國
立
交
通
大
學
工學院半導體材料與製程設備學程
碩 士 論
文
鎳金屬誘發側向結晶複晶矽薄膜電晶體
－界面狀態與低溫複晶矽薄膜電晶體特性之研究
Ni-Metal Induced Lateral Crystallization of Polycrystalline Silicon Thin
Film Transistors
－
Interface state and LTPS TFTs Device Performance
研 究 生：趙育誠
指導教授：吳耀銓 教授
鎳金屬誘發側向結晶複晶矽薄膜電晶體
－界面狀態與低溫複晶矽薄膜電晶體特性之研究
Ni-Metal Induced Lateral Crystallization of Polycrystalline
Silicon Thin Film Transistors
－
Interface state and LTPS TFTs Device Performance
研
究
生：趙育誠 Student：Yu-Cheng Chao
指 導 教 授：吳耀銓 博士 Advisor：Dr. Yewchung Sermon Wu
國 立 交 通 大 學
工學院半導體材料與製程設備學程
碩 士 論 文
A Thesis
Submitted to Institute of Semiconductor Material and Process Equipment College of Engineering
National Chiao Tung University in Partial Fulfillment of the Requirements
for the Degree of Master of Science in
Program of Semiconductor Material and Process Equipment April 2009
Hsinchu, Taiwan, Republic of China
