大負斜角精微聚晶鑽石球型研削工具開發與微小碳化鎢模仁加工研究

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(1)Development of micro BD-PCD ball grinding tool with a large negative-back-rake-angle and research of micro tungsten carbide die machining. 1. 0. 1. 7.

(2)

(3) BD-PCD. 10-15 µm. BD-PCD. -50°. 0. Ra 112 nm µm. i. 1.29.

(4) Abstract The primary purpose of the thesis is to develop a micro BD-PCD ball grinding tool with a large negative-back-rake-angle and using the finished tool to generate micro tungsten carbide die array. The BD-PCD substrate with diamond grit of 10-15 µm is first welded onto a WC shank by means of high-frequency silver brazing. Subsequently, the micro BD-PCD ball grinding tool is formed by rotary wire Electrical Discharge Machining (RWEDM). To prevent the occurrence of squeeze failure between the tool and die, the negative-back-rake-angle of the tool is designed up to -50° whereby the diamond grain and WC die can all bear uniform compression stress. In addition, the tool face is schemed with crossing the center line of tool so as to avoid squeeze effect occurs at the center of the free end of the tool due to it being devoid of cutting speed. The developed grinding tool is used to grind WC die using an in-situ HSFSG (High-Speed & Fast-Shallow Grinding) technique. Generating the aspheric micro die array in-situ saves a lot of time and fiddly pre-processing in the development of micro molds. Experimental results demonstrate that the micro aspheric die array with high dimensional and geometrical accuracy can be achieved successfully. The surface roughness of the microgroove and die-cavity is down to Ra 112 nm and 1.29 µm, respectively. The BD-PCD ball grinding tool is evaluated and discussed with regard to thermal machinability, graphitizing of diamond, orientation of spark erosion and wear processes as well as life expectancy. It is expected that the techniques used in the development of micro die array in WC should contribute greatly to the field of precision optoelectronic industry.. Keywords. High rigidity tabletop machine tool, micro BD-PCD ball grinding. tool, tungsten carbide die array ii.

(5) Karen. 2012/07/25 iii.

(6) ................................................................................................. i ................................................................................................ ii ....................................................................................................... iii ....................................................................................................... iv ................................................................................................. viii .................................................................................................... x .............................................................................................. xv .................................................................................................. 1 1.1. ................................................................................................. 1. 1.2. ......................................................................................... 2. 1.3. ......................................................................................... 4. 1.4. ......................................................................................... 4. 1.5. ......................................................................................... 6 1.5.1. ................................................... 6. 1.5.2. ............................................................. 10 ............................................. 17. 2.1. ............................................................................... 17 2.1.1. ..................................................... 18. 2.1.2. ................................................. 19. 2.2 BD-PCD. ......................................................................... 20. 2.3. ........................................................................... 21. 2.4. ........................................................................ 22 iv.

(7) 2.4.1. ..................................................................... 23. 2.4.2. ..................................................... 25. 2.4.3. ..................................................... 26. 2.5. ........................................................ 27 ............................................................................ 29. 3.1 CNC. ........................................................ 29. 3.2. ............................................................................... 29. 3.3. ............................................................................... 30. 3.4 CNC. ............................................................ 31. 3.5. ............................................................ 32. 3.6. ....................................................................................... 33 3.6.1. ..................................................................... 33. 3.6.2. (CAM) ......................................................... 34. 3.7. ....................................................................................... 35 3.7.1. ........................................................................ 35. 3.7.2. ............................................................. 36. 3.7.3 3D. ............................................................ 36. 3.7.4. ................................................................. 37. 3.7.5. ........................................................................ 37. 3.8. ....................................................................................... 38 3.8.1. (BD-PCD) .................................................... 38. 3.8.2. ............................................................................ 39. 3.8.3. ..................................................................... 40. 3.8.4. -P. ........................................................ 40. ........................................................................................ 41 v.

(8) 4.1. ..................................... 42 4.1.1. .......................... 43. 4.1.2. .............................. 44. 4.1.3. .............................. 46. 4.1.4. ...................................... 47. 4.1.5. ...................................... 49. 4.1.6. .............................. 50. 4.2. ............................................ 54 4.2.1. ...................... 55. 4.2.2. ............................................. 58. 4.2.3. ...................................... 59. 4.2.4. .......................... 61. 4.3 BD-PCD. ...................................... 68. 4.3.1 BD-PCD. ............................................... 68. 4.3.2 BD-PCD. ........................................... 70. 4.3.3. ..................................................... 72 ................................................. 74. 5.1. ................................................................ 74 5.1.1. .................................. 74. 5.1.2. ...................................... 78. 5.1.3. .................................. 81. 5.1.4. ..................................................... 84. 5.2. ............................................................ 86 5.2.1. .......................................... 87. 5.2.2. ................................................. 89 vi.

(9) 5.2.3. .......................... 90. 5.2.4 Z. ............................ 92. 5.2.5. ...................................... 94 ............................................................................ 98. 6.1. ............................................................................................... 98. 6.2. ..................................................................................... 101 ................................................................................................... 102 ........................................................................................................ I. vii.

