第五章 結論與未來展望
5.2 未來展望
本研究成功以高真空壓鑄法製備出具有陣列式排列氧化鋅-鋁氣體感測器，最後綜 合所有研究結果提出下列幾點未來努力之方向：
一. 若能在氣體進入腔體之前，先行將氣體加熱至工作溫度，可有助於量測訊號之穩定，
因當氣體進入腔體接觸至元件時，氣體溫度不可能瞬間上升至工作溫度，因此氣體 與元件之間會進行熱交換導致元件溫度不穩定。所以，若先行加熱氣體，消除兩者 之間的熱交換，將有助於訊號之穩定。
二. 在未來本實驗室能自行架設量測平台時，將加熱器與溫度感知器整合及優化為第一 首要任務，其原因在於一個完整的氣體感測器，微加熱器即是其心臟，若能有持溫 穩定、低耗功且熱源分布均勻，將有助於訊號量測上之檢測研究。
Nano Market LC 發布報告指出，在 2008 年時奈米氣體感測器市場可達 38 億美元，
在 2012 年將達 172 億美元，其報告還指出，奈米氣體感測器在軍事及國防等不同領域 皆有運用，由此可見，氣體感測器市場是前景看漲。因此，本研究以製作簡單、方便更 換以及攜帶為目標，研究陣列式氧化鋅-鋁氣體感測元件製程，降低製作時間及成本，
並希望在未來能開發為模組化的產品。
72
[3] T. G. Nenov and S. P. Yordanov(1996),Ceramic Sensors technology and applications, Pennsylvania, Technomic Publishing Company, Inc.
[4] P. B. Weisz(1953), Effects of electronic charge transfer between adsorbate and solid on chemisorption and catalysis, The Journal of Chemical Physics, 21( 9), 1531-1538.
[5] T. Seiyama, A. Kato, K. Fujiishi and M. Nagatani(1962), A new detector for gaseous components using semiconducting thin films, Analytical chemistry, 34, 1502-1503.
[6] P. J. Shaver(1967), Activated tungsten oxide gas detectors, Applied Physics Letters, 11, 255-257.
[7] D. Rosenfeld, R. Sanjines, W. H. Schreiner and F. Levy(1993), Gas sensitive and selective SnO2 thin polycrystalline films doped by ion implan-tation, Sensors and
Actuators B, 15, 406-409.
[8] H. M. Lin, T. Y. Hsu, C. Y. Tung and C. M. Hsu(1995), Hydrogen sulfide detection by nanocrystal Pt doped TiO2 base gas sensors”, Nanostructured Materials, 6( 5-8), 1001-1004.
[9] J. Frank, M. Fleischer and H. Meixner(1995), Electrical doping of gas-sensitive, semiconducting Ga2O3 thin films, Sensors and Actuators B: Chemical, 34, 373-377.
[10] 李俊遠，氣體感測器介紹”，工業材料，第 124 期，pp.82-84(1997)
[11] 葉陶淵，化學感測器中氣體感測器的新動向”，科儀新知，第 20 卷第 4 期，
pp.72-76(1999)
[12] D.S. Vlachos and A.C. Xenoulis(1998),”Gas detection selectivity and cluster size,
Nanostructured Materials, 10(8), 1355-1361.
[13] S. Major, A.Banerjee and K.L.Chopra(1986),Thickness-dependent properties of Indium-doped ZnO films, Thin Solid Films, 143, 19-30.
[14] G.S.V. Coles and G.Williams(1991), Selectivity studies on tin oxide-based semiconductor gas sensors, Sensors and Actuators B. 3, 7-14.
[15] 鄭煜騰、鄭耀宗（1997），氣體感測器的市場分析與發展概況，科儀新知，18(5)，
73
76-84。
[16] T. Miyata,T. Minami,K. Shimokawa,T. Kakumu and M. Ishii(1997), New materials consisting of multicomponent oxides for thin-film gas sensors,Journal of the
Electrochem.Society, 144(7),2432-2436.
[17] A. Galdikas,Z. Martunas and A. Setkus(1992),SnInO-based chlorine gas sensor, Sensors
and actuators B, 7,633-636.
