing length (mm). 8. 10. Fig. 6 Se nsitivity of a m ulti- core dual ARRO W w ith a high-index over lay f or diff ere nt sensing le ngth..

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