(10) 2-1. ................................ 18. 3-1 CNC. .......................................................... 29. 3-2. .................................................................................. 30. 3-3. .............................................................................. 30. 3-4 CNC. .......................................................... 31. 3-5. .......................................................................... 36. 3-6. .............................................................. 36. 3-7 3D. .............................................................. 37. 3-8. .................................................................. 37. 3-9. ...................................................................................... 38. 3-10 BD-PCD. ................................... 39. 3-11. ............................................................................ 39. 3-12. .................................................................................... 40. 3-13 P. ...................................................................... 40. 4-1. ....................................... 45. 4-2. .......................................................................... 46. 4-3. .............................................................. 48. 4-4 BD-PCD. .................................................... 52. 4-5. ....................................... 58. 4-6. ................................................... 64. 5-1. ........................................................... 76. 5-2. /. ...................................................... 79 viii.

(11) 5-3. /. .......................................................... 82. 5-4. ........................................................... 85. 5-5. ...................................................................... 87. 5-6. .............................................................. 89. 5-7. ........................................................... 90. 5-8. ............................................... 95. ix.

(12) 1-1. ..................................................... 2. 1-2. ........................................................................ 2. 1-3. ............................................................................ 3. 1-4. ................................................................ 3. 1-5. ............................................. 5. 1-6 BD-PCD. .................................................................. 7. 1-7 PCD. ............................................. 7. 1-8. ................................................................ 8. 1-9. ................................................................ 8. 1-10. ........................ 9. 1-11. .......................................................................... 9. 1-12. ..................................... 10. 1-13. ..................................................... 11. 1-14. ..................................... 11. 1-15. .................................. 12. 1-16. 3 mm. .................................. 12. 1-17. ..................................... 13. 1-18. ................................................. 14. 1-19. ..................................... 14. 1-20. ......................................... 15. 1-21. .................................. 15. 1-22. .................................................................... 16. 2-1. .......................................................................... 17 x.

(13) 2-2. .............................................................. 19. 2-3. BD-PCD. 2-4. .............................................................................. 21. 2-5. .................................................................. 22. 2-6. ...................................................................... 24. 2-7. ................................ 25. 2-8. .............................................................. 27. 2-9. .............................................................................. 28. 3-1 CNC. ................................... 20. .................................................................. 29. 3-2. .............................................................................. 30. 3-3. .................................................................................. 30. 3-4. RWEDM. ................................................................ 31. 3-5. RWEDM. ..................................................................... 31. 3-6 CNC. ...................................................................... 31. 3-7. ................................... 32. 3-8. .......................................................................................... 33. 3-9. .................................................................................. 33. 3-10. ................................................................................ 34. 3-11. ............................................................. 34. 3-12. ........................................................................................ 35. 3-13 CNC. .................................................................................... 35. 3-14. .................................................................................... 36. 3-15. ........................................................................ 36. 3-16 3D. ....................................................................... 37. 3-17. ............................................................................ 37 xi.

(14) 3-18. .................................................................................... 38. 3-19. .............................................................. 39. 3-20. .................................................................... 39. 3-21. ........................................................................................... 40. 3-22. -P. .................................................................... 40. 4-1. ................................... 41. 4-2. ....................................... 42. 4-3 BD-PCD. ............................................................ 43. 4-4 BD-PCD. .................................................... 43. 4-5. .................................................................. 44. 4-6. ....................................................... 44. 4-7 RWEDM. BD-PCD. ............ 46. 4-8. .................... 47. 4-9. ............ 49. 4-10 BD-PCD. .......................................................... 50. 4-11. ............................................................. 50. 4-12. (NBRA). 4-13 BD-PCD. (NBRA). 4-14 RWEDM 4-15. ............................ 51 RWEDM. BD-PCD BD-PCD. ........... 51. .............................. 53 (NBRA) ....................................... 54. 4-16 BD-PCD. ............... 54. 4-17 BD-PCD. ............ 55. 4-18 BD-PCD. ................................... 56. 4-19 4-20. (NBRA-H) BD-PCD. .................... 57. (NBRA-H) ....................... 57 xii.

(15) 4-21 BD-PCD. ................................... 59. 4-22 BD-PCD. ............................... 59. 4-23. ......................................................... 61. 4-24. ......................................................... 61. 4-25. ............................................. 62. 4-26. ..................................... 63. 4-27. ......................................................... 65. 4-28. ......................................................... 65. 4-29. ......................................................... 66. 4-30. ................................................. 66. 4-31. ..................................................... 66. 4-32. ......................................... 67. 4-33. .............................. 68. 4-34. ........................................................................ 70. 4-35. ......................................................... 71. 4-36. .................................................................... 73. 5-1. .................................................................................. 75. 5-2. ................................... 78. 5-3. ................................ 78. 5-4 5-5. /. ...................................... 80. /. ...................................................... 81. 5-6. ........................................................... 81. 5-7. ............................................... 83. 5-8. ............................................... 84. 5-9. ................................................... 84 xiii.