[18] G. Sberveglieri,S. Groppelli, P. Nelli, A. Tintinelli, G. Giunta(1995).A novel method for the proparation of NH3 sensors based on ZnO-In thin films,Sensors and Actuators B, 25, 588-590.
[19] D. H. Yoon, J. H. Yu and G. M. Choi(1998),CO gas sensing properties of Zn-CuO composite, Sensors and Actuators B: Chemical ,46, 15-23.
[20] N. T. Nguyen(1997), Micromachined Flow Sensors-A Review, Flow Measurement and
Instrumentation, 8(7), 7-16.
[21] M. M. O. Lee(1997,March), Merged Technology on MEMS, Proceedings of the IEEEE
Hong Kong Electron Device Meeting, IEEE Piscataway, NJ: USA.
[22] 楊哲明(2003)。共晶組成錫基合金之電衝擊破壞特性研究(未出版之碩士論文)。國 立成功大學材料科學及工程學系，台南。
[23] 鄒秉環(2007)。與 CMOS 製程相容之奈米碳管微機電氣體感測器(未出版之碩士論 文)。國立台北科技大學製造科技研究所，台北。
[24] P. Ciureanu(1992),Thin Film Resistive Sensors,Institute of Physics Publishing, New York,NY.
[25] D. M. Liu, J. A. Hernandez, K. P. Kamloth and H. D. Liess(1997), A new carbon monoxide sensor using using polypyrrole film grow on an interdigital-capacitor substrate,Sensors and Actuators B,41,203-206.
[26] J.E. Lennard-Jones(1932), Processes of adsorption and diffusion on solid surfaces.
333-359.
[27] S.J. Gentry and T.A.Jones(1986), The role of catalysis in solid-state gas sensors, Sensors
and Actuators,10,141-163.
[28] 缺氧作業危害及事例介紹。行政院勞工委員會勞工安全衛生研究所。取自:
http://www.safetygas.com.tw/pdf/%E7%BC%BA%E6%B0%A7%E4%BD%9C%E6%A 5%AD%E5%8D%B1%E5%AE%B3%E5%8F%8A%E4%BA%8B%E6%95%85%E4%
BB%8B%E7%B4%B9.pdf.
[29] H.Masuda, M.Satoh, (1996). Fabrication of Gold Nanodot Array Using Anodic Porous
74
Alumina as an Evaporation Mask,Japanese Journal of Applied Physics, 35, 126-129.
[30] A. P .Li,; F.Müller, A.Birner,; K. Nielsch, U. J.Gösele (1998), Hexagonal pore arrays with a 50–420 nm interpore distance formed by self-organization in anodic alumina.
Journal of Applied Physics, 84(11),61-68.
[31] T. T. Xu, R. D. Piner, and R. S. Ruoff, An Improved Method To Strip Aluminum from Porous Anodic Alumina Films, Langmuir, 19 (2003) 1443-1445.
[32] G.Che, B. B.Lakshmi, C. R.Martin, E. R. Fisher(1998), Chemical Vapor Deposition Based Synthesis of Carbon Nanotubes and Nanofibers Using a Template Method, Chem.
Mater. 10, 260.
[33] J. Li, C. Papadopoulos, M. Moskovits, J.M. Xu(1999), Large-Area Hexagonally Ordered Arrays of Carbon Nanotubes, Appl. Phys. Lett., 75(3), 367.
[34] . Y. Kanamori, K. Hane, H. Sai, and H. Yugami(2001), 100 nm period silicon
antireflection structures fabricatged using a porous alumina membrane mask, Appl. Phys.
Lett., 78(2), 142–143.
[35] S. Shingubara, O. Okino, Y. Sayama, H. Sakaue and T. Takahagi(1997), Ordered Two-Dimensional Nanowire Array Formation Using Self-Organized Nanoholes of Anodically Oxidized Aluminum, Jpn. J. Appl. Phys. 36, 7791.
[36] J. Y.Liang, H.Chik, A. J.Yin, J. J. Xu(2002), Nonlithographic Fabrication of Lateral Superlatticesfor Nanometric Electromagnetic-Optic Applications, IEEE JOURNAL OF
SELECTED TOPICS IN QUANTUM ELECTRONICS, 8(5), 2544.
