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鎳矽氧化物與鎳矽氮化物奈米點在非揮發性記憶體應用之研究

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國 立 交 通 大 學

電子工程學系

電子研究所

碩士論文

鎳矽氧化物與鎳矽氮化物奈米點在非揮發

性記憶體應用之研究

Study on the Application of Ni -Si-O and Ni-Si-N

Nanocrystal for Nonvolatile Memory

研 究 生:葉睿龍

指導教授:羅正忠

博士

葉清發

博士

(2)

鎳矽氧化物與鎳矽氮化物奈米點在非揮發性

記憶體應用之研究

Study on the Application of Ni-Si-O and Ni-Si-N

Nanocrystal for Nonvolatile Memory

研 究 生:葉睿龍 Student:Jui-Lung Yeh

指導教授:羅正忠 博士 Advisor:Dr. Jen-Chung Lou

葉清發 博士 Advisor:Dr. Ching-Fa Yeh

國 立 交 通 大 學

電子工程學系 電子研究所

碩 士 論 文

A Thesis

Submitted to Department of Electronics Engineering and Institute of Electronics

College of Electrical and Computer Engineering National Chiao Tung University

In Partial Fulfillment of the Requirements For the Degree of Master

In

Electronics Engineering June 2007

Hsinchu, Taiwan, Republic of China

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