(16) 5-10. .................................................................... 85. 5-11. (10 µm/stroke). .................................. 86. 5-12. (1 µm/stroke). ................................... 86. 5-13. ............................................................................ 88. 5-14. ......................................................... 88. 5-15. .................................................................... 88. 5-16. .................................................................... 88. 5-17. ............................................................................ 89. 5-18. ............................................................................ 89. 5-19. .............................. 90. 5-20. ..................................... 92. 5-21. ............................................................. 92. 5-22. .................. 93. 5-23. Z. ................................................. 93. 5-24 Z 5-25. ...................................................... 94 ............................................................. 95. 5-26 BD-PCD. ................... 96. 5-27 BD-PCD. ............... 96. 5-28. .................................................................... 97. 5-29. ............................................................. 97. xiv.

(17) (mm). D. Nf. (N). M. (N-m). (mm) (µm). V (m/min) (mm/min). v. T t. a (mm) g. (mm) m). dc. e. b. (W/m3) (m2/s) k. KF H. c. E. A m). yc c. m). Ra. (mm-1). m). Rz. x. T. k. n (Rad/s). C. (°). xv. (min).

(18) 1.1 (Lightweight) (Multi-function). (Miniaturization). (Precision). 3C. 3C. DVD. (Aspheric lens). (Chromatic aberration) (Spherical aberration). (Astigmatism). (Coma aberration). (Curvature of field). 110 nm 1. (Distortion). 7.5 µm. [1].

(19) [2] 500°C carbide, WC). [3]. (Tungsten. (Silicon carbide, SiC). (Glassy carbon). (Ceramics). (Diamond) 1-1. 1-1. 1-2. 1-2. 1.2. Display Search. 2010. 2018. 139. 70% 1-3. 1-4. [4, 5]. 2.

(20) 1-3. [4]. 1-4. [6] [7]. [8]. 3. [5].

(21) (Boron-doped Polycrystalline Composite Diamond, BD-PCD). bonding). (Diamond-Diamond (Cobalt). BD-PCD. 1.3 BD-PCD. 2D. 3D. 1.4 10-15 µm. BD-PCD. frequency welding, HFW). (High BD-PCD. BD-PCD. CNC. BD-PCD. 1-5(a) BD-PCD. (Silver brazing) 4. BD-PCD.

(22) 1-5(b). CNC. BD-PCD. 1-5(c). BD-PCD (BD-PCD ball grinding tool). 1-5(d) 1-5(e). 1-5. 5.

(23) 1.5. BD-PCD. 1.5.1 (Diamond tool) (Single crystal diamond, SCD) (Polycrystalline Composite diamond, PCD). (PCD tool). -. (Cobalt). (Wire cut electric discharge machining, WEDM) PCD. 1975 Wang. [9]. [10]. X. BD-PCD 10K. 8.3K. 1-6. 6. 2006. Z.L..

(24) (a) HFCVD. 2007. BD-PCD 1-6 BD-PCD. H. Suzuki. (b) BD-PCD [10]. [11]. 2.4 mm. (P-V 15 nm. 1-7. (a) PCD. (b) 1-7 PCD. 2009. K. Suzuki. [11]. [12]. 10 µm. Sodick BD-PCD. 5. BD-PCD. BD-PCD 2.9 mm/min. 4.4 mm/min. BD-PCD. 30% 7. ). 100 nm.

(25) BD-PCD. BD-PCD. Rz = 3 µm. (. ). (. ). Rz = 1.7 µm. Rz = 8 µm. Rz = 2.7 µm BD-PCD. Rz = 0.4 µm. BD-PCD 1-8. (a). (b) 1-8. 2009. Chandra Nath. (SEM) [12]. [13]. (Ultrasonic elliptical vibration cutting, UEVC) UEVC. (a). (b) 1-9. [13] 8.

(26) 30~50 nm 2010. Heung- Kil Park. 1-9. [14] 5- 10 m. 100 m. 550 m. Ra=0.012 m. 1-10. (a). (b) 1-10. 2011. [14]. [15] BD-PCD. 5 m. 8 m NAK 80. (a) BD-PCD. (b) NAK80 [15]. 1-11 9.

(27) (Nanometer-sized depth grinding). 8 µm, 2011. K. Katahira. Ra10 nm. 1-11. [16]. (PCD). 1-12. (a). (b) 1-12. [16]. 1.5.2. DVD [17]. LIGA. [18, 19]. 10.

(28) 2005. W.K. Chen. [20] 45. 200 µm PV nm. 0.2087 µm. 10. 1-13. (a). (b) 1-13. 2005. K.-S. Jung. [20]. [21]. 405 nm. (Monte Carlo). (a). (b) 1-14. [21] 11.

(29) 100 0.5 mm 0.6. 1.446 mm. 1.453 mm. 0.035 RMS. 84%. 1-14 2006. C.S. Lim. [22] NC. 20 m. 12.5 m. 1-15. (a). (b). (AFM) [22]. 1-15. (a). (b) 1-16. 2009. Y. Takeuchi. 3 mm. [23]. 3D-CAD 12. [23].