[37] 楊昆霖(2007)。大面積規則陽極氧化鋁孔洞之研製與相關運用(未出版之碩士論文)。
國立中山大學光電研究所，高雄。
[38] H.Masuda, & k. Fukuda(1995), Ordered metal nanohole array made by a two-step replication of honeycomb structures of anodic alumina,”Science 268, 1466-1468.
[39] O. Jessensky, F.Müller, U. G ̈sele(1998), Self Organized Formation of Hexagonal Pore Arrays in Anodic Alumina, Appl. Phy, Lett. 72,1173,.
[40] L. Li, Y.Zhang, Y. W. Yang,; X. H.Huang, G. H. Li, L. D. Zhang(2005), Diameter-depended thermal expansion properties of Bi nanowire arrays, Appl. Phys.
Lett., 87(3), 031912-031912-3.
[41] Y. C. Kong, D. P.Yu(2001), Ultraviolet-emitting ZnO nanowires synthesized by a physical vapor deposition approach, Phys. Lett., 78(4), 407-409.
[42] L.F. Adam and M.Latika (2007), Optimal Parameters for Synthesis of Magnetic Nanowires in Porous Alumina Templates Electrodeposition Study,Journal of The
75
Electrochemical Society, 154(4).
[43] X. H. Bao, F. Y. Li, R. M. Metzger, J. (1996), Synthesis and magnetic properties of electrodeposited metal particles on anodic alumite film Appl. Phys., 79(8), 4866.
[44] G. E. Thompson(1997), Porous anodic alumina: fabrication, characterization and applications,Journal of Thin Solid Films., 297, 192-201.
[45] C. Y. Liu, A. Datta, N. W. Liu, C. Y. Peng, and Y. L. Wang(2004), Order–disorder transition of anodic alumina nanochannel arrays grown under the guidance of focused-ion-beam patterning, Appl. Phys. Lett., 84, 2509.
[46] C. Y. Liu, A. Datta, and Y. L. Wang(2001) , Ordered anodic alumina nanochannels on focused-ion-beam-prepatterned aluminum surfaces, Appl. Phys. Lett., 78, 120.
[47] H.Masuda, H.Yamada, M.Saitoh, H.Asoh, M.Nakao, Y.Tamamura(1997), Highly ordered nanochannel-array architecture in anodic alumina, Appl. Phys. Lett., 71, 2770.
[48] F.Li, L.Zhang, R. M. Metzger(1998), On the Growth of Highly Ordered Pores in Anodized Aluminum Oxide, Chemical of Materials, 10, 2470.
[49] A. P. Li, F. Müller, A. Birner, K. Nielsch, and U. Gösele(1998), Hexagonal pore arrays with a 50–420 nm interpore distance formed by self-organization in anodic alumina,
Appl. Phys., 84, 6023.
[50] K.Nielsch, J.Choi, K.Schwirn, R. B.Wehrspohn, U.Gösele(2002), Self-ordering Regimes of Porous Alumina:Â The 10 Porosity Rule, Nano Lett., 2(7), 677.
[51] L.Ba, W. S.Li(2000), Influence of anodizing conditions on the ordered pore formation in anodic alumina Journal of Physics D: Applied Physics, 33, 2527.
[52] J. I. Pankove(1975). Optical Progress in Semiconductors . New York : Dover.
[53] D. Bao, H. Gu, A. Kuang(1998), Sol-gel-derived c-axis oriented ZnO thin films,Thin
solid films, 312, 37-39.
[54] D. G. Baik, S. M. Cho (1999), Application of sol-gel derived films for ZnO/n-Si junction solar cells, Thin Solid Films, 354, 227-231.
[55] H.W. Ryua, B.S. Park(2003), ZnO sol–gel derived porous film for CO gas sensing,
Sensors and Actuators B, 96, 717-722.
[56] J. Jagadish and S. J. Pearton(2006), Zinc Oxide Bulk, Thin Film and Nanostructures, Elsevier Inc.
[57] F. D. Paraguay, J. Morales, W. L. Estrada, E. Andrade, M. M. Yoshida(2000), Influence of Al, In, Cu, Fe and Sn dopants in the microstructure of zinc oxide thin films obtained by spray pyrolysis, Thin solid Films, 366(1) 16-27.
