Design and fabrication interdigitated electrodes piezoelectric device 許文誌、鄭江河
E-mail: [email protected]
ABSTRACT
The conventional piezoelectric ceramic has fragile shortcoming when being used, the development of novel piezoelectric component possessing high sensing or actuating performance as well as flexible structure is the future tendency. In order to improve sensing and actuating capability of the piezoelectricity component, poling electrode arranged with surface interdigital pattern is required for high performance 33 d piezoelectric property. This study performs an optimal analysis for the design of the electrode arrangement utilizing commercial finite element code, ANSYS. The poling field is analyzed with various sizes of electrode pitch and thickness of the piezoelectric sample under different poling voltages. And the optimal electrode pitch and poling voltage under some thickness is obtained. The numerical results are verified by experimental result. It is expected the smart piezoelectric component owns flexible ability as well as high performance of sensing and actuating capability.
Keywords : Piezoelectric, interdigitated electrodes , poling
Table of Contents
簽名頁 授權書... iii 中文摘要... iv 英文摘 要... v 誌謝... vi 目
錄... vii 圖目錄... x 表目
錄... xii 符號說明... xiii 第一章 問題描 述... 1 1.1 緣起... 1 1.2 研究背景與動 機... 1 1.3 文獻回顧... 8 1.3.1 國外目前研究現 況... 8 1.3.2 國內目前研究現況...12 1.4 研究方向與目
標...14 第二章 壓電材料簡介...17 2.1 壓電材料之結構種 類...17 2.2 鐵電性...18 2.3 壓電特
性...20 2.4 壓電元件種類...21 第三章 指叉型極化壓 電元件之設計分析...22 3.1 壓電元件之參數設定...23 3.2 介電常數對極化過程 影響之分析...24 3.3 極化之矯頑電場探討...25 3.3.1 單面與雙面電極對極化電場的 影響...27 3.3.2 元件厚度對極化電場的影響...29 3.3.3 極化間距對極化電場的影
響...30 3.4 壓電元件之位移量分析...34 第四章 指叉型極化壓電元件之製程方 法...38 4.1 指叉型電極極化壓電元件之製程簡介...38 4.2 壓電粉末之製
作...39 4.2.1 粉料之混合...39 4.2.2 粉末之鍛
燒...39 4.2.3 粉碎...40 4.2.4 特性調節及降燒劑的 添加...40 4.3 調漿混料與刮刀成型...40 4.4 積層堆
疊...42 4.5 燒結緻密...43 4.6 指叉型電極製 作...45 4.7 胚片極化...47 4.8 特性量
測...51 第五章 實驗方法與量測...55 5.1 實驗設 備...55 5.2 極化條件對元件特性的影響...60 5.3 固定條件下，單面 與雙面電極對極化製程之影響...61 5.4 固定條件下，極化間距與位移量之關係...63 第六章 結
論...65 6.1 結論...65 6.2 未來研究方 向...66 參考文獻...67
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