(30) (CAM). FANUC 3 mm. m. 30 15. (SEM). 1-16 2009. B.K. Lee. [24]. LIGA. 50 m. 450 nm. 1-17. LIGA. (a) 1-17. 2010. (SEM). J. Yan. (b) [24]. [25] (. ). -40. 30°/min 4 nm. 1-18. 13.

(31) (a). (b) 1-18. 2010. T. Zhou. [25]. [26]. (Nonisothermal. glass molding press, NGMP). NGMP. 1-19. (b). (a) 1-19. 2010 3×3. J. Yan. [26]. [27] 282 µm 14.

(32) Ra=6 nm. 200 nm Ra= 17 nm 1-20. (a). (b) 1-20. 2011. [27]. D.H. Cha. [28]. (Glass Molding. Process). P (PV) Ra=4.2 nm. Ra=3.97 nm. 93.4%. 1-21. (a). (b) 1-21. [28]. 15.

(33) 2011. A. Beaucamp. (Polyurethane). [29] 25mm. 0.25 µm 1.6 nm. 1 nm PV. (a). 29 nm. CNC. 1-22. (b) 1-22. [29]. LIGA LIGA (Grinding-Milling) BD-PCD. 16.

(34) BD-PCD BD-PCD. 2.1 (Electrical discharge machining, EDM) 2-1. [30] µm. [31]. 8,000~12,000. (a). (b) 2-1 17. [32].

(35) 2.1.1 (Micro die-sinking electrical discharge machining) 500 µm [33]. BD-PCD. BD-PCD (Transistor Circuit) (Resistance-capacitance circuit). -. -. -. [34]. 2-1. RC. 2-1. [35] (Micro EDM) -. (Die Sinking EDM). 1.. 1. 2. 3. 4.. (Ip) 2. 3. 4.. ( p) 1 µs (D.F.) <0.05. 18. 1 µs >0.5.

(36) (Micro EDM). (Die Sinking EDM). µm. µm. 2.1.2 (Wire electrical discharge machining, WEDM) 2-2. [36]. 5~50 µm. CNC. BD-PCD BD-PCD. (a). (b) 2-2. 19.

(37) 2.2 BD-PCD. BD-PCD. BD-PCD. PCD PCD. PCD. Ken Okano (Doping). [37, 38]. (Boron) (Electron-hole) 2-3(a). BD-PCD. 2-3(b) BD-PCD BD-PCD. (a) BD-PCD 2-3. (b) BD-PCD 20. PCD. BD-PCD.

(38) 2.3 (High frequency welding, HFW) (Induction coil). 450 kHz. [39]. (Electromagnetic induction). (Eddy current) (WC). (BD-PCD) (Alternating magnetic flux) (Electromotive force). (Proximity effect) (Skin effect)[40]. 2-4. (a). [41]. (b) 2-4. 21. BD-PCD.

(39) 2.4. 1 mm [42] [43]. [44]. 2-5. (a). (b) [45]. 2-5. 22.

(40) 2.4.1 (Grinding). 2-6. [46] (Cycloid). 2. sin =. D:. 2-6. v - V a. (2-1). D 2 -gm. (mm). v:. :. (mm/min). a: (mm). (mm). V:. g :. (m/min) D. D a. sin =2. V v. (mm) 2-1. (2-2). D. v. V. 23. a.

(41) 2-2. gm. gm =. v v a sin =2a V V D. (v). (2-3). (a). (V) BD-PCD. 2-6. 24.

(42) 2.4.2. [47]. 2-7(a). (Brittle-ductile transition) rate, MRR). (Material removal. 102~10-1 mm3/mm. 10-4~10-5 mm3/mm 10-1~10-3 mm3/mm. [48]. (a). (b) 2-7. (Critical chip thickness). 2-4. [49]. 25.

(43) dc =b. KF E H H. (2-4). dc. b. KF. H. E. yc. (dc). (yc). 2-7(b). (Loop stiffness) (Vibration). BD-PCD. 2.4.3 BD-PCD. (Form grinding). 26.

(44) 1 m. 2-8. (a). (b) 2-8. 2.5 (Chemical erosion) [50]. (FeCl3). 2-9(a). 50%. (H2O). 50% 2-9(b). 4.3.1. 27. 4.3.1.

(45) (a). (b) 2-9. 28.

(46) 3.1 CNC CNC. CNC. CNC. CNC. BD-PCD. BD-PCD 3-1. CNC. 3-1. [51]. 3-1 CNC ( X, Y U, V, Z. ). 600 400 mm 100 100 300 mm Within 1 µm 930 700 295 mm. X, Y. 3-1 CNC. Max. 800 mm/min. 3.2 BD-PCD. [52]. BD-PCD BD-PCD. 29.

(47) 3-2 3-2. 3-3. 3-3. 3-2. 3-3 E3000C-NE211 (NSK). EM30-S6000 (NSK). 500~60,000 rpm AC100~240V 350W 1.8 A. 500~60,000 rpm. 2.8 kg. 575 g. 30 mm 350W < 1 µm. 3-2. 3-3. 3.3 BD-PCD (In-situ RWEDM). BD-PCD BD-PCD. 3-4. 30.