[58] R. Wang, L. H. King, and W. Sleight (1996), Highly conducting transparent thin films
76
based on zinc oxide, Journal of Materials Research, 11(6), 1659-1664.
[59] H.Ko, W. P. Tai, Y.S. Kim(2005), Growth of Ai-doped ZnO thin films by pulsed DC magne tron sputtering, J. Cry. Grow., 277, 352.
[60] B.Chapman(1980), Glow Discharge Processes, chap.6. N.Y.John Wiley & Sons.Inc.
[61] T.Minami, H.Sato, K.Ohashi, T.Tomofuji and S.Takata(1992), Conduction mechanism of highly conductive and transparent zinc oxide thin films prepared by magnetron sputtering, J. Cry. Grow., 117. 370.
[62] K. Wasa and S. Hayakawa(1992), Handbook of Sputter Deposition Technology, NJ:
Noyes Publications.
[63] C. Agashe, O. Kluth, J. Hupkes, U. Zastrow, B. Rech(2004), Efforts to improve carrier mobility in radio frequency sputtered aluminum doped zinc oxide films , J. Appl.Phys.
95(4), 1911.
[64] S. P. Lee (1997, May),FET Humidity Sensors Based on Titanium Oxide Film. Properties
and Applications of Dielectric Materials, 1997, Proceedings of the 5th International Conference, Seoul 2 , 1066–1069.
[65] D. L. Dreifus, R. J. Higgins,R. B. Henard, R. Almar, and L. P. Solie (1997), Experimental observation of high velocity pseudo-SAWs in ZnO/Diamond/Si multilayers, Proceedings of the 1997 IEEE International Ultrasonics Symposium, Toronto, 191-194.
[66] J. Koike, H. Tanaka, and H. Ieki (1995), Quasi-microwave band longitudinally coupled surface acoustic wave resonator filters using ZnO/Sapphire substrate, Japanese Journal
of Applied Physics, 34, 2678-2682.
[67] N. Yamazoe, and Y. Shimizu Y (1986), Humidity sensors: principles and applications,
Sensor. Actuat., 10, 379-398.
[68] X. L. Guo, J. H. Choi, H. Tabata, and T. Kawai (2001), Fabrication and optoelectronic properties of a transparent ZnO hemostructural light-emitting diode, Jpn. J. Appl. Phys, 40, L177-L179.
[69] S. Liang, H. Sheng, Y. Liu, Z. Hou, Y. Lu, and H. Shen (2000), ZnO schottky ultraviolet photo-detectors, J. Cryst. Growth, 225, 110-113.
[70] H. Kim, C. M. Gilmore, J. S. Horwitz, A. Pique, H. Murata, G. P. Kushto, R. Schlaf, Z.
H. Kafafi, and D. B. Chrisey(2000), Transparent conducting aluminum-doped zinc oxide thin films for organic light-emitting devices, Appl. Phys. Lett., 76, 259-261.
[71] C. Burda, X. Chen, R. Narayanan, and M. A. El-Sayed(2005), Chemistry and properties of nanocrystals of different shapes, Chem. Rev., 105, 1025-1102.
77
[72] A. Ohtomo, M. Kawasaki, Y. Sakurai, I. Ohkubo, R. Shiroki, Y. Yoshida, T. Yasuda, Y.
Segawa, and H. Koinuma(1998), Fabrication of alloys and superlattices based on ZnO towards ultraviolet laser, Mater. Sci. Eng., 56, 263-266.
[73] P. Hersch (1952),Galvanic determination of traces of oxygen in gases, Nature, 169, 792-793.
[74] P. B. Weise (1953),Effect of electronic charge transfer between adsorbate and solid on chemisorption and catalysis, The Journal of Chemical Physics, 21(2), 1531-1538.
[75] J. Weissbart and R. Ruka(1961),Oxygen gauge, Review of Scientific Instruments., 32(5), 593-595.
[76] T Seiyama, A Kato, K Fujiishi, M Nagatani (1962),A new detector for gaseous
components using semiconductive thin films, Analytical Chemistry, 34(11), 1502-1503.
[77] I. Lundstrom, S. Shivaraman, C. Svensson and L. Lundkvist(1975),A hydrogen sensitive MOS field-effect transistor, Appl. Phys. Lett., 26(2), 55-57.
