極大型積體電路之深次微米元件及多層連線分析及模擬的研究(II)

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(59) !!!Npefm!g ps!Ipu.Dbssjfs!Cboe.up .Cboe!! !!!Uvoofmjoh!Dvssfou-!“!JFFF!Usbot/!Fmfduspo!! !!!Efwjdft-!Wpm/FE.57-!Op/7-qq/2285.228:-!! !!!Kvof!)2:::*! ! \47^Z/.M/!Div!boe!E/.X/!Mjo-!boe!D/.Z/!Xv-!“B!! !!!Ofx !D ib shf .Q vn qjo h! Uf di ojr vf !g ps!! !!!Qspgjmjoh!uif!Joufsgbdf.Tubuft!boe!Pyjef.!! !!!Usbqqfe !Dibs hft!jo!NP TGFU’t!“!JFFF!! !!!Usbot/!Fmfduspo!Efwjdft-!Wpm/FE.58-!Op/3-!! !!!qq/459.464-!Gfc/!)3111*! ! \48^ Z/. M/! Div !bo e!D /.Z /!X v-!“!B!O fx!! !!!Pcftfswbujpo!pg!Cboe.up.Cboe!Uvoofmjoh! !!!Joevdfe!Ipu.Dbssjfs!Tusftt!Vtjoh!Dibshf.! !!!Qvnqjoh!Ufdiojrvf-”!JFFF!Fmfduspo!Efwjdf!! !!!Mfuufst-!Wpm/!FEM.32-!Op/!4-!qq/234.237-!! !!!Nbsdi!)3111*! ! \49Î/.N/!Ipv-!D/.T/!Tiffo!boe!D/.Z/!Xv-!“B!! !!!Opwfm!4.E!Dbqbdjubodf!Npefmjoh!gps!VMTJ! !!!Nvmujmfwfm!Joufsdpoofdujpot!po!Dpnqmfy! !!!Upqphsbqiz”!Tvcnjuufe!up!JFFF!Usbot/! !!!Dpnqvufs.Bjefe!Eftjho!pg!Joufhsbufe!! !!!Djsdvjut!boe!Tztufn!gps!qvcmjdbujpo/!! ! \4:^Z/.M/Div!boe!D/.Z/!Xv-!“B!Ofx!Epqjoh!! !!!Ejtusjcvujpo!Npefm!gps!uif!Sfwfstf!Tipsu.! !!!D i b oo f m! F gg f du !p g !T i ps u .D i bo o f m!! !!!NPTGFU’t-!“!Tvcnjuufe!up!JFFF!Usbot/!! !!!Fmfduspo!Efwjdft!gps!qvcmjdbujpo/!!! ! ! !. 7.

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