(48) 3-5. 3-4. RWEDM. 3-5. 3.4 CNC 3-6. - CNC CNC. 3-4. [53]. 3-4 CNC ( X, Y, Z. ). 550 460 460 mm 800 460 mm 8000 rpm 5.5 kw 300 Kg. 3-6 CNC. 31. RWEDM.

(49) 3.5. 2.5 nm. 1 µm [54]. 3-7. 3-8. (Machining tank). 3-9. (Precision positioning fixture). (a). (b) 3-7 32.

(50) 3-8. 3-9. 3.6 BD-PCD (Grinding generation). [54]. (Master CAM). CNC. 3.6.1. 3-1. [55]. cx2 1+. 1-c2 (k+1)x2. c(=1/r) constant). 12. ci xi. +. (3-1). i=2. (Curvature). x. z. 33. k. (Conic.

(51) C++ Builder. (Aspheric curve generator) Windows XP. (Aspheric surface). 3-10. 3-11. 5. (10 nm). 3-10. 3.6.2. (CAM). 3-11. (CAM). [56] CNC. CNC 3-12. 3-13. 34.

(52) 3-12. 3-13 CNC. 3.7 BD-PCD. (Toolmakers microscope). (Scanning electron. microscope, SEM) 3D. (3D Laser scanning microscope). (Surface shape measurement). (Raman. spectroscopy). 3.7.1 [57]. 3-14. BD-PCD. 3-5. 35.

(53) 3-5 ( X, Y, Z. ). 200×200×150 mm 400×300 mm 0.5 µm Within 1 µm 3-14. 640×480. 3.7.2 [58]. 3-15. XY 50 mm BD-PCD 3-6. 3-6 (JSM6360). nm ×15~×300,000 0.5~ 30 KV 3-15. 50 mm. 3.7.3 3D 3D. [59]. 3-16. 408 nm. 2D. 36. 3D.

(54) 1 nm. 3-7. 3-7 3D (VK-9700) 250×400×420 mm Z. 0.001 µm 10X 20X 50X 150X. 2048×1536 (408 nm). 3-16 3D. 3.7.4 [60]. 3-17. XYZ. 0.8 nm. 3-8 (Taylor Hobson) (X). 200 mm. (Z). 12.5 mm R=2 µm (. XYZ. ). 0.8 nm 3-17. 0.05 µm. 3.7.5 [61]. 3-18. 37. 3-8.

(55) Raman BD-PCD BD-PCD. 3-9. 3-9 (T64000) 5~6000 cm-1 640 mm 0.05 cm-1. FWHM 1 µm. 3-18. 4~1773K. 3.8 BD-PCD. PCD (RWEDM). BD-PCD. BD-PCD. 3.8.1. (BD-PCD) BD-PCD 3-10. PCD. BD-PCD. 2 mm. 0.6 mm. 3-19(a) [62] BD-PCD. (HFW) 3-19(b). 38.

(56) 3-10 BD-PCD S-PCD(Standard PCD). EC-PCD(BD PCD). Conventional HPHT diamond 500~ 600 W/m K 10 µm Cobalt 1.4× 103 m 0.5 mm. B doped HPHT diamond 440~ 580 W/m K 10 µm Cobalt 5~37× 10 m 0.6 mm. (a) BD-PCD. (b). BD-PCD. 3-19. 3.8.2 250 µm 3-20. BD-PCD 3-11. 3-11. 250 µm Within 1 µm 100 N/ mm2 4% 3-20. 39. [63].

(57) 3.8.3. 10,000 rpm 0.5 µm. 3-21 3-12. [64]. 3-12. # 60,000 0.5 µm 5g Grey 3-21. 3.8.4. -P. 2870°C 3-22. 3-12. 3-13 P. 6.2×1011 N/m2 Poission. 0.26 15.8 kg/m3 7×109 N/m2 3-22. 420 W/m K. 40. -P. [65].

(58) BD-PCD (Micro tungsten carbide die). 10-15µm. BD-PCD. (High frequency welding, HFW) BD-PCD. CNC BD-PCD. BD-PCD. BD-PCD 4-1. 4-1 41.

(59) 4.1. 4-2. (RWEDM). BD-PCD. 4-12. (a). (b). (c). (d) 4-2. 42. (. (. ). ).

(60) 4.1.1 (Large negative-back-rake-angle, NBRA). 4-3. BD-PCD. NBRA. (WC). 0 0. (4-1). [66]. 4-4. V=. D 2. (4-1). 4-3 BD-PCD. 4-4 BD-PCD. Nf (Normal force). 43. M(Torque).

(61) (Deformation analysis). (. ). 4-5. M =0.9 N-mm (. Nf =3 N =0.33 µm. 4-5. -50°. 4-6. 4-6. 4.1.2 BD-PCD (Dielectric constant) (Spark erosion rate). 4-1 Y. Y Y. 44.

