• 沒有找到結果。

化學氣相沉積反應器之數值模擬

N/A
N/A
Protected

Academic year: 2021

Share "化學氣相沉積反應器之數值模擬"

Copied!
74
0
0

加載中.... (立即查看全文)

全文

Loading

數據

圖 1-1 CVD 系統組成示意圖[32]
圖 1-3 垂直式反應器示意圖[33]
圖 1-5 晶圓上方 SiHCl 3 質量分率受熱擴散效應之影響[7]
圖 1-7 不同進氣口型式對薄膜沉積均勻度之影響[19]
+7

參考文獻

Outline

相關文件

and Dagtekin, I., “Mixed convection in two-sided lid-driven differentially heated square cavity,” International Journal of Heat and Mass Transfer, Vol.47, 2004, pp. M.,

An integrated photovoltaic /thermal (PV/T) air collector to collect hot air and drive air flow, and mixing the air flow from earth-air heat exchanger (EAHE) and hot air flow to

and Peterson, G., “Convective Heat Transfer and Flow Friction for Water Flow in Microchannel Structures,” Int. Heat and Mass

Approach and a Boundary Element Method for the Calculation of Sound Fields in the Human Ear Canal, " Journal of the Acoustical Society of America, 118(4), pp. Axelsson,

Pollard, 1996, “Heat transfer in separated and impinging turbulent flows”, International Journal of Heat Mass Transfer, Vol.. Mistry, 2001, “Impingement heat transfer in

[23] Yang-Yao Niu, ‘Simple Conservative Flux Splitting For Multi-Component Flow Calculations‘, Numerical Heat Transfer, Part B, 38:203-222, 2000. [24] Hirsch, C., ‘Finite Volume

A., “Analysis of stability of bioconvection of motile oxytactic bacteria in a horizontal fluid saturated porous layer,” International Communications in Heat and Mass Transfer,

Avramenko, “Analysis of stability of bioconvection of motile oxytactic bacteria in a horizontal fluid saturated porous layer,” International Communication Heat Mass Transfer,