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低介電常數材料與超臨界二氧化碳之可靠性分析與製程整合之研究

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電子物理研究所碩士班

低介電常數材料與超臨界二氧化碳之可靠性分

析與製程整合之研究

Investigation on Reliability and Process Integration

of Low Dielectric Constant Materials and Supercritical

Carbon dioxide

研 究 生:陳銘福

指導教授:楊賜麟博士

(2)

低介電常數材料與超臨界二氧化碳之可靠性分

析與製程整合之研究

Investigation on Reliability and Process Integration of Low

Dielectric Constant Materials and Supercritical

Carbon dioxide

研 究 生:陳銘福 Student: Ming-Fu Chen 指導教授:楊賜麟博士 Advisor: Su-Lin Yang

國 立 交 通 大 學

電子物理研究所碩士班

碩 士 論 文

A Thesis

Submitted to Institute and Department of Electrophysics National Chiao Tung University

in partial Fulfillment of the Requirements for the Degree of

Master in

Electrophysics June 2005

Hsinchu, Taiwan, Republic of China 中華民國九十四年六月

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