(62) BD-PCD BD-PCD 4-7. 4-1. ( (V) ( s) ( s) ( s) ( s) (V) (mm/sec) (g). 1) 70V AC 2 15 1 15 65 1 25 2400. Brass wire( 250 m) BD-PCD( 0.6 mm). (a). (b). 45. (. 1).

(63) (c) 4-7 RWEDM. (d) BD-PCD. 4.1.3 BD-PCD. 4-2. 4-8(a) a. X. Y. 4-8(b). 4-8(c). G92. (130 µm) BD-PCD. 4-9(d). 4-2 ( (V). 1). ( 70V AC. ( s) ( s) ( s) ( s) (V). 2 15 1 15 65 1 46. 1).

(64) ( (mm/sec) (g). 1). (. 1). 25 2400 Brass wire( 250 m) BD-PCD( 0.6 mm). (a) G92. (. Y. ). (b). (. Y. ). (c) G92. (. Y. ). (d). (. Y. ). 4-8. 4.1.4. 47.

(65) (Time off) 4-3. 4-9(a). 4-9(c). (b). (d). 4-3. ( 70V. (V). 1). ( 70V. 1). AC 2. ( s) ( s) ( s) ( s) (V). 15. 35 1. 15. 35 65 1. (mm/sec) (g). 25 2400 Brass wire( 250 m) BD-PCD( 0.6 mm). (a). 15µm. (b). 48. (. 15µm).

(66) (c). 35µm. (d). (. 35µm). 4-9. 4.1.5. (Heat source). 4-10. (Thermal conduction) (4-2). 2. T :W/m3 c. 2. +. 2. 2. +. 2. 2. +. =. 1. [67]. (4-2). t (Thermal diffusivity). =k/ c. (Heat transfer coefficient). capacity). 49. : m2/s. k, (Heat.

(67) 18.5cm2/s. 33.2W/(cm·K)[68]. (Thermal stress) (Thermal strain). (Micro crack). 4-11. RWEDM. 4-10 BD-PCD. 4-11. 4.1.6 BD-PCD. 10-15 µm. BD-PCD. BD-PCD CNC. 4-12(a) BD-PCD. (Silver brazing) 4-12(b) CNC. 50.

(68) 4-12(c) BD-PCD. 4-12(d). 4-12. (NBRA). (In-situ RWEDM). CAM. CNC 4-13(a). CNC 1. 2. (a) 4-13 BD-PCD. (b) (NBRA). 51. RWEDM RWEDM.

(69) BD-PCD BD-PCD. BD-PCD. 4-13(b) 4-4 4-14 4-15. BD-PCD. 3D 0.88 m. 4-16. 4-4 BD-PCD ( (V). 1). ( 70 AC 2 15 1 15. s) s) s) s) (V). 65 1 25 2,400 1,000. (mm/sec) (g) (rpm). Brass wire( 250 m) BD-PCD( 0.6 mm). 52. 1).

(70) (a) NBRA. (c). (b). 1( ) 4-14 RWEDM. RWEDM. (d) BD-PCD. (a). (b). 53. 1(. ).

(71) (c) 4-15. BD-PCD. (a) BD-PCD 4-16 BD-PCD. (d) (NBRA). (b). 4.2 BD-PCD BD-PCD. Z. N-Scope. 54.

(72) BD-PCD N-Scope. BD-PCD. 1. (A). 4-17. (a) BD-PCD 4-17 BD-PCD. (NBRA). (b). 4.2.1 BD-PCD BD-PCD. 5 µm 4-18(a) BD-PCD. 4-18(b). (Half milling cutter with a. large negative-back-rake-angle). NBRA-H 55.

(73) ( Nf (Normal force). M(Torque). Nf =3 N. M=0.9 N-mm =0.28 µm. 4-18(c). (d). BD-PCD =0.33 µm. (a) NBRA-H. 50 nm. (3D). (b) NBRA-H. (c) BD-PCD. (. (d) BD-PCD 4-18 BD-PCD. BD-PCD. BD-PCD 4-19. BD-PCD. 56. ).

(74) Y. 90°. Z. X. CNC BD-PCD. BD-PCD. 4-20. 4-19. (NBRA-H). (a). (b). (c) 4-20. (d) BD-PCD. 57. (NBRA-H).

(75) 4.2.2 BD-PCD BD-PCD. BD-PCD N-Scope. 4-5. BD-PCD 4-21. BD-PCD. 4-22 4-5. Z. NBRA/NBRA-H (D=300 µm) Tungsten carbide 30 µm 30,000 rpm 10 mm/min 5 µm 1 µm Oil immersion & convection Parallel. (a) BD-PCD. (b) 58. (NBRA).

(76) (c). (NBRA) 4-21 BD-PCD. (d). (a) BD-PCD. (c). (b). (NBRA-H) 4-22 BD-PCD. (NBRA). (NBRA-H). (d). (NBRA-H). 4.2.3 BD-PCD. 59.

(77) BD-PCD. Z. BD-PCD. 4-23 6.8 A. 3.27. Z. Z. Z X Y. 4-24 CNC. (a). (b). 60.

