矽基片上積體抗諧振反射光波導（ARROW）化學與生化感測器之設計及研製(II)

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(2) (ARROW) 2/3 (Si-Based Integrated ARROW-type Waveguide Chemical and Biochemical Sensors 2/3) : NSC 87-2218-E009-020 868187731.

(3) e-mail: [email protected] http://iol.ee.nctu.edu.tw/

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(7) Keywords: chemical and biochemical sensors, fiber-optic sensors, integrated optics, antiresonant optical reflecting waveguides, MEMS

(8). !. the first year, we have developed an ARROW-B surface plasmon resonance (SPR) chemical sensor, and this year a high-index overlay for an ARROW evanescent-wave sensor has been used to improve the sensitivity. Moreover, dual ARROW sensors are also been investigated and discussed.. "#$%&%'() (ARROW) *+,-./01 23(evanescent wave) 456789 : %;<,=.'. >,?@A(MEMS) %) B ,-. CDEFGHIJKL (WDM) ,MNO%IJ P Q R S # T U .6 (ARROW-B) V WXYZ[\]^ _%`. u

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(13) ,Nm%[f, Ae s %&%,'=.N O> ¡ *+¢`£¤¥P. abc,"R[def7ghij (high-index overlay) Mkf0123. *+% [,lmnopq *+restP Abstract The purpose of this project is to develop chemical and biochemical sensors based on optical absorptiometry or refractiometry of evanescent waves in the integrated antiresonant reflecting optical waveguides (ARROW). With microelectro-mechanical techniques developed recently, optical sensors can be miniaturized and integrated with WDM systems to become a multi-processing sensor systems. In. (antiresonant reflecting optical waveguides, ARROW) ¦ §R¨©)%*+,/=.' >%ª «¬ %A®gf

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(17) NO%. *+,?¼AIJ P. 4. Y.-H. Chen and Y.-T. Huang, “A Novel Power Divider Based on Dual Antireso-nant Reflecting Optical Waveguides,” IEEE CLEOS/Pacific Rim '95, Chiba, Japan, July 1995. 5. Y.-H. Chen and Y.-T. Huang, “Coupling Efficiency Analysis and control of Dual optical Waveguides,” 5th Microoptics Conference (MOC '95), Hiroshima, Japan, Oct. 1995. 6. J.-J. Deng and Y.-T. Huang, “A Novel Hybrid Coupler Based on Antiresonant Reflecting Optical Waveguides,” IEEE CLEO/Europe-EQEC ‘96, Hamburg, Germany, Sept. 1996. 7. J.-J. Deng and Y.-T. Huang, “Eigenmode Expansion Analysis in Dual Antiresonant Reflecting Optical Waveguides with Step Discontinuities,” Photonics/Taiwan ’96, Hsinchu, Taiwan, ROC, Dec. 1996. 8. J.-J. Deng and Y.-T. Huang, “Loss Reduction of Abrupt Waveguide-Bends Using Fabry-Perot Cavity,” SPIE Photonics West ‘97, San Jose, CA, USA, Feb. 1997. 9. Y.-T. Huang and Y.-H. Chen, “A Novel Power Divider Based on Dual Antireso-nant Reflecting Optical Waveguides,” Patent 316683, ROC, Aug. 1997. 10. Y.-T. Huang and J.-J. Deng, “A Novel Hybrid Coupler Based on Antiresonant Reflecting Optical Waveguides,” Patent 350544, ROC, 1996. 11. Y.-T. Huang and J.-J. Deng, “A Low-Loss Optical Waveguide-Bend Structure for Optical Interconnects,” Patent 342459, ROC, 1997. 12. S.-Y. Chen, “Investigation on ARROW-B SPR Chemical Sensors,”. ½

(18) ¾t¿ QRS#ÀÁBU (ARROW-B) 0 1 Â Ã Ä (surface plasma resonance, SPR) . *+,-.±Å %:,²V W .6 XYZ[\]^ _%`abP"R[dS #ef7ghij¸ 23 *+>ÆÇ¹ÈÉÊË, eÌr45G% Í,kf/. [ÆÈu

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(21) åæéê 1. Y.-H. Chen and Y.-T. Huang, “Coupling Efficiency Analysis and Control of Dual Antiresonant Reflecting Optical Waveguides,” IEEE Journal of Lightwave Technology, vol. 14, no. 6, June 1996. 2. Y.-T. Huang, J.-J. Deng, Y.-H. Chen, C.-H. Jang, and C.-L. Wang, “Dual Antiresonant Reflecting Optical Waveguide Devices,” High Speed Electronics and System, vol. 8, no. 4, pp. 643-663, 1997 (Invited). 3. Y.-H. Chen and Y.-T. Huang, “A Novel Coupling Structure for Antiresonant Reflecting Optical Waveguides,” SPIE San Diego '94, International Symposium on Integrated Optics, San Diego, U.S.A., July 1994. 2.

(22) Master Thesis, Institute of Electronics, NCTU, June 1997. 13. M.-C. Chou, “Antiresonant Reflecting Optical Waveguide (ARROW) Evanescent-Wave Sensors,” Master Thesis, Institute of Electronics, NCTU, June 1998.. 14.Y.-T. Huang, S.-H. Hsu, C.-H. Jang, and J.-J. Deng, ``ARROW Polarizarion Beam Spillters,” Topical Meeting of the International Commission for Optics (ICO), Optics for Information Infrastructure, (OII ’98), Tianjin, China, Aug. 1998 (Invited).. 3.

(23) Sensing lengt h. nabs-jniabs. z. dh nh df nf d1 n1 d2 n2 ns. n Fig. 1 An ARROW sensor with a high-index overlay. 1.00. 0.86. 0.80. Sens itivity. Sen sitivity. 0.85. 0.85. 0.84. 0.60. 0.40. 0.20. 0.00. 0.84 18.00. 19. 00. 20.00. 21.00. Co re th ickness (uni t : 0.1 um). 22.00. 23. 00. 0 .0 0. 80.00. Fig. 3 Sensitivity of the AR ROW sensor f or dif f erent sensing lengths.. Fig. 2 Sensitivity of the ARROW sensor f or dif f erent c ore thickness. Coupling region. S ensing region. Lc db. 4 0.0 0. Sensing length (unit : 1 mm). Ls nabs - j niabs. nb Top ARROW core. dhi. nhi. df2 nf2 dh2 nh2 d sep nsep dh1 nh1. Input coupling. B ottom A RROW core. df1 nf1 dh1 nh1 dl1. n. Fig. 4 A dual ARROW sensor with a high-index over lay.. 4. nl1. 120.00.

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