DESIGN AND FABRICATION OF A MICRO GAS CHROMATOGRAPHY SYSTEM 陳仕荃、李佳言 ; 紀華偉
E-mail: [email protected]
ABSTRACT
This paper exploits the realization of wet-etched micro gas chromatography columns for portable gas analysis system. A platinum layer is deposited on the Pyrex 7740 glass wafer to form a heater. MEMS technologies are used to deposit a silicon nitride layer on a silicon wafer to form a etch mask in the wet-etching process. The channel patterns are fabricated using RIE to etch the silicon nitride layer and then wet-etching. After the channels are etched, a glass wafer was bonded as the top plate to form the columns. The micro gas chromatography chip (GC-on-a-chip) is then formed by trapezoid cross section columns which separate gas mixtures with the same performance as commercial fused silica capillary columns.
Keywords : Gas Chromatography (GC) ; Microfluidic Chips ; Bulk Micromaching ; Thermal Bonding Table of Contents
第一章 緒論 1.1前言………1 1.2微機電系統發展………
………2 1.3化學氣相層析系統之概述………4 1.4文獻回顧………
………6 1.5研究動機與目的………6 第二章 原理與設計 2.1研究目的………8 2.2化學氣相層析分離原理………
………8 2.3微流道光罩補償設計………11 2.4接合原理與設計…
………15 2.5微流道尺寸設計與原理………16 第 三章 化學氣相層析系統製程與設計 3.1製程處理………21
3.2Gc_on_a_Chip流道製程步驟………35 3.3Gc_on_a_Chip接合製程步驟………
………43 3.4Gc_on_a_Chip管壁塗佈製程步驟………51 3.5Gc_on_a_Chip實體外觀……
………57 第四章 結果與討論 4.1分析儀器介紹………
……61 4.2微型氣相層析系統………62 4.3分析模組建構………
………63 4.4單一氣體濃縮化學氣相層析………65 4.5多種氣體化學氣相層析
………70 4.6微型白金恆溫系統………82 第五章 結論 5.1結論………86 5.2未來展望………
………87 參考文獻 ………89 REFERENCES
[1]Masoud Agah and Kensall D. Wise, “Low-Mass PECVD Oxynitride Gas Chromatographic Columns,” Wise, IEEE MEMS 2007,pp.853-860 [2]Gordon Lambertus, Andrea Elstro, Kathryn Sensenig, Joseph Potkay, Masoud Agah, Susan Scheuering, Kensall Wise, Frank Dorman and Richard Sacks,“Design, fabrication, and evaluation of micofabricated columns for gas chromatography,” Anal.Chem 2004, 76, pp. 2629 -2637.
[3]S.Vezzani, P.Moretti, G.Castello, “Predication of the separation of capillary columns in programmed temperature gas chromatographic analysis,”Elsever Analytica Chimica Acta 559, pp. 151-161, 2007.
[4]M. Khoo, C. Lin,“A Novel Micromachined Magnetic Membrane Microfluid Pump”, Proceedings of the 22nd Annual EMBS International Conference, July 23-23, pp. 2394-2397, 2000.
[5]薛子涵，微懸臂風速風向感測器，大葉大學，博士論文，2008。
[6]王禹翔，應用於高氣體流速微懸臂流量感測器，大葉大學，碩士論文，2006。