(78) (c). (. ). (d). (. ). 4-23. (a). (c). (. ). (. (b). ). (d). 4-24. 4.2.4. 61. (. ).

(79) 4-25(a) (b). [69]. (a). (b) 4-25. (Discontinuous chips) BD-PCD. 4-26(a). [70] BD-PCD. 62. (b).

(80) 4-25(c). 4-25(d). (a). (b). (c). (d). +. 4-26. BD-PCD. (Built- up edge chips, BUE). 63.

(81) 4-6. 4-27(a)-(c). 4-27(d)EDX. 4-28(a) 4-30(a). (b). 4-29(a). (b). (b). 4-31(a). 4-32 4-6 NBRA (D=300 µm) Tungsten carbide 30 µm. Z. 30,000 rpm 10 mm/min 5 µm 1µm Air, Oil mist, Oil, FeCl3, Oil immersion & convection Parallel. 64. (b).

(82) (a). (b). (c). (d) 4-27. (a). (b) 4-28. 65. EDX.

(83) (a). (b) 4-29. (a). (b) 4-30. (a). (b) 4-31. 66.

(84) (a). (b) 4-32. 4-33. (a). (b). (c). (d). 67.

(85) (e) 4-33. 4.3 BD-PCD BD-PCD BD-PCD. RWEDM. BD-PCD. BD-PCD. 4.3.1 BD-PCD BD-PCD. BD-PCD (Tool life) (Taylar´s tool life) [71] C. VT = C. (4-3). 68.

(86) V. (m/min) T. n. C. (min). 4-2 BD-PCD n. (1).. C. BD-PCD. BD-PCD. 40. 40. 4-34(a)-(d) BD-PCD. (2).. BD-PCD BD-PCD. 4 4-34(e)-(h) BD-PCD. (a). (b). 69. -.

(87) (c). (d). -. (e). (f). -. (g). (h). -. 4-34. 4.3.2 BD-PCD BD-PCD. RWEDM. 70. BD-PCD.

(88) 50%. 50%. BD-PCD. 5. BD-PCD BD-PCD 4-35. (a). (c). (. ( 4-35. ). (b). ). (d). 71.

(89) 4.3.3 BD-PCD. SP3. 1334 cm-1. SP2. 1584 cm-1. [72] 4. (b). 4-36(a). BD-PCD 1334 cm-1 4-36(c) 1584 cm-1. 4-36(d). 4-36(e). (f). BD-PCD. BD-PCD. (a) BD-PCD. -. (b). 72. -.

(90) (c). -. (d). -. (e). -. (f). -. 4-36. 73.

(91) BD-PCD. (Grinding-Milling). 2-D BD-PCD. BD-PCD. 5.1 BD-PCD. BD-PCD. 5.1.1. 74. 3-D.

(92) XYZ 30,000 rpm. 68nm. 5-1(a)-(b). 40,000 rpm 163nm. (a) 20,000rpm. (b) 30,000rpm. (c) 40,000rpm. (d) 50,000rpm. (e) 60,000rpm 5-1 75. 5-1(c)-(e).

(93) 5-1 V=. V. (m/min). DN 1000. (5-1). D. (mm). 5-1. N. (rpm). 3D 5-2. 5-3. 60~120 m/min 30,000 rpm(. 60 m/min). 5-1 NBRA(D=600 µm) Tungsten carbide 40, 60, 80, 100, 120 m/min 1 mm/min 500 nm 1 mm Oil immersion & convection. 76.

(94) (a). V=40 m/min. (b). (c). V=60 m/min. (d). (V=60 m/min). (e). V=80 m/min. (f). (V=80 m/min). 77. (40 m/min).

(95) (g). V=100 m/min. (h). (V=100 m/min). (i). V=120 m/min. (j). (V=120 m/min). 5-2. 5-3. 5.1.2 BD-PCD. 78.

(96) 4. 5-2. 5-4. F=1 mm/min 5-5. F=1 mm/min. 5-2. / NBRA(D=600 µm) Tungsten carbide 30,000 rpm 0.1, 0.5, 1, 1.5, 2 mm/min 500 nm 1 mm Oil immersion & convection. (a). F=0.1 mm/min. (b). 79. (F=0.1 mm/min).

(97) (c). (e). (g). F=0.5 mm/min. (d). (F=0.5 mm/min). F=1 mm/min. (f). (F=1 mm/min). F=1.5 mm/min 5-4 /. (h). 80. (F=1.5 mm/min).

(98) 5-5. /. 5.1.3. BD-PCD BD-PCD. 5-6. 5-6. 0.5, 1, 1.5, 2 µm 5-3 0.5 µm. 81. 5-7.

(99) 1.5 µm 5-8 1 µm BD-PCD 5-9. 5-3. / NBRA(D=600 µm) Tungsten carbide 30,000 rpm 1 mm/min 0.5, 1, 1.5, 2 µm 1 mm Oil immersion & convection. (a). :0.5 µm. (b). 82. (. :0.5 µm).

