Growth of GaAs Solar Cells on Ge Substrates by Metal Organic Vapor Phase Epitaxy 蔡光岳、蕭宏彬
E-mail: [email protected]
ABSTRACT
The thesis was devoted to the growth of high quality GaAs Solar Cells on Ge substrates using metal-organic vapor-phase epitaxy (MOVPE) technique. According to published references, a two-step growth process must be adopted to grow high quality GaAs epi-layers on Ge substrates. The two-step growth process needs a nucleation layer grown at lower temperature. In this work, the conditions of the nucleation layer, including growth temperature and thickness, were varied to study the effect on the GaAs
epi-layers’ quality. First, GaAs epi-layers were grown on Ge substrates with various nucleation layers. The surface flatness of GaAs epi-layers was examined with atomic force microscopy (AFM). The crystallization of GaAs epi-layers was examined with
high-resolution x-ray diffractometer (HR-XRD). Finally, the samples of GaAs solar cells grown on Ge substrates with various nucleation layers were prepared to evaluate the device performance.
Keywords : MOVPE ; GaAs ; Ge ; Nucleation layer ; GaAs Solar Cell Table of Contents
封面內頁 簽名頁 授權書．．．．．．．．．．．．．．．．．．．．．．．．． iii 中文摘要．．．．．．．．．．．．
．．．．．．．．．．．． iv 英文摘要．．．．．．．．．．．．．．．．．．．．．．．． v 誌謝．．．．．．．．．
．．．．．．．．．．．．．．．．． vi 目錄．．．．．．．．．．．．．．．．．．．．．．．．．． vii 圖目錄．．
．．．．．．．．．．．．．．．．．．．．．．． ix 表目錄．．．．．．．．．．．．．．．．．．．．．．．．．xi 第一章 序論 1.1 前言．．．．．．．．．．．．．．．．．．．． 1 1.2 動機．．．．．．．．．．．．．．．．．．．
． 2 1.3太陽電池原理．．．．．．．．．．．．．．．．． 4 1.4同異質磊晶技術．．．．．．．．．．．．．．．． 10 1.4.1異質磊晶．．．．．．．．．．．．．．．． 10 1.4.2 成核層．．．．．．．．．．．．．．．．． 12 第二章 MOVPE系統與沉積機制介紹 2.1有機金屬化學氣相沉積法．．．．．．．．．．．． 13 2.2 MOVPE系統簡介．．．．
．．．．．．．．．．． 13 2.2.1反應腔．．．．．．．．．．．．．．．．． 14 2.2.2反應源及氣體控制．．．．．．．
．．．．． 16 2.3沈積機制．．．．．．．．．．．．．．．．．．． 18 第三章 成長條件設計與元件製程 3.1成長條件．
．．．．．．．．．．．．．．．．．20 3.2量測系統介紹．．．．．．．．．．．．．．．．21 3.2.1 HR-XDR 高解析X 光繞射儀．．．．．．．21 3.2.2 AFM 原子力顯微鏡．．．．．．．．．．．． 23 3.2.3太陽光模擬器．．．．．．．．
．．．．．． 25 3.3製作元件流程．．．．．．．．．．．．．．．． 28 第四章 結果與討論 4.1表面粗糙度與晶膜半高寬
．．．．．．．．．．．30 4.2成長砷化鎵太陽能電池．．．．．．．．．．．．38 第五章 結論．．．．．．．．．．．
．．．．．．．．．．．44 參考文獻．．．．．．．．．．．．．．．．．．．．．．．．45 REFERENCES
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