[78] 蔡嬪嬪、曾明漢(1992)，氣體感測器之簡介、應用及市場，材料與社會，68，50-56。
[79] J. Kong, N. R. Franklin, C. Zhou, M. G. Chapline, S. Peng, K. Cho and H. Dei (1999), Nanotube molecular wire as chemical sensors”, Science., 287(5453), 622-625.
[80] Qi Qi, Tong Zhanga, Qingjiang Yu, Rui Wang, Yi Zenga, Li Liu, Haibin Yang (2003), Properties of humidity sensing ZnO nanorods-base sensor fabricated byscreen-printing, Sensors and Actuators B: Chemical, 133, 638-643.
[81] Sahar Hemmati,Azam Anaraki Firooz, , Abbas Ali Khodadadi , Yadollah Mortazavi (2011), Nanostructured SnO2–ZnO sensors: Highly sensitive and selective to ethanol,
Sensors and Actuators B: Chemical, 160, 1298-1303.
[82] Ö . C¸ oban, S. Tekmen, S. Tüzemen (2013), Detection of oxygen with electrochemically deposited ZnO thin films, Sensors and Actuators B: Chemical, 186, 781-788.
[83] 林鴻明(2001)，超微粒半導體氣體感測材料之性質研究，工程科技通訊，59， 52-56。
[84] Hisao Ohmishi, Hirokazu Sasaki, Takeshi Marsumoto and Masmichi Ippommatsu ,
“Sensing mechanism of SnO2 thin gas sensor”, Sensors and Actuators B., vol. 14, no.
1-3, pp. 677-678, 1993.
[85] G. Sberveglieri(1992),Gas sensors, Kluwer Academic Publishers.
[86] 莊睦賢、黃炳照 (1999)，電化學感測器，化工技術，7(2)。
[87] P.T.Moseley, J.O.W Norris, D.E.Williams, (1990),Techniques and mechanisms in gas
sensing, New York :Adam Hilger.
[88] 周瑞福(2011)，氣體感測器原理與應用，綠能與環境，77。
78
[89] 林立德(1987)，光纖概論，台北：全華科技圖書公司。
[90] 廖得照、黃素貞(1995)，光纖技術手冊，台北：全華科技圖書公司。
[91] H. N. Mcmurray(1992),Novel thin optical film sensors for the detection of carbon dioxide, J. Mater. Chem., 2(4) , 401-406.
[92] I. Lundstrom, S. Shivaraman, C. Svensson and L. Lundkvist(1975),A hydrogen sensitive MOS field-effect transistor, Appl. Phys. Lett., 26(2), 55-57.
[93] C. C. Lu, D. Setiadi, F. Udrea, W.I. Milne, J.A. Covington, J.W. Gardner(2000),3D thermo-electro-mechanical simulations of gas sensors based on SOI membranes,
Proceeding of the 3rd International Conference on Modeling and Simulation of Microsystems (MSM 2000)., San Diego, USA.
[94] M.W. Chase, Jr., C.A .Davies, J.R. Downey, Jr., D.J. Frurip, R.A. McDonald, and A.N.
Syverud (1985), JANAF thermochemical tables, J. Phys. Chem. Ref. Data, 14(Suppl 1).
[95] I.Barin, (1885). Thermochemical Data of Pure Substances, VCH, Verlagsgesellshaft mbH, Weumheim.
[96] W. R.Osorio, C. M. Freire, A. Garcia (2005). The effect of the dendritic microstructure on the corrosion resistance of Zn–Al alloys. Journal of Alloys and Compounds, 397, 179–191.
[97] 袁章福，柯家駿，李晶(2006)，金屬及合金的表面張力，中國：科學出版社。
[98] 郭金國、陳建仲、陳漢龍(2007，11 月)，壓鑄法製作合金奈米線，兩岸機電暨重要 特色領域人才培育改進計劃學術研討會論文集，新竹:台灣。
[99] Y. H. ZHU, G. T. Villasenor, C. Pina (1994), Complex microstructural changes in as-cast eutectoid Zn-Al alloy, JOURNAL OF MATERIALS SCIENCE, 29, 1549-1552.