(100) (c). :1 µm. (e). (g). (d). (. :1 µm). :1.5 µm. (f). (. :1.5 µm). :2 µm. (h). (. :2 µm). 5-7. 83.

(101) 5-8. (a). (b) 5-9. 5.1.4. 5-4 NTNU(National Taiwan Normal University) 5-10 1 m. 10. 10. 1. m. 10 m T. T. 5-11(b). 5-12(b) (<1 m) 5-11(c). 5-12(c). 10 m 84.

(102) SEM 5-11(a). 5-12(a). 5-11(d). 3D. 5-12(d) Ra 112 nm. 5-4 NBRA(D=600 µm) Tungsten carbide 30,000 rpm 1 mm/min 1, 10 µm/stroke 10 µm Oil immersion & convection. (a). 5-10. (10 µm/stroke). (b). 85. (10 µm/stroke).

(103) (c) 5-11. (a). (10 µm/stroke) (d) (10 µm/stroke). (1 µm/stroke). (c) 5-12. (b). (1 µm/stroke) (d) (1 µm/stroke). 5.2 BD-PCD BD-PCD 86. (10 µm/stroke). (1 µm/stroke). (1 µm/stroke).

(104) Z. 5.2.1. 3.6.1. 5-13. [55]. 5-5. CAM CNC. 5-14(a). (b). CNC BD-PCD 3D 5-14(c) 5-5 X k A2 A4 A6 A8 A10. 0.25 -1 1.98×10-1 3.847×10-5 9.692×10-7 7.212×10-8 5.166×10-10. 87.

(105) 5-13. [55]. 5-14. BD-PCD 5-15 30 µm. 500 µm. k= -1 5-16. 5-17 30,000 rpm X Y 1 µm. 5-18. 5-15. 5-16. 88.

(106) 5-17. 5-18. 5.2.2 (Contour path). (Parallel path). 5-6 BD-PCD. 5-19(a). 5-19(b). 5-6 NBRA(D=600 µm). Z. 30 µm 30,000 rpm 10 mm/min 5 µm 1 µm Oil immersion & convection Contour, Parallel 89.

(107) (a). (b) 5-19. 5.2.3. 100, 120, 140, 160, 180 mm/mim 5-7. 5-20 5-21. 120-180 mm/min mm/min. Ra 2 µm Ra 1.7µm. 100 100 mm/min. 5-7. Z. NBRA(D=600 µm) Tungsten carbide 30 µm 30,000 rpm 100, 120, 140, 160, 180 mm/min 5 µm 1 µm Oil immersion & convection Parallel. 90.

(108) (a). (F= 100 mm/min). (b). (F= 100 mm/min). (c). (F= 120 mm/min). (d). (F= 120 mm/min). (e). (F= 140 mm/min). (f). (F= 140 mm/min). 91.

(109) (g). (F= 160 mm/min). (h). (F= 160 mm/min). (i). (F= 180 mm/min) 5-20. (j). (F= 180 mm/min). 5-21. 5.2.4 Z BD-PCD. 5-22. BD-PCD 92.

(110) Z BD-PCD Z 5-23 5-24. (a). (b) 5-22. (a). (b) 5-23. Z. 93. 4 m.

(111) (a). (b) Z 5-24 Z. 5.2.5 BD-PCD. BD-PCD 5-8 500 m. 5×5 700 m. 5-25. BD-PCD. BD-PCD 5-26(a). 5-27(a). 3D. BD-PCD Ra 1.29 m (c). 5-27(b). BD-PCD (c). Ra 1.58 m. 5-26(b). BD-PCD. 3 m. 5-28. 94.

(112) 5-8 NBRA/NBRA-H(D=600 µm) Tungsten carbide 30 µm 30,000 rpm 100 mm/min 5 µm 1 µm Oil immersion & convection Parallel. Z. (a). (b) 5-25. (a) BD-PCD. 95.

(113) (b) 5-26 BD-PCD. (c). (a) BD-PCD. (b) 5-27 BD-PCD. (c). BD-PCD 4.2.4. 96.

(114) F=1 mm/min. 25. 16 F=100 mm/min. 4. 10 BD-PCD. 5-28. 5-29. 97.

(115) 6.1. BD-PCD. BD-PCD 10-15µm BD-PCD BD-PCD N-Scope BD-PCD. BD-PCD 1.. 2.. BD-PCD. 3. -50°. 98.

(116) 4.. BD-PCD. 5.. 0. BD-PCD. BD-PCD 6. BD-PCD. 1. 1. BD-PCD. 2. Z. 3.. 4.. BD-PCD BD-PCD BD-PCD. 99. 2.

(117) ( ) 1. BD-PCD. 2. BD-PCD. 1 m 3. 30,000 rpm. 1 mm/min. 1 µm/. Ra112 nm. ( ) 1.. BD-PCD. Z. 4 m. 2. 30,000 rpm. 100 mm/min 25 4. Ra 1.29 µm. 100.

(118) 6.2. 1.. 2. BD-PCD BD-PCD. 3.. 101.

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(126) 02-29378384. 0916-621188. [email protected] (2012) (2008) (2004).

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